# US 10,121,730 B2 · Package integrated synthetic jet device

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- Number: US 10,121,730 B2
- Document ID: US10121730B2
- Status: Granted
- Kind: B2
- Application number: 15/384,158
- Filed: 2016-12-19
- Published: 2017-04-06
- Granted: 2018-11-06
- Earliest claimed: 2015-06-02
- Assignees: Intel Corporation
- Applicants: Intel Corporation
- Inventors: Feras Eid; Jessica Gullbrand; Melissa A. Cowan
- Web page: https://patentgrep.com/patent/US10121730B2

## CPC

- H10W 40/43: by flowing gases, e.g. forced air cooling
- B05B 17/0653: {Details}
- B81C 1/00238: {Joining a substrate with an electronic processing unit and a substrate with a micromechanical structure}
- F15D 1/008: {comprising fluid injection or suction means}
- F15D 1/08: of jets leaving an orifice
- H05K 1/0203: {Cooling of mounted components (H05K1/0272 takes precedence)}
- H05K 1/181: associated with surface mounted components
- H10P 72/74: {using temporarily an auxiliary support}
- F04D 33/00: Non-positive-displacement pumps with other than pure rotation, e.g. of oscillating type (F04D35/00 takes precedence; hand-held fans A45B)
- H05K 1/0272: {Adaptations for fluid transport, e.g. channels, holes}
- H05K 2201/10378: Interposers
- H10P 72/7424: {used as a support during the manufacture of self-supporting substrates}
- H10W 90/724: {between a chip and a stacked insulating package substrate, interposer or RDL}
- H10W: GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- B05B: SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES (spray-mixers with nozzles B01F25/72; processes for applying liquids or other fluent materials to surfaces by spraying B05D)
- B81C: PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS (making microcapsules or microballoons B01J13/02; processes or apparatus specially adapted for the manufacture or treatment of piezoelectric, electrostrictive or magnetostrictive elements per se H10N30/01)
- F15D: FLUID DYNAMICS, i.e. METHODS OR MEANS FOR INFLUENCING THE FLOW OF GASES OR LIQUIDS
- H05K: PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H10P: GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- F04D: NON-POSITIVE-DISPLACEMENT PUMPS (engine fuel-injection pumps F02M; ion pumps H01J41/12; electrodynamic pumps H02K44/02)

## Abstract

Embodiments include a synthetic jet device formed within layers of a package substrate, such as to provide a controlled airflow for sensing or cooling applications. The jet device includes an electromagnetically driven vibrating membrane of conductive material between a top and bottom cavity. A top lid with an opening covers the top cavity, and a permanent magnet is below the bottom cavity. An alternating current signal conducted through the membrane causes the membrane to vibrate in the presence of a magnetic field caused by the permanent magnet. By being manufactured with package forming processes, the jet (1) is manufactured more cost-effectively than by using silicon chip or wafer processing; (2) is easily integrated as part of and with the other layers of a package substrate; and (3) can be driven by a chip mounted on the package. Embodiments also include systems having and processes for forming the jet.

## Claims

### Claim 1

A synthetic jet device comprising:
a vibrating membrane disposed between a top cavity and a bottom cavity, wherein the top cavity is disposed above the vibrating membrane, and the bottom cavity is disposed below the vibrating membrane;
a lower support disposed between the vibrating membrane and a permanent magnet, wherein the vibrating membrane is above the bottom cavity, and the bottom cavity is above the permanent magnet;
an upper support disposed between the vibrating membrane and a top lid; and
an opening through the top lid, wherein the top lid is positioned above the top cavity and the vibrating membrane.

### Claim 2 (depends on 1)

The device of claim 1, wherein the lower support has a top surface attached to a bottom surface of the vibrating membrane around a perimeter of the bottom surface of the vibrating membrane.

### Claim 3 (depends on 2)

The device of claim 2, wherein the upper support has a bottom surface attached to a top surface of the vibrating membrane around a perimeter of the top surface of the vibrating membrane.

### Claim 4 (depends on 1)

The device of claim 1, wherein the vibrating membrane comprises an electroplated conductor, a top surface forming a bottom surface of the top cavity, and a bottom surface forming a top surface of the bottom cavity;
wherein the lower support comprises a conductive material, and forms an outer surface of the bottom cavity below the vibrating membrane;
wherein the upper support comprises a conductive material, and forms an outer surface of the top cavity above the vibrating membrane;
wherein the permanent magnet comprises a ferromagnetic material, has a top surface forming a bottom surface of the bottom cavity, and is electrically insulated from the vibrating membrane;
wherein the top lid comprises an insulator material, and has a bottom surface forming a top surface of the top cavity; and
wherein the opening extends from a top surface to the bottom surface of the top lid.

### Claim 5 (depends on 1)

The device of claim 1, wherein the opening has a diameter to allow puffs of fluid to be sucked in and expelled from the top cavity through the opening when the vibrating membrane vibrates, to create the puffs of the fluid at a velocity that entrains the fluid surrounding the synthetic jet device to create a synthetic jet of the fluid comprising the puffs of the fluid and the entrained surrounding fluid.

### Claim 6 (depends on 1)

The device of claim 1, wherein the opening is an orifice having a diameter that is predetermined based on a volume of the top cavity, a diameter of the vibrating membrane, and
a thickness of the vibrating membrane; and wherein a Helmoltz frequency of the top cavity matches a resonant frequency of the vibrating membrane.

