# US 10,120,292 B2 · Support apparatus, lithographic apparatus and device manufacturing method > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 10,120,292 B2 - Document ID: US10120292B2 - Status: Granted - Kind: B2 - Application number: 15/297,001 - Filed: 2016-10-18 - Published: 2017-03-30 - Granted: 2018-11-06 - Earliest claimed: 2012-05-29 - Assignees: ASML Netherlands B.V. - Applicants: Asml Netherlands B.V. - Inventors: Raymond Wilhelmus Louis Lafarre; Adrianus Hendrik Koevoets; Sjoerd Nicolaas Lambertus Donders; Menno Fien; Antonius Franciscus Johannes De Groot; Christiaan Alexander Hoogendam; Johannes Henricus Wilhelmus Jacobs; Nicolaas Ten Kate; Martijn Houben; Jan Steven Christiaan Westerlaken; Jim Vincent Overkamp; Maarten Van Beijnum - Web page: https://patentgrep.com/patent/US10120292B2 ## CPC - G03F 7/70716: {Stages} - G03F 7/70341: {Details of immersion lithography aspects, e.g. exposure media or control of immersion liquid supply (chemical composition of immersion liquids G03F7/2041)} - G03F 7/707: {Chucks, e.g. chucking or un-chucking operations or structural details} - G03F 7/70733: {Handling masks and workpieces, e.g. exchange of workpiece or mask, transport of workpiece or mask} - G03F: PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR; (phototypographic composing devices B41B; photosensitive materials or processes for photographic purposes G03C; electrophotography, sensitive layers or processes therefor G03G) ## Abstract A support apparatus for a lithographic apparatus has an object holder and an extraction body radially outward of the object holder. The object holder is configured to support an object. The extraction body includes an extraction opening configured to extract fluid from a top surface of the support apparatus. The extraction body is spaced from the object holder such that the extraction body is substantially decoupled from the object holder. The extraction body comprises a projection configured such that it surrounds the object holder and such that, in use, a layer of liquid is retained on the projection and in contact with an object supported on the object holder. ## Claims ### Claim 1 A support apparatus for a lithographic apparatus, the support apparatus comprising: an object holder configured to support an object; and an extraction body outward of the object holder and arranged to partially extend under a peripheral edge of the object when supported by the object holder, the extraction body comprising a first opening and a second opening, each of the first and second openings configured to extract fluid through a gap, at an upper surface of the support apparatus, between the extraction body and the object when supported on the object holder, wherein the extraction body is essentially mechanically and thermally decoupled from the object holder. ### Claim 2 (depends on 1) The support apparatus of claim 1, wherein the second opening is in fluid communication with an under pressure. ### Claim 3 (depends on 1) The support apparatus of claim 1, wherein the first opening is arranged inward, relative to a center of the object holder, of the second opening and located underneath the object when supported on the object holder. ### Claim 4 (depends on 1) The support apparatus of claim 1, wherein the extraction body is spaced from the object holder by a gap such that the extraction body is essentially mechanically and thermally decoupled from the object holder. ### Claim 5 (depends on 1) The support apparatus of claim 1, wherein the extraction body is connected to the object holder by a seal material. ### Claim 6 (depends on 1) The support apparatus of claim 1, wherein the extraction body is connected to the object holder by a plurality of peripherally spaced joints. ### Claim 7 (depends on 1) The support apparatus of claim 1, wherein an extent of overlap between an inner peripheral region of the extraction body and an outer peripheral region of the object, when supported on the object holder, is in a range from about 0.5 mm to about 3 mm. ### Claim 8 (depends on 1) The support apparatus of claim 1, wherein the extraction body further comprises a thermal conditioning system configured to control a temperature of the extraction body. ### Claim 9 A device manufacturing method using a lithographic apparatus, the method comprising: supporting a substrate on a support apparatus, the support apparatus comprising an object holder supporting the substrate, and an extraction body outward of the object holder and partially extending under a peripheral edge of the substrate, the extraction body comprising a first opening and a second opening and the extraction body is essentially mechanically and thermally decoupled from the object holder; extracting fluid using the first and second openings through a gap, at an upper surface of the support apparatus, between the extraction body and the substrate; and projecting a beam onto the substrate. ### Claim 10 (depends on 9) The method of claim 9, wherein the first opening is arranged inward, relative to a center of the object holder, of the second opening and located underneath the substrate. ### Claim 11 (depends on 9) The method of claim 9, wherein the extraction body is spaced from the object holder by a gap such that the extraction body is essentially mechanically and thermally decoupled from the object holder. ### Claim 12 (depends on 9) The method of claim 9, further comprising controlling a temperature of the extraction body using a thermal conditioning system of the extraction body. ### Claim 13 (depends on 9) The method of claim 9, wherein the extraction body is connected to the object holder by a plurality of peripherally spaced joints. ### Claim 14 A lithographic apparatus, comprising: a pattern transfer system configured to transfer a pattern onto a substrate; a fluid handling system configured to provide a fluid to a space between the projection system and the substrate; an object holder configured to support an object; and an extraction body outward of the object holder and arranged to partially extend under a peripheral edge of the object when supported by the object holder, the extraction body comprising a first opening and a second opening, each of the first and second openings configured to extract fluid through a gap, at an upper surface, between the extraction body and the object when supported on the object holder, wherein the extraction body is essentially mechanically and thermally decoupled from the object holder. ### Claim 15 (depends on 14) The apparatus of claim 14, wherein the second opening is in fluid communication with an under pressure. ### Claim 16 (depends on 14) The apparatus of claim 14, wherein the first opening is arranged inward, relative to a center of the object holder, of the second opening and located underneath the object when supported on the object holder. ### Claim 17 (depends on 14) The apparatus of claim 14, wherein the extraction body is spaced from the object holder by a gap such that the extraction body is essentially mechanically and thermally decoupled from the object holder. ### Claim 18 (depends on 14) The apparatus of claim 14, wherein the extraction body is connected to the object holder by a seal material. ### Claim 19 (depends on 14) The apparatus of claim 14, wherein the extraction body is connected to the object holder by a plurality of peripherally spaced joints. ### Claim 20 (depends on 14) The apparatus of claim 14, wherein the extraction body further comprises a thermal conditioning system to control a temperature of the extraction body.