Back to results
US 10,128,079 B2Granted
MEMs frame heating platform for electron imagable fluid reservoirs or larger conductive samples
AssigneeProtochips, Inc.
InventorsFranklin Stampley Walden, II, John Damiano, Jr., Daniel Stephen Gardiner, David P. Nackashi, William Bradford Carpenter
Life of this patent
Estimating the term…
Abstract
A heating device having a heating element patterned into a robust MEMs substrate, wherein the heating element is electrically isolated from a fluid reservoir or bulk conductive sample, but close enough in proximity to an imagable window/area having the fluid or sample thereon, such that the sample is heated through conduction. The heating device can be used in a microscope sample holder, e.g., for SEM, TEM, STEM, X-ray synchrotron, scanning probe microscopy, and optical microscopy.
Claims20
A device comprising:
- (a) at least one observation region, (b) a thermally conductive structural frame which supports and flanks the observation region, and (c) at least one heat source element supported by the thermally conductive structural frame, wherein the at least one heat source element flanks but does not contact the at least one observation region, and wherein the thermally conductive structural frame is heated by the at least one heat source element.
Dependencies are inferred from the claim text.