# US 10,121,779 B2 · Integrated circuits with high current capacity and methods for producing the same

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- Number: US 10,121,779 B2
- Document ID: US10121779B2
- Status: Granted
- Kind: B2
- Application number: 15/376,754
- Filed: 2016-12-13
- Published: 2018-06-14
- Granted: 2018-11-06
- Earliest claimed: 2016-12-13
- Assignees: Globalfoundries Singapore Pte. Ltd.
- Applicants: Globalfoundries Singapore Pte. Ltd.
- Inventors: Handoko Linewih; Chao Cheng
- Web page: https://patentgrep.com/patent/US10121779B2

## CPC

- H10D 89/815: {involving a parasitic bipolar transistor triggered by the local electrical biasing of the layer acting as base region of said parasitic bipolar transistor}
- H10D 30/0212: {using self-aligned silicidation}
- H10D 30/0221: {having asymmetry in the channel direction, e.g. lateral high-voltage MISFETs having drain offset region or extended-drain MOSFETs [EDMOS]}
- H10D 30/603: {having asymmetry in the channel direction, e.g. lateral high-voltage MISFETs having drain offset region or extended drain IGFETs [EDMOS]}
- H10D 62/371: {Inactive supplementary semiconductor regions, e.g. for preventing punch-through, improving capacity effect or leakage current}
- H10D 62/116: {adjoining the input or output regions of field-effect devices, e.g. adjoining source or drain regions}
- H10D 62/127: {of cellular field-effect devices, e.g. multicellular DMOS transistors or IGBTs}
- H10D: INORGANIC ELECTRIC SEMICONDUCTOR DEVICES

## Abstract

Integrated circuits and methods of producing integrated circuits are provided. In an exemplary embodiment, an integrated circuit includes a source and a drain defined within a body isolation well. A gate overlies the body isolation well between the source and the drain, and an isolating structure is formed within the body isolation well. The isolating structure sections the source into a plurality of source sections with the plurality of source sections adjacent to one gate.

## Claims

### Claim 1

An integrated circuit comprising:
a source defined within a body isolation well;
a drain defined within the body isolation well;
a gate overlying the body isolation well between the source and the drain; and
an isolating structure formed within the body isolation well, wherein the isolating structure sections the source into a plurality of source sections such that the plurality of source sections are adjacent to one gate, and wherein the isolating structure is electrically insulating.

### Claim 2 (depends on 1)

The integrated circuit of claim 1 wherein the isolating structure underlies the gate.

### Claim 3 (depends on 2)

The integrated circuit of claim 2 wherein the gate comprises a gate width, and wherein the isolating structure underlies the gate for the gate width.

### Claim 4 (depends on 1)

The integrated circuit of claim 1 wherein an ESD transistor comprises the source, the drain, and the gate, and wherein the integrated circuit further comprises:
a protected device;
a power source; and
a ground, wherein the ESD transistor and the protected device are connected in parallel between the power source and the ground.

### Claim 5 (depends on 4)

The integrated circuit of claim 4 wherein:
the isolating structure sections the drain into a plurality of drain sections such that the plurality of drain sections are in electrical communication with the plurality of source sections through the body isolation well;
the gate has a gate length defined across the gate along a line between the source and the drain, and the gate has a gate width perpendicular to the gate length; and
each of the plurality of drain sections is about aligned with one of the plurality of source sections along the line that is parallel to the gate length.

### Claim 6 (depends on 4)

The integrated circuit of claim 4 wherein:
the isolating structure sections the drain into a plurality of drain sections such that the plurality of drain sections are in electrical communication with the plurality of source sections through the body isolation well;
the gate has a gate length defined across the gate along a line between the source and the drain, and the gate has a gate width perpendicular to the gate length; and
each of the plurality of drain sections is mis-aligned with each of the plurality of source sections along the line that is parallel to the gate length.

### Claim 7 (depends on 1)

The integrated circuit of claim 1 further comprising:
a silicide block overlying the body isolation well, wherein the silicide block is positioned between the drain and the gate.

### Claim 8 (depends on 7)

The integrated circuit of claim 7 wherein:
the silicide block comprises a silicide block length of from about 2 to about 3 microns, wherein the silicide block length extends from about the drain to about the gate; and
wherein an ESD transistor includes the source, the drain, and the gate, and wherein the ESD transistor has a current capacity of about 1.4 amps or more measured according to the JEDEC electrostatic discharge standard.

### Claim 9 (depends on 1)

The integrated circuit of claim 1 further comprising:
a drain well defined within the body isolation well underlying the drain, wherein the drain well comprises “N” type conductivity determining impurities; and
a base well defined within the body isolation well underlying the drain well.

### Claim 10 (depends on 9)

The integrated circuit of claim 9 wherein:
the drain, the base well, and the source are in electrical communication.

### Claim 11 (depends on 1)

The integrated circuit of claim 1 wherein the isolating structure comprises a shallow trench isolation structure.

### Claim 12 (depends on 1)

The integrated circuit of claim 1 wherein the plurality of source sections comprise about 10 source sections or more.

### Claim 13 (depends on 1)

The integrated circuit of claim 1 further comprising:
a base well underlying the plurality of source sections, wherein the plurality of source sections are in electrical communication with each other through the base well.

### Claim 14

An integrated circuit comprising: an ESD transistor, wherein the ESD transistor comprises; a source defined within a body isolation well; a drain defined within the body isolation well; a gate overlying the body isolation well between the source and the drain; and an isolation structure formed within the body isolation well, wherein the isolation structure sections the drain into a plurality of drain sections such that the plurality of drain sections are in electrical communication with the source through the body isolation well, the plurality of drain sections are equidistant from one gate, and wherein the isolation structure is electrically insulating; and a power source; a ground; and a protected device, wherein the protected device and the ESD transistor are connected in parallel between the power source and the ground.

### Claim 15 (depends on 14)

The integrated circuit of claim 14 further comprising:
a drain well defined within the body isolation well underlying the drain; and
a base well defined within the body isolation well underlying the drain well such that electrical communication between the source and the drain comprises electrical communication through the drain well and through the base well.

### Claim 16 (depends on 14)

The integrated circuit of claim 14 further comprising:
A silicide block overlying the body isolation well between the drain and the gate.

### Claim 17 (depends on 16)

The integrated circuit of claim 16 wherein:
the silicide block comprises a silicide block length of from about 2 to about 3 microns, wherein the silicide block length extends from about the drain to about the gate; and
wherein the ESD transistor has a current capacity of about 1.4 amps or greater measured according to the JEDEC electrostatic discharge standard.

### Claim 18 (depends on 14)

The integrated circuit of claim 14 wherein:
the isolation structure sections the source into a plurality of source sections.

### Claim 19 (depends on 14)

The integrated circuit of claim 14 wherein the plurality of drain sections comprise about 10 or more drain sections.

### Claim 20

A method of producing an integrated circuit comprising:
forming an isolating structure within a body isolation well, wherein the isolation structure is electrically insulating;
forming a source within the body isolation well, wherein the source is formed such that the isolating structure sections the source into a plurality of source sections;
forming a drain within the body isolation well;
forming a gate overlying body isolation well between the source and the drain, wherein the gate is formed such that one gate is adjacent to the plurality of source sections.