# US 10,120,177 B2 · Optical characteristic measurement apparatus and optical system

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- Number: US 10,120,177 B2
- Document ID: US10120177B2
- Status: Granted
- Kind: B2
- Application number: 15/363,473
- Filed: 2016-11-29
- Published: 2017-06-29
- Granted: 2018-11-06
- Earliest claimed: 2015-12-25
- Assignees: Otsuka Electronics Co., Ltd.
- Applicants: Otsuka Electronics Co., Ltd.
- Inventors: Sota Okamoto; Hiroyuki Sano
- Web page: https://patentgrep.com/patent/US10120177B2

## CPC

- G02B 21/244: {using image analysis techniques}
- G01J 3/0208: {using focussing or collimating elements, e.g. lenses or mirrors; performing aberration correction}
- G01J 3/0237: {Adjustable, e.g. focussing}
- G02B 21/06: Means for illuminating specimens
- G02B 21/361: {Optical details, e.g. image relay to the camera or image sensor (G02B21/364 takes precedence; illumination details G02B21/06 and subgroups)}
- G02B: OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G01J: MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY (light sources F21, H01J, H01K, H05B; investigating properties of materials by optical means G01N)

## Abstract

An optical characteristic measurement apparatus which can be reduced in size and can achieve enhanced versatility is provided. The optical characteristic measurement apparatus includes a first optical element which converts measurement light from a measurement target object to parallel light, a reflective lens which reflects the parallel light from the first optical element to convert the parallel light to convergent light, a light reception portion which receives the convergent light from the reflective lens, and a drive mechanism which varies a position of the first optical element relative to the measurement target object.

## Claims

### Claim 1

An optical characteristic measurement apparatus comprising:
a movable first optical element including at least one curved optic positioned to receive diverging measurement light from a measurement target object and to transmit or reflect the received measurement light as parallel light;
a reflective lens, comprising a curved mirror, configured to reflect the parallel light from the movable first optical element to convert the parallel light to convergent light;
a second optical element, including at least one mirror, arranged on an optical path between the movable first optical element and the reflective lens, the at least one mirror positioned to reflect the parallel light from the movable first optical element to vary a direction of propagation of the parallel light;
a spectroscope configured to receive the convergent light from the reflective lens;
an actuator coupled to the movable first optical element, the actuator operable to vary a position of the movable first optical element relative to the measurement target object;
a first light source configured to produce measurement light for irradiation of the measurement target object; and
a beam splitter which is arranged on an optical path from the reflective lens to the spectroscope and is optically connected to the first light source.

### Claim 2 (depends on 1)

The optical characteristic measurement apparatus according to claim 1, wherein
the at least one curved optic of the movable first optical element comprises a set of a convex reflector and a concave reflector which are arranged such that central axes of the reflectors match with an optical axis of the parallel light.

### Claim 3 (depends on 1)

The optical characteristic measurement apparatus according to claim 1, wherein
the at least one curved optic of the movable first optical element comprises a curved mirror arranged in correspondence with the reflective lens and a bending mirror combined with the curved mirror.

### Claim 4 (depends on 1)

The optical characteristic measurement apparatus according to claim 1, wherein
the spectroscope is configured to output a wavelength spectrum included in light received from the reflective lens.

### Claim 5 (depends on 1)

The optical characteristic measurement apparatus according to claim 1, the optical characteristic measurement apparatus further comprising a second light source configured to produce observation light including at least a visible light band in a wavelength component, wherein
the first light source produces the measurement light including a wavelength component in accordance with optical characteristics to be measured from the measurement target object.

### Claim 6 (depends on 5)

The optical characteristic measurement apparatus according to claim 5, the optical characteristic measurement apparatus further comprising a camera configured to observe an image of the measurement light emitted to the measurement target object.

### Claim 7 (depends on 6)

The optical characteristic measurement apparatus according to claim 6, the optical characteristic measurement apparatus further comprising a controller configured to determine a position of the at least one curved optic of the movable first optical element relative to the measurement target object by operating the actuator based on sharpness of the image observed with the camera.