# US 10,121,742 B2 · Method of forming a packaged semiconductor device using ganged conductive connective assembly and structure

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- Number: US 10,121,742 B2
- Document ID: US10121742B2
- Status: Granted
- Kind: B2
- Application number: 15/460,032
- Filed: 2017-03-15
- Published: 2018-09-20
- Granted: 2018-11-06
- Earliest claimed: 2017-03-15
- Assignees: Amkor Technology, Inc.
- Applicants: Amkor Technology, Inc.
- Inventors: Siang Miang Yeo; Mohd Hasrul Bin Zulkifli
- Web page: https://patentgrep.com/patent/US10121742B2

## CPC

- H10W 20/43: Layouts of interconnections
- H10W 70/04: of leadframes
- H10W 70/411: {Chip-supporting parts, e.g. die pads}
- H10W 70/421: {Shapes or dispositions}
- H10W 70/442: {of multiple leadframes in a single chip}
- H10W 70/466: {Tape carriers or flat leads}
- H10W 70/481: {for devices being provided for in groups H10D8/00 - H10D48/00}
- H10W 72/076: {of strap connectors}
- H10W 74/01: Manufacture or treatment
- H10W 74/014: {using batch processing}
- H10W 74/111: {the semiconductor body being completely enclosed}
- H10W 74/129: {forming a chip-scale package [CSP]}
- H10W 72/0198: {batch processes}
- H10W 72/60: Strap connectors, e.g. thick copper clips for grounding of power devices
- H10W 72/871: {Bond wires and strap connectors}
- H10W 72/926: {Multiple bond pads having different sizes}
- H10W 72/932: {Plan-view shape, i.e. in top view}
- H10W 74/00: Encapsulations, e.g. protective coatings
- H10W 90/736: {between a chip and a stacked lead frame, conducting package substrate or heat sink}
- H10W 90/756: {between a chip and a stacked lead frame, conducting package substrate or heat sink}
- H10W 90/763: {between laterally-adjacent chips}
- H10W 90/766: {between a chip and a stacked lead frame, conducting package substrate or heat sink}
- H10W: GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10

## Abstract

A method for forming packaged semiconductor devices comprises providing a first conductive frame structure. The method includes coupling a second conductive frame structure to the first conductive frame structure to provide a first sub-assembly, wherein the second conductive frame structure comprises a plurality of interconnected conductive connective structures. The method includes encapsulating the first sub-assembly with an encapsulating layer to provide an encapsulated sub-assembly. The method includes removing joined conductive portions of the first conductive frame structure to form a plurality of conductive flank surfaces disposed on side surfaces of the encapsulated sub-assembly. The method includes forming a conductive layer on the conductive flank surfaces. The method includes separating the encapsulated sub-assembly to provide the packaged semiconductor devices each having portions of the conductive flank surfaces covered by the conductive layer.

## Claims

### Claim 1

A method of forming packaged semiconductor devices, comprising:
providing a first conductive frame structure having joined conductive portions;
providing a second conductive frame structure comprising a plurality of interconnected conductive connective structures;
attaching the plurality of interconnected conductive connective structures to the joined conductive portions to provide a first sub-assembly;
encapsulating the first sub-assembly with an encapsulating layer to provide an encapsulated sub-assembly;
removing the joined conductive portions of the first conductive frame structure to form a plurality of conductive flank surfaces disposed on side surfaces of the encapsulated sub-assembly;
forming a conductive layer onto the conductive flank surfaces after the step of removing the joined conductive portions; and
separating the encapsulated sub-assembly to provide the packaged semiconductor devices each having portions of the conductive flank surfaces covered by the conductive layer.

### Claim 2 (depends on 1)

The method of claim 1, wherein forming the conductive layer comprises electroplating the conductive layer onto the conductive flank surfaces using the plurality of interconnected conductive connective structures to pass current through portions of the first conductive frame structure.

### Claim 3 (depends on 1)

The method of claim 1 wherein:
providing the first conductive frame structure comprises providing:
a first die attach pad;
a second die attach pad spaced apart from the first die attach pad;
a first lead disposed proximate to the first die attach pad; and
a second lead disposed proximate to the second die attach pad, wherein the first lead is adjoined to one of the second lead or the second die attach pad to provide one of the joined conductive portions;
a first semiconductor die attached to the first die attach pad;
a second semiconductor die attached to the second die attach pad;
attaching the plurality of interconnected conductive connective structures comprises:
attaching a first conductive connective structure to the first semiconductor die and the first lead; and
attaching a second conductive connective structure to the second semiconductor die, wherein the first conductive connective structure is physically interconnected to the second conductive connective structure;
encapsulating comprises leaving at least portions of the first conductive frame structure exposed to the outside of the encapsulated sub-assembly; and
removing comprises removing the one of the joined conductive portions to expose a flank surface of the first lead.

### Claim 4 (depends on 3)

The method of claim 3, wherein:
attaching the first conductive connective structure comprises attaching a first clip structure;
attaching the second conductive connective structure comprises attaching a second clip structure;
attaching the second clip structure further comprises attaching the second clip structure to the second lead; and
removing comprises removing the joined conductive portions in their entirety.

### Claim 5 (depends on 3)

The method of claim 3, wherein providing the first conductive frame structure comprises providing the first lead physically connected to the second die attach pad such that the one joined conductive portion is interposed between the first lead and the second die attach pad.

