# US 10,120,211 B2 · Self-tuned silicon-photonic WDM transmitter

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- Number: US 10,120,211 B2
- Document ID: US10120211B2
- Status: Granted
- Kind: B2
- Application number: 15/346,565
- Filed: 2016-11-08
- Published: 2018-08-16
- Granted: 2018-11-06
- Earliest claimed: 2016-11-08
- Assignees: Oracle International Corporation
- Applicants: Oracle International Corporation
- Inventors: Xuezhe Zheng; Ying Luo; Ashok V. Krishnamoorthy
- Web page: https://patentgrep.com/patent/US10120211B2

## CPC

- G02F 1/025: in an optical waveguide structure (G02F1/017, {G02F1/2257} take precedence)
- G02B 6/12007: {forming wavelength selective elements, e.g. multiplexer, demultiplexer}
- G02B 6/2938: {for multiplexing or demultiplexing, i.e. combining or separating wavelengths, e.g. 1xN, NxM}
- G02B 6/4215: {the intermediate optical elements being wavelength selective optical elements, e.g. variable wavelength optical modules or wavelength lockers (G02B6/4246 takes precedence)}
- G02F 1/0147: {based on thermo-optic effects (G02F1/132 takes precedence)}
- H04B 10/506: {Multiwavelength transmitters}
- H04J 14/02: Wavelength-division multiplex systems
- G02B 2006/12061: {Silicon}
- G02B 2006/12142: {Modulator}
- G02F 2203/055: wavelength filtering
- G02F 2203/15: involving resonance effects, e.g. resonantly enhanced interaction
- G02F 2203/70: Semiconductor optical amplifier [SOA] used in a device covered by G02F
- G02F: OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02B: OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- H04B: TRANSMISSION
- H04J: MULTIPLEX COMMUNICATION (transmission in general H04B; peculiar to transmission of digital information H04L5/00; systems for the simultaneous or sequential transmission of more than one television signal H04N7/08; in exchanges H04Q11/00; stereophonic systems H04S)

## Abstract

An optical transmitter includes: a set of reflective silicon optical amplifiers (RSOAs), a set of ring modulators, a shared broadband reflector, a set of intermediate waveguides, and a shared waveguide. Each intermediate waveguide channels light from an RSOA in proximity to an associated ring modulator to cause optically coupled light to circulate in the associated ring modulator. The shared waveguide is coupled to the shared broadband reflector, and passes in proximity to the set of ring modulators, so that light circulating in each ring modulator causes optically coupled light to flow in the shared optical waveguide. During operation, each RSOA forms a lasing cavity with the shared broadband reflector, wherein each lasing cavity has a different wavelength, which is determined by a resonance of the associated ring modulator. The different wavelengths are combined in the shared waveguide to produce a combined output.

## Claims

### Claim 1

An optical transmitter, comprising:
a set of reflective silicon optical amplifiers (RSOAs), which includes two or more RSOAs;
a set of ring modulators, which modulate optical signals based on electrical input signals;
a shared broadband reflector;
a set of intermediate waveguides, wherein each intermediate waveguide in the set is coupled to an RSOA in the set of RSOAs, and channels light from the RSOA in proximity to an associated ring modulator in the set of ring modulators to cause optically coupled light to circulate in the associated ring modulator; and
a shared waveguide with a first and a second end, wherein the first end is coupled to the shared broadband reflector, and wherein the shared waveguide passes in proximity to the set of ring modulators, so that light circulating in each ring modulator in the set causes optically coupled light to flow in the shared optical waveguide; and
wherein each RSOA in the set of RSOAs forms a lasing cavity, which includes an associated intermediate waveguide in the set of intermediate waveguides, an associated ring modulator in the set of ring modulators, the shared waveguide and the shared broadband reflector;
wherein each lasing cavity has a different wavelength, which is determined by a resonance of the associated ring modulator; and
wherein the different wavelengths in each of the lasing cavities are combined in the shared waveguide to produce a combined output that emanates from the second end of the shared waveguide.

