# US 10,122,924 B2 · Camera modules using MEMS micro electrostatic pistontube actuators for autofocus (AF) and optical image stabilization (OIS) > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 10,122,924 B2 - Document ID: US10122924B2 - Status: Granted - Kind: B2 - Application number: 15/413,210 - Filed: 2017-01-23 - Published: 2018-07-26 - Granted: 2018-11-06 - Earliest claimed: 2017-01-23 - Applicants: Faez Ba-Tis; Ridha Ben-Mrad - Inventors: Faez Ba-Tis; Ridha Ben-Mrad - Web page: https://patentgrep.com/patent/US10122924B2 ## CPC - H04N 23/687: {by shifting the lens or sensor position} - H04N 23/54: Mounting of pick-up tubes, electronic image sensors, deviation or focusing coils - H04N 23/55: Optical parts specially adapted for electronic image sensors; Mounting thereof - H04N 23/67: Focus control based on electronic image sensor signals - H04N: PICTORIAL COMMUNICATION, e.g. TELEVISION ## Abstract Miniature camera modules that achieve autofocus (AF) and optical image stabilization (OIS) using piston-tube electrostatic actuators are disclosed. Various embodiments of the camera modules that work on two main mechanisms are disclosed. The two mechanisms are the whole barrel motion leading to AF and OIS and the single lens motion leading to AF. The MEMS actuator is integrated within a housing which is, in turn, coupled with an image sensor module. Autofocus is achieved by a translational motion of the piston-tube electrostatic actuator to translate the whole barrel back and forth. OIS is achieved by tilting the whole barrel using the tilting action of the piston-tube actuator. ## Claims ### Claim 1 A microelectronic mechanical system (MEMS) camera module, comprising: a) a MEMS electrostatic piston-tube actuator comprising: i) a stator plate having a central stator-opening, a multiple subarrays of pistons extending outwardly and perpendicular to said stator plate, each piston having a piston-wall, said pistons surrounding said central stator-opening, wherein the pistons in each subarray of pistons being electrically connected to each other, and the pistons in each subarray of pistons being electrically insulated from the pistons in other subarrays of pistons, and wherein each subarray of pistons being electrically addressable; ii) a rotor plate having a central rotor-opening and an array of spaced apart through apertures or tubes surrounding said central rotor-opening fabricated in the rotor plate, wherein said apertures being vertically aligned with said pistons, and wherein each aperture having an aperture opening sized and shaped to receive and interdigitate with each piston without the piston-walls touching the walls of said each aperture during a rotation, and the walls of said apertures being electrically connected to each other, iii) a plurality of springs connecting said apertures to a non-moving frame, wherein during an actuation in response to electrostatic forces from a drive voltage applied between one or more subarrays of pistons and the rotor plate, the rotor plate translates along z-axis and tilts about x and y axes; b) a lens barrel containing at least one lens that is attached to said central rotor-opening and extending through said central stator-opening; c) a housing that is sized to fit and receive said MEMS electrostatic piston-tube actuator containing said lens barrel; d) an image sensor module that is sized to fit and receive said housing; e) an autofocus (AF) module to achieve AF by moving the lens barrel along the z-axis, and f) an optical image stabilization (OIS) module to achieve OIS by tilting the lens barrel about the x and y axes. ### Claim 2 (depends on 1) The MEMS camera module of claim 1, wherein said MEMS electrostatic piston-tube actuator has a lens barrel holder to facilitate the attachment of the lens barrel into the central stator-opening of the MEMS electrostatic piston-tube actuator, wherein said lens barrel holder can absorb a pressing force during the attachment of the lens barrel to the MEMS electrostatic piston-tube actuator, and wherein said lens barrel holder has a thickness substantially equal to the total thickness of the MEMS electrostatic piston-tube actuator. ### Claim 3 (depends on 2) The MEMS camera module of claim 2, wherein said lens barrel holder comprising of an upper part and a lower part, wherein said upper part is formed by the thickness of the rotor plate, and said lower part is formed by the thickness of the stator plate. ### Claim 4 (depends on 3) The MEMS camera module of claim 3, wherein said lens barrel holder is fabricated by a back side etching step during a fabrication process of the MEMS electrostatic piston-tube actuator to separate the lower part from the stator plate by a predefined