# US 10,121,957 B2 · Method for manufacturing a liquid discharging head or portion thereof

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- Number: US 10,121,957 B2
- Document ID: US10121957B2
- Status: Granted
- Kind: B2
- Application number: 14/813,478
- Filed: 2015-07-30
- Published: 2016-02-04
- Granted: 2018-11-06
- Earliest claimed: 2014-07-30
- Assignees: Seiko Epson Corporation
- Applicants: Seiko Epson Corporation
- Inventors: Toshiaki Hamaguchi; Eiju Hirai; Tsuyoshi Yoda
- Web page: https://patentgrep.com/patent/US10121957B2

## CPC

- H10N 30/03: Assembling devices that include piezoelectric or electrostrictive parts
- B41J 2/14233: {of film type, deformed by bending and disposed on a diaphragm}
- B41J 2/161: {of film type, deformed by bending and disposed on a diaphragm}
- B41J 2/1623: {bonding and adhesion}
- B41J 2/1629: {wet etching}
- B41J 2/1646: {thin film formation by sputtering}
- H10N 30/06: Forming electrodes or interconnections, e.g. leads or terminals
- H10N 30/072: by laminating or bonding of piezoelectric or electrostrictive bodies
- H10N 30/079: using intermediate layers, e.g. for growth control
- H10N 30/2047: {Membrane type}
- H10N 30/708: {Intermediate layers, e.g. barrier, adhesion or growth control buffer layers}
- H10N 30/875: {Further connection or lead arrangements, e.g. flexible wiring boards, terminal pins}
- B41J 2002/14241: {having a cover around the piezoelectric thin film element}
- B41J 2002/14491: {Electrical connection}
- H10N: ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- B41J: TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS

## Abstract

A manufacturing method of a piezoelectric element includes forming an adhesive layer of a lead electrode on a piezoelectric element main body of a vibration plate, forming a metallic layer of the lead electrode on the adhesive layer, removing the metallic layer to leave the adhesive layer in a portion that corresponds to an extended electrode of the lead electrode using etching, patterning the remaining adhesive layer as individual extended electrodes that correspond to the piezoelectric element main body using etching, joining a protective substrate onto the vibration plate in a state in which the piezoelectric element main body is accommodated inside an accommodation hollow section and the extended electrode is positioned further on an outer side of the vibration plate than the protective substrate, layering and forming a section of the wiring on the protective substrate and the extended electrode, and patterning the wiring as individual wiring for each extended electrode using etching.

## Claims

### Claim 1

A method for manufacturing a portion of a liquid discharging head, the method comprising:
forming a first electrode layer of a lead electrode on a vibration plate and a piezoelectric element main body that is on the vibration plate;
forming a second electrode layer of the lead electrode on the first electrode layer;
etching the second electrode layer to remove at least a portion of the second electrode layer to leave the first electrode layer in a portion that corresponds to an extended electrode;
etching the first electrode layer to pattern the first electrode layer as individual extended electrodes that correspond to a piezoelectric element main body;
joining a protective substrate onto the vibration plate in a state in which the piezoelectric element main body is accommodated inside an accommodation hollow section and the extended electrode is positioned further on an outer side of the vibration plate than the protective substrate;
layering and forming a section of the wiring on the protective substrate and the first electrode layer as the extended electrode that is further on an outer side than the protective substrate; and
etching the wiring to pattern the wiring as individual wiring for each of the individual extended electrodes.