MEMS devices having discharge circuits
AssigneeSkyworks Solutions, Inc.
InventorsJerod F. Mason, Dylan Charles Bartle, David Scott Whitefield, David T. Petzold, Dogan Gunes, Paul T. DiCarlo
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AssigneeSkyworks Solutions, Inc.
InventorsJerod F. Mason, Dylan Charles Bartle, David Scott Whitefield, David T. Petzold, Dogan Gunes, Paul T. DiCarlo
Estimating the term…
MEMS devices having discharge circuits. In some embodiments, a MEMS device can include a substrate and an electromechanical assembly implemented on the substrate. The MEMS device can further include a discharge circuit implemented relative to the electromechanical assembly. The discharge circuit can be configured to provide a preferred arcing path during a discharge condition affecting the electromechanical assembly. The MEMS device can be, for example, a switching device, a capacitance device, a gyroscope sensor device, an accelerometer device, a surface acoustic wave (SAW) device, or a bulk acoustic wave (BAW) device. The discharge circuit can include a spark gap assembly having one or more spark gap elements configured to facilitate the preferred arcing path.
A microelectromechanical systems (MEMS) contact switching device comprising:
A method for fabricating a microelectromechanical systems (MEMS) contact switching device, the method comprising:
A radio-frequency module comprising:
Dependencies are inferred from the claim text.