### Claim 7 (depends on 1)

The device of claim 1, further comprising: first and second electronic contacts electrically coupled to a first and a second edge, respectively, of the vibrating membrane, for conducting an alternating current through the vibrating membrane.

### Claim 8 (depends on 7)

The device of claim 7, further comprising:
a source of the alternating current electrically connected to the vibrating membrane through the first or second electronic contacts;
wherein the alternating current has a frequency and an amount of current to cause the vibrating membrane to vibrate with a predetermined amplitude and at a predetermined frequency.

### Claim 9 (depends on 1)

The device of claim 1, further comprising one of an electrically insulating epoxy, an electrically insulating adhesive, or an electrically insulating layer disposed between the lower support and the permanent magnet; wherein the upper support, the vibrating membrane and the lower support are an electroplated copper material; and wherein the top lid is a solder resist material.

### Claim 10 (depends on 1)

The device of claim 1, wherein the fluid is at least one of a gas or a liquid.

### Claim 11

A package substrate comprising:
a plurality of layers comprising dielectric material and conductive material, wherein the conductive material of the plurality of layers include conductive traces and conductive vias formed between the dielectric material; and
a synthetic jet device disposed within the package substrate, the synthetic jet device having: a magnet; and some of the plurality of layers comprising the dielectric material and the conductive material.

### Claim 12 (depends on 11)

The package substrate of claim 11, wherein the plurality of layers including the conductive traces and the conductive vias are plated onto the dielectric material; and wherein the synthetic jet device is disposed within the plurality of layers including the conductive traces, the conductive vias, and the dielectric material.

### Claim 13 (depends on 12)

The package substrate of claim 12, wherein the synthetic jet device has a vibrating member that is a portion of the conductive material of the plurality of layers, the vibrating member has one edge coupled to a source of alternating current; and
wherein the source of alternating current is a circuit or processor attached to the package substrate that includes the synthetic jet device.

### Claim 14 (depends on 13)

The package substrate of claim 13 wherein the synthetic jet device is driven by the alternating current to provide a pulsating flow of fluid into a millimeter or micrometer scale fluid gap above an opening in the synthetic jet device to break up thermal boundaries in the fluid gap.

### Claim 15 (depends on 14)

The package substrate of claim 14, wherein the fluid is at least one of a gas or a liquid.

### Claim 16 (depends on 11)

The package substrate of claim 11, wherein a first conductive trace of the conductive traces is coupled through an electronic contact of the synthetic jet device to a first edge of a vibrating membrane of the synthetic jet device; and wherein a second conductive trace of the conductive traces is coupled through a second contact to a second edge of the vibrating member, wherein the second edge is disposed opposite of the first edge.

### Claim 17 (depends on 16)

The package substrate of claim 16, further comprising a processor chip mounted onto a first surface of the package substrate, the processor chip having a first set of electronic contacts coupled to a second set of electronic contacts on the first surface of the package substrate, and the processor chip having a control circuit to transmit an alternating current as an electrical driving signal to the first conductive trace of the package substrate.

### Claim 18 (depends on 17)

The package substrate of claim 17, further comprising a motherboard mounted onto a second surface of the package substrate, the motherboard having a third set of electronic contacts coupled to a fourth set of electronic contacts on the second surface of the package substrate.

### Claim 19 (depends on 11)

The package substrate of claim 11, the synthetic jet device including:
a vibrating membrane disposed between a top cavity and a bottom cavity;
a lower support having a top surface attached to a bottom surface of the vibrating membrane around a perimeter of the bottom surface of the vibrating membrane;
an upper support having a bottom surface attached to a top surface of the vibrating membrane around a perimeter of the top surface of the vibrating membrane;
wherein the magnet is a permanent magnet having a top surface coupled to a bottom surface of the lower support around a perimeter of the top surface of the permanent magnet;
a top lid having a bottom surface attached to a top surface of the upper support around a perimeter of the bottom surface of the top lid; and
an opening through the top lid to allow puffs of fluid to be expelled from the opening when the vibrating membrane vibrates.

### Claim 20 (depends on 19)

The package substrate of claim 19, wherein the fluid is at least one of a gas or a liquid.

### Claim 21

A system comprising:
a package substrate having a plurality of layers of dielectric material and a plurality of layers including conductive material; and
a synthetic jet device disposed within the package substrate, the synthetic jet device having:
a vibrating membrane disposed between a top cavity and a bottom cavity;
a lower support disposed between the vibrating membrane and a permanent magnet;
an upper support disposed between the vibrating membrane and a top lid; and
an opening through the top lid.

### Claim 22 (depends on 21)

The system of claim 21, further comprising: first and second electronic contacts electrically coupled to a first and a second edge, respectively, of the vibrating membrane, for conducting an alternating current through the vibrating membrane.

### Claim 23 (depends on 22)

The system of claim 22, further comprising:
a source of the alternating current electrically connected to the vibrating membrane through the first or second electronic contacts;
wherein the alternating current has a frequency and an amount of current to cause the vibrating membrane to vibrate with a predetermined amplitude and at a predetermined frequency.

### Claim 24 (depends on 21)

The device of claim 21, wherein the opening has a diameter to allow puffs of fluid to be sucked in and expelled from the top cavity through the opening when the vibrating membrane vibrates, and wherein the fluid is at least one of a gas or a liquid.