Sprayed article and making method
AssigneeShin-Etsu Chemical Co., Ltd.
InventorsNoriaki Hamaya, Ryoji Iida, Noboru Yamamoto
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Abstract
A sprayed article is prepared by thermally spraying ceramic particles of rare earth oxide or fluoride or metal particles of W, Mo or Ta onto an outer or inner surface of a cylindrical carbon substrate to form a sprayed coating, and burning out the carbon substrate, thus leaving the ceramic or metal-base sprayed coating of cylindrical shape having a wall thickness of 0.5-5 mm.
Claims10
A sprayed article consisting of a sprayed body of cylindrical or cup shape comprising a rare earth oxide and/or rare earth fluoride ceramic material and having a wall thickness of 0.5 to 5 mm and an inner diameter at its cylinder portion of 200 to 600 mm and a sprayed coating comprising a rare earth oxide and/or rare earth fluoride ceramic material formed on the inner circumferential surface of the cylinder portion of the sprayed body,
- wherein the cylinder portion of the sprayed article has an ID roundness of 0.25 mm or less and/or an OD roundness of 0.20 mm or less.
A sprayed article consisting of a sprayed body of cylindrical or cup shape comprising a rare earth oxide and/or rare earth fluoride ceramic material and having a wall thickness of 0.5 to 5 mm and an outer diameter at its cylinder portion of 180 to 580 mm and a sprayed coating comprising a rare earth oxide and/or rare earth fluoride ceramic material formed on the outer circumferential surface of the cylinder portion of the sprayed body,
- wherein the cylinder portion of the sprayed article has an ID roundness of 0.25 mm or less and/or an OD roundness of 0.20 mm or less.
Dependencies are inferred from the claim text.