# US 10,121,926 B2 · Graphene-based detector for W-band and terahertz radiations > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 10,121,926 B2 - Document ID: US10121926B2 - Status: Granted - Kind: B2 - Application number: 15/682,443 - Filed: 2017-08-21 - Published: 2018-02-22 - Granted: 2018-11-06 - Earliest claimed: 2016-08-22 - Assignees: Shahid Rajaee Teacher Training University; Mina Amirmazlaghani; Farshid Raissi - Applicants: Mina Amirmazlaghani; Farshid Raissi - Inventors: Mina Amirmazlaghani; Farshid Raissi - Web page: https://patentgrep.com/patent/US10121926B2 ## CPC - H10F 30/288: {the devices being sensitive to multiple wavelengths, e.g. multi-spectrum radiation detection devices} - H10F 30/227: the potential barrier being a Schottky barrier - H10F 39/107: {having multiple elements covered by H10F30/00 in a repetitive configuration, e.g. radiation detectors comprising photodiode arrays} - H10F 77/122: comprising only Group IV materials - H10F 77/206: {for devices having potential barriers} - H10F: INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION ## Abstract A method for detecting W-band and terahertz radiations is disclosed. The method provides a graphene-Si Schottky diode that includes a graphene monolayer having an Ohmic contact with a source electrode supported on a top surface of a doped silicon substrate by an insulating layer, and extends over an edge of the source electrode and contacts the top surface, in a manner forming a Schottky junction. The method stores reference current-voltage (I-V) characteristics of the Schottky junction in a reverse biased mode, then measures I-V characteristics of the Schottky junction in the reverse biased mode, and detects W-band and terahertz radiation by comparing the measured I-V characteristics of the Schottky junction to the stored reference I-V characteristics. ## Claims ### Claim 1 A method for detecting W-band and terahertz radiations, the method comprising: providing a graphene-Si Schottky diode that includes a graphene monolayer that at one end area is in Ohmic contact with an upper surface of an electrode above and insulated from a top surface of a doped silicon substrate, and that extends over an edge of the electrode to another end area that contacts the top surface in a manner forming a Schottky junction; storing reference current-voltage (I-V) characteristics of the Schottky junction in a reverse biased mode; measuring an I-V characteristic of the Schottky junction in the reverse biased mode; comparing a result of the measuring to the stored reference I-V characteristic; and based on a result of the comparing, detecting W-band and terahertz radiation. ### Claim 2 (depends on 1) The method of claim 1 for detecting W-band and terahertz radiations, the method further including: measuring I-V characteristics of the Schottky junction in the reverse biased mode when the Schottky junction is not exposed to any W-band and terahertz radiations, and wherein storing reference I-V characteristics of the Schottky junction includes storing a result of the measuring I-V characteristics of the Schottky junction when the Schottky junction is not exposed to any W-band and terahertz radiations. ### Claim 3 (depends on 1) The method of claim 1 for detecting W-band and terahertz radiations, wherein: the top surface includes a first region and a second region, the electrode is supported on an insulating layer disposed on the first region, and the another end area of the graphene monolayer contacts and forms a Schottky junction on the second region of the top surface. ### Claim 4 (depends on 3) The method of claim 3 for detecting W-band and terahertz radiations, wherein: the electrode is a source electrode, the substrate further forms a bottom surface that is opposite from and faces away from the top surface, providing the graphene-Si Schottky diode further includes a drain electrode disposed on the bottom surface of the substrate. ### Claim 5 (depends on 4) The method of claim 4 for detecting W-band and terahertz radiations, wherein: the source electrode includes an Au layer. ### Claim 6 (depends on 4) The method of claim 4 for detecting W-band and terahertz radiations, wherein: the drain electrode includes an Al layer. ### Claim 7 (depends on 4) The method of claim 4 for detecting W-band and terahertz radiations, wherein measuring I-V characteristics of the Schottky junction includes: applying at least one voltage between the source electrode and the drain electrode, including coupling a power source with the source electrode and the drain electrode; and measuring a current generated between the source electrode and the drain electrode