### Claim 6 (depends on 3)

The method of claim 3, wherein attaching the plurality of interconnected conductive connective structures comprises bringing a portion of the first conductive frame structure into physical contact with the second conductive frame structure.

### Claim 7 (depends on 3)

The method of claim 3, wherein forming the conductive layer comprises:
forming the conductive layer on bottom surfaces of the first die attach pad and the second die attach pad; and
forming the conductive layer on bottom surfaces of the first lead and the second lead.

### Claim 8 (depends on 1)

The method of claim 1, wherein separating comprises providing the packaged semiconductor devices each having a distal end portion of the second conductive frame structure exposed to the outside of the encapsulating layer, and wherein the distal end portion is absent the conductive layer.

### Claim 9 (depends on 1)

The method of claim 1, wherein removing the joined conductive portions comprises partially sawing into the encapsulated sub-assembly to completely remove the joined conductive portions.

### Claim 10 (depends on 1)

The method of claim 1, wherein:
forming the conductive layer comprises forming a solderable material covering approximately 100% of the conductive flank surfaces.

### Claim 11

A method of making packaged electronic devices comprising:
providing a first conductive frame structure comprising:
a first sub-structure having a first conductive component;
a second sub-structure having a second conductive component, wherein the first conductive component is adjoined to the second conductive component to provide a joined conductive structure connecting the first sub-structure to the second sub-structure;
a first electronic die coupled to the first sub-structure; and
a second electronic die coupled to the second sub-structure;
providing a second conductive frame structure comprising:
a first conductive connective structure; and
a second conductive connective structure, wherein the first conductive connective structure is physically interconnected to the second conductive connective structure;
attaching the first conductive connective structure to the first electronic die and the first conductive component and attaching the second conductive connective structure to at least the second electronic die to form a first sub-assembly;
encapsulating portions of the first sub-assembly with an encapsulating layer to form an encapsulated sub-assembly, wherein at least portions of the first conductive frame structure are exposed to the outside of the encapsulated sub-assembly;
removing all of the joined conductive structure to form a first conductive component exposed side surface and a second conductive component exposed side surface;
forming a conductive layer on the exposed surfaces of the first conductive frame structure, on the first conductive component exposed side surface, and on the second conductive component exposed side surface; and
separating the encapsulated sub-assembly to provide a first packaged electronic device having the first conductive component exposed side surface covered by the conductive layer and a second packaged electronic device having the second conductive component exposed side surface covered by the conductive layer.

### Claim 12 (depends on 11)

The method of claim 11, wherein forming the conductive layer comprises:
placing the encapsulated sub-assembly into a plating solution; and
passing a current through the first conductive frame structure and the second frame structure to electroplate the conductive layer on the exposed surfaces of the first conductive frame structure, on the first conductive component exposed side surface, and on the second conductive component exposed side surface.

### Claim 13 (depends on 11)

The method of claim 11, wherein
providing the first conductive frame structure comprises:
providing the first conductive component comprising a lead;
providing the second conductive component comprising a die attach pad; and
providing the second conductive frame structure comprises:
providing a first clip structure ganged together to a second clip; and
providing the first clip structure physically interconnected to the second conductive frame structure on at least two sides with tie bars.

### Claim 14 (depends on 11)

The method of claim 11, wherein attaching the first conductive connective structure comprises bringing a portion of the first conductive frame structure into physical contact with the second conductive frame structure.

### Claim 15 (depends on 11)

The method of claim 11, wherein separating comprises providing the first packaged electronic device and the second packaged electronic device each having a distal end portion of the second conductive frame structure exposed to the outside of the encapsulating layer that is absent the conductive layer.

### Claim 16 (depends on 11)

The method of claim 11, wherein removing all of the joined conductive structure comprises sawing through the joined conductive structure.

### Claim 17 (depends on 11)

The method of claim 11, wherein forming the conductive layer comprises covering approximately 100% of the first conductive component exposed side surface, and covering approximately 100% of the second conductive component exposed side surface.

### Claim 18 (depends on 11)

The method of claim 11, wherein forming the conductive layer comprises forming the conductive layer comprising a solderable material.

### Claim 19 (depends on 11)

The method of claim 11, wherein forming the conductive layer comprises:
forming the conductive layer on a lower surface of the first conductive component; and
forming the conductive layer on a lower surface of the second conductive component.

### Claim 20

A method of forming packaged semiconductor devices, comprising:
providing a first conductive frame structure having die pads and joined conductive portions, wherein the joined conductive portions comprise one or more of joined leads or leads joined to the die pads;
attaching semiconductor devices to the die pads;
providing a second conductive frame structure comprising a plurality of interconnected conductive connective structures;
attaching the plurality of interconnected conductive connective structures to the joined conductive portions and the semiconductor devices to provide a first sub-assembly;
encapsulating the first sub-assembly with an encapsulating layer to provide an encapsulated sub-assembly;
removing the joined conductive portions of the first conductive frame structure to form a plurality of conductive flank surfaces disposed on side surfaces of the encapsulated sub-assembly;
after the step of removing the joined conductive portions, using the plurality of interconnected conductive connective structures as a conductive source to form a conductive layer on the conductive flank surfaces; and
separating the encapsulated sub-assembly to provide the packaged semiconductor devices each having portions of the conductive flank surfaces covered by the conductive layer, wherein the separating includes separating the plurality of interconnected conductive connective structures.