# US 10,121,822 B2 · Light-emitting device and method of forming the same

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- Number: US 10,121,822 B2
- Document ID: US10121822B2
- Status: Granted
- Kind: B2
- Application number: 15/100,748
- Filed: 2014-11-18
- Published: 2016-10-20
- Granted: 2018-11-06
- Earliest claimed: 2013-12-02
- Assignees: Nanyang Technological University
- Applicants: Nanyang Technological University
- Inventors: Xueliang Zhang; Zi-Hui Zhang; Yun Ji; Zhen Gang Ju; Wei Liu; Swee Tiam Tan; Xiaowei Sun; Hilmi Volkan Demir
- Web page: https://patentgrep.com/patent/US10121822B2

## CPC

- H10H 29/142: {Two-dimensional arrangements, e.g. asymmetric LED layout}
- H10H 20/82: Roughened surfaces, e.g. at the interface between epitaxial layers
- H10H 20/825: containing nitrogen, e.g. GaN
- H10H 20/831: characterised by their shape
- H10H 20/8312: {extending at least partially through the bodies}
- H10H 20/84: Coatings, e.g. passivation layers or antireflective coatings
- H10H 20/032: {of electrodes}
- H10H: INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS

## Abstract

A light-emitting device may include an active layer. The light-emitting device may include a first semiconductor layer of a first conductivity type. The first semiconductor layer may be in physical contact with the active layer. The light-emitting device may also include a second semiconductor layer of a second conductivity type. The second semiconductor layer may be in physical contact with the active layer and opposite the first conductive layer. The light-emitting device may further include a first electrode in physical contact with a first side of the first semiconductor layer. The light-emitting device may additionally include a second electrode in physical contact with a second side of the first semiconductor layer. The second side of the first semiconductor layer may be different from the first side of the first semiconductor layer. The light-emitting device may also include a third electrode in physical contact with the second semiconductor layer.

## Claims

### Claim 1

A light-emitting device comprising:
an active layer;
a first semiconductor layer of a first conductivity type, the first semiconductor layer in physical contact with the active layer;
a second semiconductor layer of a second conductivity type, the second semiconductor layer in physical contact with the active layer and opposite the first semiconductor layer;
a first electrode in physical contact with a first lateral side of the first semiconductor layer;
a second electrode in physical contact with a second lateral side of the first semiconductor layer, the second lateral side of the first semiconductor layer being different from the first lateral side of the first semiconductor layer; and
a third electrode in physical contact with the second semiconductor layer, wherein the first electrode and the second electrode are physically isolated from a surface side of the first semiconductor layer joining the first lateral side and the second lateral side, the surface side being configured to transmit light generated by the light-emitting device.

### Claim 2 (depends on 1)

The light-emitting device according to claim 1, wherein the first electrode is in physical contact with the second.

### Claim 3 (depends on 1)

The light-emitting device according to claim 1, wherein the second lateral side of the first semiconductor layer is opposite the first lateral side of the first semiconductor layer.

### Claim 4 (depends on 1)

The light-emitting device according to any of claim 1, further comprising:
a passivation layer separating the second electrode from the active layer, the second semiconductor layer and the third electrode.

### Claim 5 (depends on 4)

The light-emitting device according to claim 4, wherein the passivation layer comprises one or more passivation structures.

### Claim 6 (depends on 4)

The light-emitting device according to claim 4, wherein the passivation layer comprises an insulating inorganic material selected from a group consisting of silicon oxide, silicon nitride, titanium dioxide, aluminum oxide, magnesium oxide, hafnium oxide and tantalum oxide.

### Claim 7 (depends on 4)

The light-emitting device according to claim 4, wherein the passivation layer comprises a suitable organic material.

### Claim 8 (depends on 4)

The light-emitting device according to claim 4, wherein the passivation layer comprises one or more via holes.

### Claim 9 (depends on 8)

The light-emitting device according to claim 8, wherein each of the one or more via holes of the passivation layer comprises a via interconnect electrically connected to the third electrode.

### Claim 10 (depends on 9)

The light-emitting device according to claim 9 further comprising:
a connection layer in contact with the via interconnect.

