# US 10,122,150 B1 · Nonequilibrium pulsed femtosecond semiconductor disk laser

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- Number: US 10,122,150 B1
- Document ID: US10122150B1
- Status: Granted
- Kind: B1
- Application number: 15/814,087
- Filed: 2017-11-15
- Published: 2018-11-01
- Granted: 2018-11-06
- Earliest claimed: 2014-09-22
- Assignees: Arizona Board of Regents on Behalf of the University of Arizona
- Applicants: Arizona Board of Regents on behalf of The University of Arizona
- Inventors: Isak R. Kilen; Stephan W. Koch; Jerome V. Moloney
- Web page: https://patentgrep.com/patent/US10122150B1

## CPC

- H01S 5/065: Mode locking; Mode suppression; Mode selection {; Self pulsating}
- H01S 3/0604: {in the form of a plate or disc}
- H01S 3/1115: using intracavity saturable absorbers
- H01S 3/1118: Semiconductor saturable absorbers, e.g. semiconductor saturable absorber mirrors [SESAMs]; Solid-state saturable absorbers, e.g. carbon nanotube [CNT] based
- H01S 5/042: Electrical excitation {; Circuits therefor (monolithically integrated laser drive components H01S5/0261)}
- H01S 5/0657: {Mode locking, i.e. generation of pulses at a frequency corresponding to a roundtrip in the cavity}
- H01S 5/14: External cavity lasers (H01S5/18 takes precedence; mode locking H01S5/065)
- H01S 5/18383: {with periodic active regions at nodes or maxima of light intensity}
- H01S 5/187: using Bragg reflection
- H01S 3/094026: {for synchronously pumping, e.g. for mode locking}
- H01S 5/02484: {Sapphire or diamond heat spreaders}
- H01S 5/041: {Optical pumping}
- H01S 5/18341: {Intra-cavity contacts}
- H01S 5/34: comprising quantum well or superlattice structures, e.g. single quantum well [SQW] lasers, multiple quantum well [MQW] lasers or graded index separate confinement heterostructure [GRINSCH] lasers (H01S5/36 takes precedence)
- H01S: DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL

## Abstract

A surface-emitting semiconductor laser system contains at least one MQW unit of at least three constituent QWs, axially separated from one another substantially non-equidistantly. The MQW unit is located within the axial extent covered, in operation of the laser, by a half-cycle of the standing wave of the field at a wavelength within the gain spectrum of the gain medium; immediately neighboring nodes of the standing wave are on opposite sides of the MQW unit. So-configured MQW unit can be repeated multiple times and/or complemented with individual QWs disposed outside of the half-cycle of the standing wave with which such MQW unit is associated. The semiconductor laser further includes a pump source configured to input energy in the semiconductor gain medium and a mode-locking element to initiate mode-locking.

## Claims

### Claim 1

A surface-emitting semiconductor laser system configured to operate in a mode-locked regime, the laser system comprising:
an optical resonator having an optical axis;
a semiconductor laser chip within the optical resonator, the semiconductor laser chip containing a semiconductor gain medium,
wherein said semiconductor gain medium is characterized by a gain spectrum, the gain spectrum having a bandwidth that includes a first wavelength,
wherein said semiconductor gain medium has
(i) a first multiple quantum well (MQW) unit, said first MQW unit defined by a sequence of at least three first quantum wells (QWs) and
(ii) a stand-alone quantum well (QW) that is spatially-separated from any MQW unit present in the gain medium;
and
a pump source in operable communication with said semiconductor laser chip and configured to pump energy to the semiconductor gain medium to produce excited-state carriers in the first MQW unit,
wherein said semiconductor laser system is configured to form multiple standing optical waves within said semiconductor chip at respectively-corresponding frequencies,
wherein a first standing optical wave from the multiple standing optical waves has a) a first frequency corresponding to the first wavelength and b) first and second immediately neighboring nodes that are located along the optical axis within the semiconductor gain medium and that are formed on the opposite sides of said first MQW unit; and
wherein the stand-alone QW is disposed substantially at a target location or between the target location and the nearest node of any of the multiple standing optical waves, the target location defined by the only position along the optical axis at which every one of the multiple standing optical waves has a corresponding antinode.

### Claim 2 (depends on 1)

The laser system according to claim 1, wherein the first MQW unit is positioned asymmetrically between the first and second immediately neighboring nodes.

### Claim 3 (depends on 1)

The laser system according to claim 1, wherein the at least three first QWs in said first MQW unit are spaced substantially non-equidistantly with respect to one another.

### Claim 4 (depends on 1)

The laser system according to claim 1, further comprising a mode-lock element disposed in optical communication with the laser chip and configured to define mode-locked pulses of optical radiation inside said optical resonator when said energy is pumped to the laser chip.

### Claim 5 (depends on 4)

The laser system according to claim 4, wherein the mode-lock element comprises at least one of a semiconductor saturable absorber mirror element, a self-phase modulation Kerr lens element, and an active modulation element.