### Claim 2 (depends on 1)

The optical transmitter of claim 1, wherein each ring modulator in the set of ring modulators simultaneously performs three operations, including:
wavelength discrimination;
high-speed modulation; and
wavelength multiplexing onto the shared waveguide.

### Claim 3 (depends on 1)

The optical transmitter of claim 1,
wherein each lasing cavity includes a thermo-optic coefficient (TOC) compensator comprising a section of compensation material;
wherein the lasing cavity includes a length lSi through silicon, a length lC through the compensation material, and a length lOGM through the optical gain material;
wherein the effective refractive index of silicon is nSi, the effective refractive index of the compensation material is nC, and the effective refractive index of the optical gain material is nOGM;
wherein the effective TOC of silicon is dnSi/dT, the effective TOC of the compensation material is dnC/dT, and the effective TOC of the optical gain material is dnOGM/dT; and
wherein lc≈lOGM*(dnOGM/dT−dnSi/dT)/(dnSi/dT−dnC/dT), whereby the effective TOC of a portion of the lasing cavity that passes through the optical gain material and the compensation material is substantially the same as the TOC of silicon.

### Claim 4 (depends on 1)

The optical transmitter of claim 1, wherein the set of RSOAs are located on one or more gain chips, which are separate from a semiconductor chip that includes the set of intermediate waveguides, the set of ring modulators, the shared waveguide, and the shared broadband reflector.

### Claim 5 (depends on 1)

The optical transmitter of claim 1, wherein each ring modulator in the set of ring modulators includes a thermal-tuning mechanism.

### Claim 6 (depends on 1)

The optical transmitter of claim 1, wherein each ring modulator in the set of ring modulators comprises a coupled dual-ring modulator.

### Claim 7 (depends on 6)

The optical transmitter of claim 6, wherein each coupled dual-ring modulator includes two rings, which have aligned resonances that are tuned to be offset from each other, so that the coupled dual-ring modulator functions as a filter with a flat-top response, which is aligned with an associated lasing cavity mode.

### Claim 8 (depends on 6)

The optical transmitter of claim 6, wherein each coupled dual-ring modulator includes two rings having different radii, which causes a Vernier effect that provides a combined tuning range that is larger than the gain bandwidth of an associated RSOA.

### Claim 9 (depends on 1)

The optical transmitter of claim 1, wherein the shared broadband reflector comprises one of the following:
a loop mirror with a 50/50 directional coupler;
a loop mirror with a Y-junction; and
a waveguide distributed Bragg reflector (DBR).

### Claim 10

A system, comprising:
at least one processor;
at least one memory coupled to the at least one processor; and
an optical transmitter for communicating optical signals generated by the system, wherein the optical transmitter includes:
a set of reflective silicon optical amplifiers (RSOAs), which includes two or more RSOAs;
a set of ring modulators, which modulate optical signals based on electrical input signals;
a shared broadband reflector;
a set of intermediate waveguides, wherein each intermediate waveguide in the set is coupled to an RSOA in the set of RSOAs, and channels light from the RSOA in proximity to an associated ring modulator in the set of ring modulators to cause optically coupled light to circulate in the associated ring modulator; and
a shared waveguide with a first and a second end, wherein the first end is coupled to the shared broadband reflector, and wherein the shared waveguide passes in proximity to the set of ring modulators, so that light circulating in each ring modulator in the set causes optically coupled light to flow in the shared optical waveguide;
wherein each RSOA in the set of RSOAs forms a lasing cavity, which includes an associated intermediate waveguide in the set of intermediate waveguides, an associated ring modulator in the set of ring modulators, the shared waveguide and the shared broadband reflector;
wherein each lasing cavity has a different wavelength, which is determined by a resonance of the associated ring modulator; and
wherein the different wavelengths in each of the lasing cavities are combined in the shared waveguide to produce a combined output that emanates from the second end of the shared waveguide.

