# US 10,120,182 B2 · Imaging systems with fluidic color filter elements

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- Number: US 10,120,182 B2
- Document ID: US10120182B2
- Status: Granted
- Kind: B2
- Application number: 15/283,707
- Filed: 2016-10-03
- Published: 2018-04-05
- Granted: 2018-11-06
- Earliest claimed: 2016-10-03
- Assignees: Semiconductor Components Industries, LLC
- Applicants: Semiconductor Components Industries, LLC
- Inventors: Swarnal Borthakur; Ulrich Boettiger
- Web page: https://patentgrep.com/patent/US10120182B2

## CPC

- G02B 26/004: {based on a displacement or a deformation of a fluid}
- G02B 5/201: {in the form of arrays}
- G02B 26/007: {the movable or deformable optical element controlling the colour, i.e. a spectral characteristic, of the light}
- H04N 23/20: for generating image signals from infrared radiation only
- H04N 25/131: including elements passing infrared wavelengths
- H10F 39/182: {Colour image sensors}
- H10F 39/8053: {Colour filters}
- G02B: OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- H04N: PICTORIAL COMMUNICATION, e.g. TELEVISION
- H10F: INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION

## Abstract

Imaging systems may include fluidic color filter elements to increase the flexibility of the system. An imaging system may include a number of fluid reservoirs with different color filter element fluids. The imaging sensor may include a number of separated color filter chambers. Fluids from the fluid reservoirs may be directed to specific color filter chambers as desired, with the option to change the color filter fluid in a chamber to a different color filer fluid at any time. To move the fluids to and from the fluid reservoirs to the color filter chambers, electrowetting may be used. The color filter chambers may be interposed between a ground electrode and a number of patterned electrodes. Voltages may be applied to the patterned electrodes to move the fluid to desired positions within the chambers.

## Claims

### Claim 1

An imaging sensor comprising:
a substrate;
a plurality of photodiodes in the substrate;
a glass layer positioned above the substrate;
walls that are interposed between the substrate and the glass layer, wherein the walls define color filter chambers;
a ground electrode that covers all of the photodiodes in the imaging sensor, wherein the ground electrode is interposed between the walls and the glass layer;
a first insulating layer interposed between the walls and the ground electrode;
a plurality of independently addressable patterned electrodes that are interposed between the walls and the substrate, wherein voltages are applied to the plurality of independently addressable patterned electrodes to position color filter fluid within the color filter chambers; and
a second insulating layer interposed between the walls and the plurality of independently addressable patterned electrodes.

### Claim 2 (depends on 1)

The imaging sensor defined in claim 1, wherein the color filter fluid forms color filter elements for the image sensor and wherein each color filter element covers only one photodiode.

### Claim 3 (depends on 1)

The imaging sensor defined in claim 1, wherein the color filter fluid forms color filter elements for the image sensor and wherein each color filter element covers more than one photodiode.

### Claim 4 (depends on 1)

The imaging sensor defined in claim 1, wherein the first insulating layer is in direct contact with the walls and the ground electrode and wherein the second insulating layer is in direct contact with the walls and the plurality of independently addressable patterned electrodes.

### Claim 5 (depends on 1)

The imaging sensor defined in claim 1, further comprising one or more additional layers of color filter chambers formed above the color filter chambers.

### Claim 6 (depends on 1)

The imaging sensor defined in claim 1, wherein the walls comprise silicon dioxide.

### Claim 7 (depends on 1)

The imaging sensor defined in claim 1, wherein the glass layer has openings that allow the color filter fluid to be supplied to the color filter chambers from fluid reservoirs.

### Claim 8 (depends on 1)

The imaging sensor defined in claim 1, wherein each color filter chamber has a respective inlet.

### Claim 9 (depends on 1)

The imaging sensor defined in claim 1, wherein the ground electrode and the plurality of independently addressable patterned electrodes are formed from transparent material.

### Claim 10 (depends on 1)

The imaging sensor defined in claim 1, wherein the ground electrode and the plurality of independently addressable patterned electrodes are formed from indium tin oxide.

### Claim 11 (depends on 1)

The imaging sensor defined in claim 1, further comprising:
a plurality of fluid reservoirs, wherein each fluid reservoir contains a respective color filter fluid.

### Claim 12 (depends on 11)

The imaging sensor defined in claim 11, wherein the plurality of fluid reservoirs comprises an infrared color filter element fluid reservoir that contains infrared color filter fluid.

### Claim 13 (depends on 11)

The imaging sensor defined in claim 11, wherein the plurality of fluid reservoirs comprises a red color filter element fluid reservoir that contains red color filter fluid, a blue color filter element fluid reservoir that contains blue color filter fluid, and a green color filter element fluid reservoir that contains green color filter fluid.

### Claim 14 (depends on 11)

The imaging sensor defined in claim 11, wherein the plurality of fluid reservoirs comprises an ultraviolet color filter element fluid reservoir that contains ultraviolet color filter fluid.

### Claim 15 (depends on 11)

The imaging sensor defined in claim 11, wherein the plurality of fluid reservoirs comprises a cleaning solution fluid reservoir that contains cleaning solution.

### Claim 16 (depends on 11)

The imaging sensor defined in claim 11, wherein the plurality of fluid reservoirs comprises a cooling liquid fluid reservoir that contains cooling fluid.
