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US 10,137,665 B2Granted
Method for manufacturing laminate, and laminate
AssigneeTokyo Ohka Kogyo Co., Ltd.
InventorsTakuya Noguchi, Takahiro Senzaki, Toshiyuki Ogata
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Abstract
After bringing a water-containing peeling liquid in contact with a thin flat film formed on a substrate, a support film including a cover film having one main surface thereof is laminated onto the flat film, such that the support film is in contact with the flat film, a cover film-attached laminate composed of a support film and a cover film is then separated from the substrate, and the laminate including the flat film and the support film is separated from the cover film-attached film.
Claims9
A laminate comprising a flat film and a support film, wherein:
- the flat film has a thickness of 1000 nm or less, and does not have through-pores with an opening diameter of 1 nm or more;
- the support film is a porous film having a surface roughness of 100 nm or less;
- a plurality of openings in the main surface of the support film have an average diameter below 1000 nm;
- and
- the main surface of the support film has an opening ratio of 40 area % or less.
2 more elements
Dependencies are inferred from the claim text.