Method of performing aging for a process chamber
AssigneeSemes Co., Ltd.
InventorSung Min Lim
Life of this patent
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Abstract
A method of aging a substrate-processing apparatus according to the inventive concepts may include receiving advance information of a scheduled substrate-receiving container to be loaded on a load port of the substrate-processing apparatus from a host computer, and loading a test substrate into a process chamber to perform an inspection process by means of the advance information.
Claims6
A method of performing aging for a process chamber included in a substrate-processing apparatus, the substrate-processing apparatus including a process substrate carrier configured to receive process substrates, a load port on which the process substrate carrier transported by a distribution automation apparatus is loaded, and a test substrate container configured to receive at least one test substrates, the method comprising:
- receiving, by the substrate-processing apparatus, in advance schedule information with regard to the process substrate carrier to be loaded on the load port, from a processor configured to output a transfer control signal for the distribution automation apparatus to transfer the process substrate carrier;
- and
- performing the aging by loading the test substrate into the process chamber to and making a process environment in the process chamber based on the schedule information.
Dependencies are inferred from the claim text.