# US 10,121,673 B2 · Miniaturize particulate matter detector and manufacturing method of a filter > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 10,121,673 B2 - Document ID: US10121673B2 - Status: Granted - Kind: B2 - Application number: 14/953,424 - Filed: 2015-11-30 - Published: 2017-02-23 - Granted: 2018-11-06 - Earliest claimed: 2015-08-19 - Assignees: Industrial Technology Research Institute - Applicants: Industrial Technology Research Institute - Inventors: Chia-Wen Chiang; Cheng-Ta Ko; I-Hsing Lin - Web page: https://patentgrep.com/patent/US10121673B2 ## CPC - H10P 50/642: {Chemical etching} - G01N 29/022: {Fluid sensors based on microsensors, e.g. quartz crystal-microbalance [QCM], surface acoustic wave [SAW] devices, tuning forks, cantilevers, flexural plate wave [FPW] devices (microdevices per se B81B)} - G01N 29/036: by measuring frequency or resonance of acoustic waves - G01N 15/0606: {by collecting particles on a support} - G01N 2015/0046: {in gas, e.g. smoke} - G01N 2291/014: Resonance or resonant frequency - G01N 2291/02809: Concentration of a compound, e.g. measured by a surface mass change - H10P: GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10 - G01N: INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES (measuring or testing apparatus or processes other than immunoassay, involving enzymes or microorganisms C12M, C12Q) ## Abstract In an embodiment, a miniaturize particulate matter detector includes a filter having a plurality of holes, and a concentration detector correspondingly disposed under the filter. The concentration detector has a detect area used for detecting a concentration of at least one miniaturize particulate matter. A manufacturing method of the filter is also provided. ## Claims ### Claim 1 A miniaturized particulate matter detector, comprising: a filter having a plurality of holes; and a concentration detector correspondingly disposed under the filter, wherein the concentration detector has a detect area used for detecting a concentration of at least one miniaturized particulate matter, wherein all or part of the plurality of holes have an opening shape of gradually reducing or a gradually expanding, and the plurality of holes are through-silicon vias. ### Claim 2 (depends on 1) The miniaturized particulate matter detector of claim 1, wherein a diameter of the plurality of holes is provided to allow an air flow passing through, and the air flow carries at least one particle with a diameter of 2.5 micrometers or less. ### Claim 3 (depends on 1) The miniaturized particulate matter detector of claim 1, wherein the concentration detector is disposed on a circuit board, and both sides of the concentration detector are respectively disposed in an air through-hole. ### Claim 4 (depends on 1) The miniaturized particulate matter detector of claim 1, wherein an oscillator and a circuit are included in the detect area, the oscillator is electrically connected to the circuit, and when the at least one miniaturized particulate matter is attached to the oscillator, an oscillation frequency of the oscillator decreases and the concentration of the at least one miniaturized particulate matter is detected. ### Claim 5 (depends on 4) The miniaturized particulate matter detector of claim 4, wherein the circuit is disposed on and electrically connected to a circuit board, and the detector further includes the circuit board and at least one conductor electrically connected to the circuit board, wherein the circuit board disposes a second through-hole corresponding to the concentration detector, and an air flow passes through the oscillator of the concentration detector and enters the second through hole. ### Claim 6 (depends on 1) The miniaturized particulate matter detector of claim 1, further including: an intermediate element having two sides and a first through-hole, the intermediate element is disposed between the filter and the concentration detector, and the first through-hole is aligned with the plurality of holes and the concentration detector; a top cover having an air inlet, wherein the top cover and the filter are disposed correspondingly to one side of the intermediate element; and a bottom cover having an air outlet, wherein the bottom cover and the concentration detector are disposed correspondingly to the other side of the intermediate element. ### Claim 7 (depends on 6) The miniaturized particulate matter detector of claim 6, wherein the filter is disposed on a support plate having a recess thereon, and the filter is inserted inside the recess. ### Claim 8 (depends on 7) The miniaturized particulate matter detector of claim 7, wherein the concentration detector is disposed on a circuit board; and the top cover, the support plate, the intermediate element, the circuit board and the bottom cover dispose, respectively, a plurality of lock holes thereon to provide a plurality of keys to fix the top cover, the support plate, the intermediate element, the circuit board and the bottom cover to form a module. ### Claim 9 (depends on 6) The miniaturized particulate matter detector of claim 6, wherein each of the two sides of the intermediate element disposes a first groove, and a first seal element is embedded inside the first groove; and a first inside surface of the top cover and a second inside surface of the bottom cover dispose a second groove and a third groove, respectively, and a second seal element and a third seal element are embedded in the second groove and the third groove, respectively. ### Claim 10 (depends on 6) The miniaturized particulate matter detector of claim 6, wherein the concentration detector is disposed on a circuit board; four gaskets are disposed between the top cover and the support plate, between the support plate and the intermediate element, between the intermediate element and the circuit board, and between the circuit board and the bottom cover, respectively, to provide a buffering effect; and each of the four gaskets disposes a plurality of lock holes to provide a plurality of keys to fix the top cover, the support plate, the intermediate element, the circuit board and the bottom cover.