### Claim 11 (depends on 9)

The light-emitting device according to claim 9, further comprising:
an isolation layer for separating the second electrode from the via interconnect.

### Claim 12 (depends on 1)

The light-emitting device according to claim 1, wherein a portion of the first semiconductor layer directly over the active region is configured to transmit light.

### Claim 13 (depends on 12)

The light-emitting device according to claim 12, wherein the portion of the first semiconductor layer directly over the active region is unblocked by the first electrode.

### Claim 14 (depends on 12)

The light-emitting device according to claim 12, wherein the portion of the first semiconductor layer directly over the active region is patterned.

### Claim 15 (depends on 12)

The light-emitting device according to claim 12, further comprising:
a protection layer in contact with the portion of the first semiconductor layer directly over the active region.

### Claim 16 (depends on 1)

The light-emitting device according to claim 1, wherein the third electrode comprises:
a transparent conducting layer in contact with the second semiconductor layer;
a reflective layer in contact with the transparent conducting layer; and
a conductive supporting layer in contact with the reflective layer.

### Claim 17

A light-emitting array comprising:
a plurality of light-emitting devices, each light-emitting device comprising:
an active layer;
a first semiconductor layer of a first conductivity type, the first semiconductor layer in physical contact with the active layer;
a second semiconductor layer of a second conductivity type, the second semiconductor layer in physical contact with the active layer and opposite the first semiconductor layer;
a first electrode in physical contact with a first lateral side of the first semiconductor layer,
a second electrode in physical contact with a second lateral side of the first semiconductor layer, the second lateral side of the first semiconductor layer being different from the first lateral side of the first semiconductor layer; and
a third electrode in physical contact with the second semiconductor layer; and
one or more interconnecting layers, wherein:
the first electrode and the second electrode are physically isolated from a surface side of the first semiconductor layer joining the first lateral side and the second lateral side, the surface side being configured to transmit light generated by the light-emitting device; and
each of the one or more interconnecting layers is in contact with a first light-emitting device and a second light-emitting device of the plurality of light-emitting devices.

### Claim 18

A method of forming a light-emitting device, the method comprising:
forming an active layer;
forming a first semiconductor layer of a first conductivity type so that the first semiconductor layer is in physical contact with the active layer;
forming a second semiconductor layer of a second conductivity type so that the second semiconductor layer is in physical contact with the active layer and opposite the first semiconductor layer;
forming a first electrode in physical contact with a first lateral side of the first semiconductor layer;
forming a second electrode in physical contact with a second lateral side of the first semiconductor layer, the second lateral side of the first semiconductor layer being different from the first lateral side of the first semiconductor layer; and
forming a third electrode so that the third electrode is in physical contact with the second semiconductor layer, thereby forming the light-emitting device, wherein the first electrode and the second electrode are physically isolated from a surface side of the first semiconductor layer joining the first lateral side and the second lateral side, the surface side being configured to transmit light generated by the light-emitting device.

### Claim 19

A method of forming a light-emitting array, the method comprising:
forming a plurality of light-emitting devices, wherein the forming of each light-emitting device comprises:
forming an active layer;
forming a first semiconductor layer of a first conductivity type so that the first semiconductor layer is in physical contact with the active layer;
forming a second semiconductor layer of a second conductivity type so that the second semiconductor layer is in physical contact with the active layer and opposite the first semiconductor layer;
forming a first electrode in physical contact with a first lateral side of the first semiconductor layer;
forming a second electrode in physical contact with a lateral second side of the first semiconductor layer, the second lateral side of the first semiconductor layer being different from the first lateral side of the first semiconductor layer; and
forming a third electrode so that the third electrode is in physical contact with the second semiconductor layer, thereby forming the light-emitting device; and
forming one or more interconnecting layers so that each of the one or more interconnecting layers is in contact with a first light-emitting device and a second light-emitting device of the plurality of light-emitting devices, wherein the first electrode and the second electrode are physically isolated from a surface side of the first semiconductor layer joining the first lateral side and the second lateral side, the surface side being configured to transmit light generated by the light-emitting device.
