Charged particle beam device

A charged particle beam device comprising:

• a charged particle optical column that irradiates a specimen held in a specimen base with a primary charged particle beam;
• a specimen stage in which the specimen base is arranged in an attachably detachable manner;
• and
• an angle control unit that controls a relative angle between the primary charged particle beam and the specimen with a first axis and a second axis different from the first axis,
• wherein the specimen base is configured to include a detector that detects a charged particle scattered or transmitted inside the specimen, and
• transmitted charged particle images of the specimen corresponding to each relative angle are acquired by performing irradiation with the primary charged particle beam at a plurality of the different relative angles in the first axis and in the second axis.

A charged particle beam device comprising:

• a charged particle optical column that irradiates a specimen held in a specimen base with a primary charged particle beam;
• a specimen stage in which the specimen base is arranged in an attachably detachable manner;
• a specimen base inclining unit that inclines an angle formed by a surface of the specimen base and an optical axis of the primary charged particle beam to a non-perpendicular angle with an inclination axis different from an inclination axis of the specimen stage;
• and
• a control unit that controls an inclination angle of the specimen base inclining unit,
• wherein the specimen base is configured to include a detecting unit that detects a charged particle scattered or transmitted inside the specimen, and
• transmitted charged particle images of the specimen corresponding to each relative angle are acquired by inclining the specimen base at a plurality of the different relative angles with the inclination axis different from the specimen stage and by irradiating the specimen with the primary charged particle beam.