# US 10,120,186 B2 · Scanning mirror

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- Number: US 10,120,186 B2
- Document ID: US10120186B2
- Status: Granted
- Kind: B2
- Application number: 15/400,274
- Filed: 2017-01-06
- Published: 2017-07-20
- Granted: 2018-11-06
- Earliest claimed: 2016-01-19
- Assignees: Disco Corporation
- Applicants: Disco Corporation
- Inventors: Yu Kudo
- Web page: https://patentgrep.com/patent/US10120186B2

## CPC

- G02B 26/105: {with one or more pivoting mirrors or galvano-mirrors (G02B26/101 takes precedence)}
- G02B 5/0808: {having a single reflecting layer (G02B5/0883, G02B5/0891 take precedence)}
- G02B: OPTICAL ELEMENTS, SYSTEMS OR APPARATUS

## Abstract

A scanning mirror includes a mirror base and a reflective film formed on the mirror base. The mirror base is formed from a non-metallic material having a specific rigidity, determined by Young's modulus (GPa) and density (g/cm3), of at least 100 GPa·cm3/g.

## Claims

### Claim 1

A scanning mirror comprising:
A disk shaped mirror base; and
a reflective film formed directly across an entire surface of the mirror base,
wherein the mirror base is formed from a non-metallic material having a specific rigidity, determined by Young's modulus and density, of at least 100 GPa·cm3/g; and
wherein the scanning mirror is resonated about a rotational axis via a shaft connected to a drive unit.

### Claim 2 (depends on 1)

The scanning mirror according to claim 1, which is driven at a value of f2·θ in a region of not less than 873 krad/s2, where f (kHz) is an excitation frequency for driving the scanning mirror, and θ(rad) is a mechanical deflection angle of the mirror base.

### Claim 3 (depends on 1)

The scanning mirror according to claim 1, wherein the non-metallic material is diamond or silicon carbide.

### Claim 4 (depends on 1)

The scanning mirror according to claim 1, wherein the mirror base is used as a resonant scanner or a galvano scanner.