Piezoelectric positioning device and positioning method by means of such a piezoelectric positioning device
AssigneeCarl Zeiss SMT GmbH
InventorsChristian Kempter, Ulrich Korten, Juergen Anic
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Abstract
A piezoelectric positioning device (1) has at least one piezoelectric actuator (3) having a first connection contact (4) and a second connection contact (5). A control device (6) with digital/analog converters (12, 16) connected to the connection contacts (4, 5) is used to control the at least one piezoelectric actuator (3). In comparison with a coarse converter (12), a fine converter (16) has a comparatively smaller voltage range and lower voltage levels, with the result that a high degree of positioning accuracy can be achieved.
Claims18
A piezoelectric positioning device comprising:
- at least one piezoelectric actuator comprising, respectively, a first connection contact and a second connection contact,
- a control device configured to control the at least one piezoelectric actuator, and comprising:
- a first digital/analog converter connected to the first connection contact and providing a first analog converter output voltage U1 in a first voltage range ΔU1 in first voltage levels Δu1,
- wherein the first digital/analog converter has n bits and a first digital input of the first digital/analog converter accepts 2n digital input values, wherein the first voltage levels Δu1 are determined by the first voltage range ΔU1 and the 2n digital input values,
- a second digital/analog converter connected to the second connection contact and providing a second analog converter output voltage U2 in a second voltage range ΔU2 in second voltage levels Δu2, wherein the second digital/analog converter has m bits and a second digital input of the second digital/analog converter accepts 2m digital input values, wherein the second voltage levels Δu2 are determined by the second voltage range ΔU2 and the 2m digital input values,
- where:
- ΔU1>ΔU2≥Δu1>Δu2.
A piezoelectric positioning device comprising:
- at least one piezoelectric actuator comprising, respectively, a first connection contact and a second connection contact,
- a control device configured to control the at least one piezoelectric actuator, and comprising:
- a first digital/analog converter connected to the first connection contact and providing a first analog converter output voltage U1 in a first voltage range ΔU1 in first voltage levels Δu1, wherein the first digital/analog converter has n bits and a first digital input of the first digital/analog converter accepts 2n digital input values, wherein the first voltage levels Δu1 are determined by the first voltage range ΔU1 and the 2n digital input values,
- a second digital/analog converter connected to the second connection contact and providing a second analog converter output voltage U2 in a second voltage range ΔU2 in second voltage levels Δu2, wherein the second digital/analog converter has m bits and a second digital input of the second digital/analog converter accepts 2m digital input values, wherein the second voltage levels Δu2 are determined by the second voltage range ΔU2 and the 2m digital input values,
- where:
- ΔU1>ΔU2≥Δu1>Δu2,
- wherein the second voltage range ΔU2 lies at least partially outside of the first voltage range ΔU1,
- a first voltage amplifier arranged downstream of the first digital/analog converter and a second voltage amplifier arranged downstream of the second digital/analog converter,
- a non-reactive resistor connected between the second voltage amplifier and the second connection contact, and
- a low-pass filter connected between the first digital/analog converter and the first voltage amplifier.
Dependencies are inferred from the claim text.