gap, and wherein said rotor plate is attached to a non-moving rotor-support-frame using the plurality of springs. ### Claim 5 (depends on 1) The MEMS camera module of claim 1, wherein said MEMS electrostatic piston-tube actuator has a circular, triangular, squared, pentagonal, or hexagonal outer periphery shape. ### Claim 6 (depends on 1) The MEMS camera module of claim 1, wherein said lens barrel is circular or squared. ### Claim 7 (depends on 1) The MEMS camera module of claim 1, wherein said lens barrel is attached to said MEMS electrostatic piston-tube actuator using press-fit or thread-fit. ### Claim 8 (depends on 1) The MEMS camera module of claim 1, wherein the lens barrel contains a plurality of optical lenses. ### Claim 9 (depends on 1) The MEMS camera module of claim 1, wherein said lens barrel has a straight-barrel or a stepped-barrel design. ### Claim 10 (depends on 1) The MEMS camera module of claim 1, wherein said lens barrel further contains an IR filter. ### Claim 11 (depends on 10) The MEMS camera module of claim 10, wherein said IR filter is placed between said image sensor and the housing. ### Claim 12 (depends on 1) The MEMS camera module of claim 1, wherein said lens barrel weighs at least 10 milligrams. ### Claim 13 (depends on 1) The MEMS camera module of claim 1, wherein said lens barrel moves up to 100 microns to achieve AF. ### Claim 14 (depends on 1) The MEMS camera module of claim 1, wherein said image sensor module contains an image sensor die mounted on a printed/flexible circuit board or an image sensor package. ### Claim 15 (depends on 1) The MEMS camera module of claim 1, wherein said image sensor module contains an image sensor die mounted on a printed board circuit or an image sensor package and a base sized to fit and receive said housing. ### Claim 16 A microelectronic mechanical system (MEMS) camera module, comprising: a) a MEMS electrostatic piston-tube actuator comprising: i) a stator plate having a central stator-opening, multiple subarrays of pistons extending outwardly and perpendicular to said stator plate, each piston having a piston-wall, said pistons surrounding said central stator-opening, wherein the pistons in each subarray of pistons being electrically connected to each other, and the pistons in each subarray of pistons being electrically insulated from the pistons in other subarrays of pistons, and wherein each subarray of pistons being electrically addressable; ii) a rotor plate having a central rotor-opening and an array of spaced apart through apertures or tubes surrounding said central rotor-opening fabricated in the rotor plate, wherein said apertures being vertically aligned with said pistons, and wherein each aperture having an aperture opening sized and shaped to receive and interdigitate with each piston without the piston-walls touching the walls of said aperture during a rotation, and the walls of said apertures being electrically connected to each other, iii) a plurality of springs connecting said apertures to a non-moving frame, wherein during an actuation in response to electrostatic forces from a drive voltage applied between one or more subarrays of pistons and the rotor plate, the rotor plate translates and tilts in any direction; b) at least one moving lens attached to a central opening of said MEMS electrostatic piston-tube actuator; c) a lens barrel containing at least one fixed lens; d) a housing that is sized to fit and receive said MEMS electrostatic piston-tube actuator containing said at least one moving lens and said lens barrel that contains said at least one fixed lens; e) an image sensor module that is sized to fit and receive said housing; f) an autofocus (AF) module to achieve AF by moving the lens barrel along z-axis, and g) an optical image stabilization (OIS) module to achieve OIS by tilting the lens barrel about x and y axes. ### Claim 17 (depends on 16) The MEMS camera module of claim 16, wherein said MEMS electrostatic piston-tube actuator has an extended lens barrel holder that has a thickness substantially equal to said thickness of said MEMS actuator, whereby said extended lens holder facilitates the attachment of the lens barrel into the central opening of the MEMS electrostatic piston-tube actuator. ### Claim 18 (depends on 16) The MEMS camera module of claim 16, wherein said at least one fixed lens has a straight-barrel or a stepped-barrel design and a set of lenses inside the lens barrel are mounted with respect to each design. ### Claim 19 (depends on 16) The MEMS camera module of claim 16, wherein said MEMS electrostatic piston-tube actuator achieves a zooming feature for objects being captured by selectively moving one or multiple lenses within the lens barrel.