# US 10,120,178 B2 · Vibration drive device in which separation between members by external force is suppressed, lens barrel, image pickup apparatus, and stage device > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 10,120,178 B2 - Document ID: US10120178B2 - Status: Granted - Kind: B2 - Application number: 14/918,921 - Filed: 2015-10-21 - Published: 2016-05-05 - Granted: 2018-11-06 - Earliest claimed: 2014-10-29 - Assignees: Canon Kabushiki Kaisha - Applicants: Canon Kabushiki Kaisha - Inventors: Yasuyuki Araki - Web page: https://patentgrep.com/patent/US10120178B2 ## CPC - G02B 21/26: Stages; Adjusting means therefor - G02B 7/09: adapted for automatic focusing or varying magnification - G02B 7/10: by relative axial movement of several lenses, e.g. of varifocal objective lens - G02B 27/646: {compensating for small deviations, e.g. due to vibration or shake (movement of one or more optical elements for control of motion blur in cameras, projectors or printers G03B2205/0007; image stabilisation in cameras peculiar to the presence or use of an electronic image sensor H04N23/68)} - H02N 2/0015: {using only bending modes} - H02N 2/0055: {Supports for driving or driven bodies; Means for pressing driving body against driven body} - H02N 2/006: {Elastic elements, e.g. springs (in general F16F1/00)} - H02N 2/103: {by pressing one or more vibrators against the rotor} - G02B: OPTICAL ELEMENTS, SYSTEMS OR APPARATUS - H02N: ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR ## Abstract A vibration drive device can suppress separation between members thereof when an external force is applied thereto. The vibration drive device excites vibration in a vibrating body to move the vibrating body and a driven body relative to each other. The vibrating body has a piezoelectric element joined to a first surface of an elastic body. Protrusions for pressure contact with the driven body are formed on a second surface of the elastic body. The elastic body is supported by support plates, and the support plates are held on a base. An equalizing stage is disposed on a side facing the first surface of the elastic body. A vibration damping member disposed between the vibrating body and the equalizing stage suppresses transmission of vibration from the vibrating body to the equalizing stage. ## Claims ### Claim 1 A vibration drive device that comprises a vibrating body including an electromechanical energy conversion element and an elastic body having a first surface to which the electromechanical energy conversion element is joined and a second surface opposite from the first surface, on which protrusions are provided, and a driven body in pressure contact with the protrusions, and is configured to excite vibration in the vibrating body to thereby effect relative movement between the vibrating body and the driven body, the vibration drive device comprising: an equalizing stage disposed on a side facing the first surface of the elastic body; and a vibration damping member disposed between the vibrating body and said equalizing stage and configured to suppress transmission of vibration of the vibrating body to said equalizing stage, wherein said equalizing stage receives a pressure application force applied to the vibrating body via said vibration damping member, and thereby equalizes a pressure application force applied from the vibrating body to the driven body, wherein a length of a region of said vibration damping member in contact with the vibrating body is shorter than a length of the vibrating body in a direction orthogonal to a driving direction in which the vibrating body and the driven body are moved relative to each other, and also to a pressure application direction between the vibrating body and the driven body, wherein said equalizing stage includes protruding portions in contact with said vibration damping member at respective locations overlapping the protrusions as viewed in the pressure application direction, wherein an upper surface, facing the vibrating body, of each of the protruding portions has a first predetermined length in the driving direction and a second predetermined length in a direction orthogonal to the driving direction and the pressure application direction, and the predetermined length in the driving direction is shorter than the second predetermined length in the orthogonal direction, and wherein a length of the upper surface in the driving direction is shorter than a length of each of the protrusions in the driving direction. ### Claim 2 (depends on 1) The vibration drive device according to claim 1, wherein said vibration damping member damps a low-frequency vibration excited in the vibrating body without damping a high-frequency vibration excited in the vibrating body. ### Claim 3 (depends on 1) The vibration drive device according to claim 1, wherein said vibration damping member is made of felt or moltopren. ### Claim 4 (depends on 1) The vibration drive device according to claim 1, wherein by applying a predetermined alternating current (AC) voltage to the electromechanical energy conversion element, elliptic motion within a plane including the pressure application direction and the driving direction is excited in each protrusion of the vibrating body. ### Claim 5 (depends on 4) The vibration drive device according to claim 4, wherein the elliptic motion is generated by simultaneously exciting two different out-of-plane bending vibrations in the vibrating body. ### Claim 6 (depends on 5) The vibration drive device according to claim 5, wherein the two different out-of-plane bending vibrations are primary and secondary vibrations whose nodal lines are orthogonal to each other, and wherein in the vibrating body, each protrusion is provided close to a location corresponding to a loop of the primary out-of-plane bending vibration, and also to a location