### Claim 6 (depends on 1)

The laser system according to claim 1, wherein said laser system is configured to define durations, of said mode-locked pulses, each of which durations is shorter than one hundred femtoseconds.

### Claim 7 (depends on 1)

The laser system according to claim 1,
wherein two neighboring QWs from said at least three first QWs are separated from one another by a first confinement barrier material, the first confinement barrier material having a first thickness that is smaller than a thickness of a QW from the first QWs to delocalize at least one carrier wavefunction over more than one first QW.

### Claim 8 (depends on 1)

The laser system according to claim 1, wherein an overall thickness of said first MQW unit, measured along the optical axis, is greater than a half of a distance between the first and second immediately neighboring nodes of said standing optical wave.

### Claim 9 (depends on 1)

The laser system according to claim 1, wherein at least one of the following conditions is satisfied: (a) the semiconductor gain medium includes a base material that is a compound semiconductor comprising a combination of elements from (i) groups III and V of the periodic table, or (ii) groups II and VI of the periodic table, (b) wherein the pump source is configured to electrically create electrons in a conduction band of the semiconductor gain medium, and (c) wherein the pump source includes a (p-and-n) doped semiconductor chip.

### Claim 10 (depends on 1)

The laser system according to claim 1, wherein a reflector of the optical resonator is integrated with the stand-alone quantum well.

### Claim 11 (depends on 10)

The laser system according to claim 10, further including at least one of
i) a layer of barrier material disposed between and in contact with the stand-alone quantum well and the reflector, and
ii) a combination of a strain-compensating layer and a layer of barrier material, the combination disposed between and in contact with the stand-alone quantum well and the reflector.

### Claim 12 (depends on 1)

The laser system according to claim 1, further comprising an optical system configured as at least one of a single-pass optical pumping system, a multi-pass Z-cavity optical pumping system, a multi-pass V-cavity optical pumping system, and a linear cavity optical pumping system,
said optical system positioned to define optical communication between the semiconductor gain medium and the pump source to create electrons in a conduction band of the semiconductor gain medium with radiation from the pump source.

### Claim 13 (depends on 1)

The laser system according to claim 1,
wherein said standing optical wave has third and fourth nodes located along the optical axis within the gain medium, said third and fourth nodes being immediately neighboring to one another,
wherein said semiconductor gain medium includes a second MQW unit, said second MQW unit containing at least one second QW, said second MQW unit located between the third and fourth nodes, and
wherein the pump source is configured to pump energy to the semiconductor gain medium to produce excited carriers in all MQW units present in the laser system.

### Claim 14 (depends on 13)

The laser system according to claim 13, wherein said at least one second QW includes at least three second QWs that are spaced substantially non-equidistantly with respect to one another.

### Claim 15 (depends on 13)

The laser system according to claim 13,
wherein a reflector of the optical resonator includes a distributed Bragg reflector (DBR) integrated with the semiconductor gain medium,
wherein said second and third nodes are immediately neighboring to one another such that the first, second, third, and fourth nodes form a sequence of nodes in which the first node is the closest to the DBR;
wherein the first MQW unit includes four first QWs, the second MQW unit includes at least three second QWs; and
further comprising a third MQW unit containing multiple third QWs, said third MQW unit located between the second and third nodes.

### Claim 16 (depends on 14)

The laser system according to claim 14, wherein QWs of at least one of the second and third MQW units are spaced substantially non-equidistantly with respect to one another.

### Claim 17 (depends on 1)

The laser system according to claim 1, wherein
said first standing optical wave has a third node located along the optical axis within the gain medium, said second and third nodes being immediately neighboring with respect to one another,
and wherein said gain medium includes a second MQW unit, said second MQW unit containing a sequence of at least three second QWs, all of said at least three second QWs located between the second and third nodes.

### Claim 18 (depends on 17)

The laser system according to claim 17, wherein said at least three second QWs are separated from one another substantially non-equidistantly.

### Claim 19 (depends on 1)

The laser system according to claim 1, wherein a reflector of the optical resonator has a reflectance exceeding 99% at the first wavelength, said reflector being one of a distributed Bragg reflector and a simple reflector.

### Claim 20 (depends on 19)

The laser system according to claim 19,
wherein said optical resonator further comprises an output coupler configured to transmit radiation, generated with the gain medium, outside the optical resonator,
wherein said reflector is in integrated with the semiconductor gain medium, and
wherein said laser system contains a space between the laser chip and the output coupler.

### Claim 21 (depends on 1)

The laser system according to claim 1,
wherein said standing optical wave has third and fourth nodes located along the optical axis, the third node located within a space occupied by a reflector of the optical resonator, the fourth node located within the gain medium, said third and fourth nodes being immediately neighboring to one another,
wherein said gain medium includes a second MQW unit, said second MQW unit containing at least one second QW, said second MQW unit located between the third and fourth nodes, and
wherein the pump source is configured to pump energy to the gain medium to produce excited carriers in all MQW units present in the laser system.
