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AssigneeInPhenix, Inc.
InventorsToshihiko Makino, Tongning Li, David Eu
Estimating the term…
A wavelength-tunable vertical-cavity surface-emitting laser (VCSEL) with the use of microelectromechanical system (MEMS) technology is provided as a swept source for Optical Coherence Tomography (OCT). The wavelength-tunable VCSEL comprises a bottom mirror of the VCSEL, an active region, and a MEMS tunable upper mirror movable by electrostatic deflections. The bottom mirror comprising a GaAs based distributed Bragg reflector (DBR) stack, and the active region comprising multiple stacks of GaAs based quantum dot (QD) layers, are epitaxially grown on a GaAs substrate. The MEMS tunable upper mirror includes a membrane part supported by suspension beams, and an upper mirror comprising a dielectric DBR stack. The MEMS tunable quantum dots VCSEL can cover an operating wavelength range of more than 100 nm, preferably with a center wavelength between 250 and 1950 nm, and the sweeping rate can be from a few kHz to hundreds of kHz, and up to a few MHz.
A microelectromechanical system (MEMS) tunable vertical cavity surface-emitting laser (VCSEL) comprising an air gap, an anti-reflective (AR) coating, and one or more layers of quantum dots situated in between an upper and a lower distributed Bragg reflector (DBR), wherein the VCSEL has a tunable range of 100-200 nm, and the one or more layers of quantum dots comprise quantum dots having a center wavelength in the range of 250-1950 nm.
Dependencies are inferred from the claim text.