corresponding to a node of the secondary out-of-plane bending vibration. ### Claim 7 (depends on 1) The vibration drive device according to claim 1, further comprising a base having a recess, wherein said equalizing stage is disposed in a bottom of the recess, and wherein said vibration damping member is disposed between the vibrating body and said equalizing stage in the recess. ### Claim 8 (depends on 7) The vibration drive device according to claim 7, wherein said base has an annular shape, and wherein the vibrating body is disposed such that the driving direction coincides with a tangent direction of said base, so as to drivingly rotate the driven body. ### Claim 9 (depends on 1) The vibration drive device according to claim 1, further comprising support plates configured to support the elastic body, wherein each support plate has a thickness smaller than a thickness of the elastic body, and is joined to an associated one of opposite ends of the vibrating body in the driving direction, wherein in each support plate, a boundary between a joint portion thereof with the elastic body and a non-joint portion thereof is located close to a location corresponding to the node of the vibration excited in the vibrating body, and wherein in each support plate, the non-joint portion has one portion thereof bent from the boundary so as to avoid being brought into contact with the elastic body. ### Claim 10 (depends on 9) The vibration drive device according to claim 9, wherein each support plate is formed with a through-hole for reducing rigidity in the pressure application direction. ### Claim 11 (depends on 9) The vibration drive device according to claim 9, wherein each support plate has an arcuate shape. ### Claim 12 (depends on 1) A lens barrel comprising: a lens; and the vibration drive device according to claim 1, for moving said lens. ### Claim 13 (depends on 1) An image pickup apparatus comprising: a lens barrel; an image pickup element for converting an optical image formed by light passing through said lens barrel; and the vibration drive device according to claim 1 for moving a lens disposed in said lens barrel. ### Claim 14 (depends on 1) A stage device comprising: a stage; and the vibration drive device according to claim 1 for moving said stage within a plane of said stage. ### Claim 15 (depends on 1) The vibration drive device according to claim 1, wherein gaps are formed between the vibrating body and said equalizing stage. ### Claim 16 (depends on 15) The vibration drive device according to claim 15, further comprising a flexible printed circuit board, wherein the flexible printed circuit board has bonded portions that are bonded to the electromechanical energy conversion element, and non-bonded portions that are not bonded to the electromechanical energy conversion element, and wherein a part of the non-bonded portions is disposed at the gaps. ### Claim 17 A vibration drive device that comprises a vibrating body including an electromechanical energy conversion element and an elastic body on which protrusions are provided, and a driven body in contact with the protrusions, the vibration drive device comprising: an equalizing stage; and a vibration damping member disposed between the vibrating body and the equalizing stage, wherein the equalizing stage receives a pressure application force applied to the vibrating body via the vibration damping member, and thereby equalizes a pressure application force applied from the vibrating body to the driven body, wherein a length of a region of the vibration damping member in contact with the vibrating body is shorter than a length of the vibrating body in a direction orthogonal to a driving direction in which the vibrating body and the driven body are moved relative to each other, and also to a pressure application direction between the vibrating body and the driven body, and wherein the equalizing stage includes protruding portions in contact with the vibration damping member at respective locations overlapping the protrusions as viewed in the pressure application direction. ### Claim 18 (depends on 17) The vibration drive device according to claim 17, wherein a top surface of each of the protruding portions has a predetermined length in the driving direction, the predetermined length being shorter than a length of each of the protrusions in the driving direction. ### Claim 19 (depends on 17) The vibration drive device according to claim 17, wherein a top surface of each of the protruding portions has a first predetermined length in the driving direction and a second predetermined length in a direction orthogonal to the driving direction and the pressure application direction, and the first predetermined length is shorter than the second predetermined length. ### Claim 20 (depends on 17) A drive unit comprising: a base having at least one recess; and the vibration drive device according to claim 17, wherein the vibration drive device is disposed in the recess. ### Claim 21 (depends on 20) The drive unit according to claim 20, wherein the base has an annular shape, and wherein the vibrating body is disposed such that the driving direction is configured to be along a tangent direction of the base, so as to drivingly rotate the driven body. ### Claim 22 (depends on 17) A lens barrel comprising: a lens; and the vibration drive device according to claim 17, for moving the lens. ### Claim 23 (depends on 17) An image pickup apparatus comprising: a lens barrel; an image pickup element for converting an optical image formed by light passing through the lens barrel; and the vibration drive device according to claim 17 for moving a lens disposed in the lens barrel. ### Claim 24 (depends on 17) A stage device comprising: a stage; and the vibration drive device according to claim 17 for moving the stage within a plane of the stage.