for the at least one voltage. ### Claim 8 (depends on 1) The method of claim 1 for detecting W-band and terahertz radiations, wherein detecting W-band and terahertz radiation includes detecting I-V characteristics of the Schottky junction being different from the reference I-V characteristics of the Schottky junction. ### Claim 9 (depends on 1) The method of claim 1 for detecting W-band and terahertz radiations, wherein: the substrate includes a p-type silicon with a resistivity of 1-10Ω cm. ### Claim 10 (depends on 1) The method of claim 1 for detecting W-band and terahertz radiations, wherein the electrode is supported on an insulating layer that is disposed on the first region, and the insulating layer includes a SiO2 layer. ### Claim 11 A system for detecting W-band and terahertz radiations, the system comprising: a graphene-Si Schottky diode associated with a source electrode and a drain electrode; a power source coupled with the source electrode and the drain electrode and configured to apply a reference voltage between the source electrode and the drain electrode; a measurement instrument configured to measure a generated current between the source electrode and the drain electrode; and a processing unit configured to compare the measured generated current with a reference current, and to detect the W-band and terahertz radiations based on the comparison. ### Claim 12 (depends on 11) The system of claim 11 for detecting W-band and terahertz radiations, wherein: the graphene-Si Schottky diode includes a doped silicon substrate, forming a top surface and, opposite from and facing away from the top surface, a bottom surface, the source electrode is arranged above and insulated from the top surface, and the drain electrode is disposed on the bottom surface. ### Claim 13 (depends on 12) The system of claim 12 for detecting W-band and terahertz radiations, wherein the graphene-Si Schottky diode further includes: a graphene monolayer that at one end area is in Ohmic contact with an upper surface of the source electrode and that extends over an edge of the source electrode to another end area that contacts the top surface in a manner forming a Schottky junction. ### Claim 14 (depends on 13) The system of claim 13 for detecting W-band and terahertz radiations, wherein: the top surface includes a first region and a second region, the source electrode is supported on an insulating layer disposed on the first region, and the another end area of the graphene monolayer contacts and forms a Schottky junction on the second region of the top surface. ### Claim 15 (depends on 13) The system of claim 13 for detecting W-band and terahertz radiations, wherein: the source electrode includes an Au layer, and the drain electrode includes an Al layer. ### Claim 16 A system for detecting W-band and terahertz radiations, the system comprising: a graphene-Si Schottky diode associated with a source electrode and a drain electrode; a power source coupled with the source electrode and the drain electrode and configured to apply a reference current between the source electrode and the drain electrode; a measurement instrument configured to measure, during the applying the reference current, a resulting voltage between the source electrode and the drain electrode; and a processing unit configured to compare the resulting voltage measurement to a reference voltage, and to detect the W-band and terahertz radiations based on the comparison. ### Claim 17 (depends on 16) The system of claim 16 for detecting W-band and terahertz radiations, wherein: the graphene-Si Schottky diode includes a doped silicon substrate, forming a top surface and, opposite from and facing away from the top surface, a bottom surface, the source electrode is arranged above and insulated from the top surface, and the drain electrode is disposed on the bottom surface. ### Claim 18 (depends on 17) The system of claim 17 for detecting W-band and terahertz radiations, wherein the graphene-Si Schottky diode further includes: a graphene monolayer that at one end area is in Ohmic contact with an upper surface of the source electrode and that extends over an edge of the source electrode to another end area that contacts the top surface in a manner forming a Schottky junction. ### Claim 19 (depends on 18) The system of claim 18 for detecting W-band and terahertz radiations, wherein: the top surface includes a first region and a second region, the source electrode is supported on an insulating layer disposed on the first region, and the another end area of the graphene monolayer contacts and forms a Schottky junction on the second region of the top surface.