### Claim 11 (depends on 10)

The system of claim 10, wherein each ring modulator in the set of ring modulators simultaneously performs three operations, including:
wavelength discrimination;
high-speed modulation; and
wavelength multiplexing onto the shared waveguide.

### Claim 12 (depends on 10)

The system of claim 10,
wherein each lasing cavity includes a thermo-optic coefficient (TOC) compensator comprising a section of compensation material;
wherein the lasing cavity includes a length lSi through silicon, a length lC through the compensation material, and a length lOGM through the optical gain material;
wherein the effective refractive index of silicon is nSi, the effective refractive index of the compensation material is nC, and the effective refractive index of the optical gain material is nOGM;
wherein the effective TOC of silicon is dnSi/dT, the effective TOC of the compensation material is dnC/dT, and the effective TOC of the optical gain material is dnOGM/dT; and
wherein lc≈lOGM*(dnOGM/dT−dnSi/dT)/(dnSi/dT−dnC/dT), whereby the effective TOC of a portion of the lasing cavity that passes through the optical gain material and the compensation material is substantially the same as the TOC of silicon.

### Claim 13 (depends on 10)

The system of claim 10, wherein the set of RSOAs are located on one or more gain chips, which are separate from a semiconductor chip that includes the set of intermediate waveguides, the set of ring modulators, the shared waveguide, and the shared broadband reflector.

### Claim 14 (depends on 10)

The system of claim 10, wherein each ring modulator in the set of ring modulators includes a thermal-tuning mechanism.

### Claim 15 (depends on 10)

The system of claim 10, wherein each ring modulator in the set of ring modulators comprises a coupled dual-ring modulator.

### Claim 16 (depends on 15)

The system of claim 15, wherein each coupled dual-ring modulator includes two rings, which have aligned resonances that are tuned to be offset from each other, so that the coupled dual-ring modulator functions as a filter with a flat-top response, which is aligned with an associated lasing cavity mode.

### Claim 17 (depends on 15)

The system of claim 15, wherein each coupled dual-ring modulator includes two rings having different radii, which causes a Vernier effect that provides a combined tuning range that is larger than the gain bandwidth of an associated RSOA.

### Claim 18 (depends on 1)

The optical transmitter of claim 1, wherein the shared broadband reflector comprises one of the following:
a loop mirror with a 50/50 directional coupler;
a loop mirror with a Y-junction; and
a waveguide distributed Bragg reflector (DBR).

### Claim 19

A method for operating an optical transmitter, comprising:
generating a set of optical signals by powering a set of reflective silicon optical amplifiers (RSOAs), which includes two or more RSOAs;
channeling the generated optical signals through a set of intermediate waveguides, wherein each intermediate waveguide in the set is attached to an RSOA in the set of RSOAs and channels light from the RSOA in proximity to an associated ring modulator in a set of ring modulators to cause optically coupled light to circulate in the associated ring modulator;
optically coupling light, which is circulating in each ring modulator in the set of ring modulators, into a shared waveguide with a first end and a second end;
directing the optically coupled light through the first end of the shared waveguide to a shared broadband reflector, which reflects the directed light back down the shared waveguide, wherein the shared broadband reflector forms a separate lasing cavity with each RSOA in the set of RSOAs, wherein each lasing cavity includes the shared broadband reflector, the shared waveguide, an associated ring modulator in the set of ring modulators, an associated intermediate waveguide in the set of intermediate waveguides and the RSOA, and wherein each lasing cavity has a different wavelength, which is determined by a resonance of the associated ring modulator; and
combining the different wavelengths from each of the lasing cavities in the shared waveguide to produce an output that emanates from the second end of the shared waveguide.

### Claim 20 (depends on 19)

The method of claim 19, wherein each ring modulator in the set of ring modulators simultaneously performs three operations, including:
wavelength discrimination;
high-speed modulation; and
wavelength multiplexing onto the shared waveguide.