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US 10,126,190 B2Granted
Capacitive force sensor and grasping device
AssigneeCanon Kabushiki Kaisha
InventorsYasuhiro Soeda, Yasuhiro Shimada
Life of this patent
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Abstract
A capacitive force sensor 101 of the present invention includes a plurality of cells each including a lower electrode 104, a movable member that includes an upper electrode 107 and has flexibility, and a support 105b arranged to movably support the movable member and to form a gap 106 between the upper and the lower electrodes. The plural cells are grouped into elements each including one or more of the cells, and the one or more cells in a same element are electrically connected to each other.
Claims13
A capacitive force sensor for measuring based on contacting with an object, comprising:
- a plurality of cells each including a lower electrode, a movable member that includes an upper electrode and has flexibility, and a support arranged to movably support the movable member and to form a gap between the upper electrode and the lower electrode,
- wherein the plural cells are grouped into elements each including at least the plural cells, and in a same element, the lower electrodes are electrically connected to each other and the upper electrodes are electrically connected to each other, and between different elements, at least ones of the upper electrodes and the lower electrodes are electrically separated from each other;
- and
- wherein at least a part of the elements is covered at its surface with an elastic body having a smaller longitudinal elasticity modulus than that of the support, and
- wherein the thickness of the elastic body is larger than a height of the gap.
2 more elements
Dependencies are inferred from the claim text.