# US 10,120,162 B2 · Cooling a digital micromirror device

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- Number: US 10,120,162 B2
- Document ID: US10120162B2
- Status: Granted
- Kind: B2
- Application number: 15/342,579
- Filed: 2016-11-03
- Published: 2018-05-03
- Granted: 2018-11-06
- Earliest claimed: 2016-11-03
- Assignees: Xerox Corporation
- Applicants: Xerox Corporation
- Inventors: Francisco Zirilli; Michael B. Monahan; Jeffrey John Bradway
- Web page: https://patentgrep.com/patent/US10120162B2

## CPC

- G02B 7/1815: {with cooling or heating systems (cooling arrangements for laser mirrors H01S3/0401)}
- B41J 2/435: characterised by selective application of radiation to a printing material or impression-transfer material
- B41J 2/442: {using lasers}
- G02B 26/0833: {the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD (G02B26/0825 takes precedence; micromechanical devices in general B81B)}
- G02B: OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- B41J: TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS

## Abstract

An apparatus and a method for cooling a digital mirror device are disclosed. For example, the apparatus includes a digital mirror device (DMD), a thermal pad, wherein a first side of the thermal pad is coupled to a bottom of a housing of the DMD and a cooling block coupled to a second side of the thermal pad that is opposite the first side. The cooling block includes a plate that includes a plurality of openings that generates a liquid jet of a liquid that is forced through the plurality of openings towards a side of the cooling block coupled to the thermal pad.

## Claims

### Claim 1

A method for cooling a digital mirror device (DMD), comprising:
measuring a temperature of the DMD;
determining that the temperature of the DMD is above a threshold; and
providing a liquid through a cooling loop to a cooling block of the DMD, the cooling block comprising a plate having a plurality of openings that generates a liquid jet of the liquid that is forced through the plurality of openings towards a side of the cooling block coupled to the DMD, wherein the liquid is delivered through the plurality of openings at 0.3 gallons per minute (qpm) to 0.5 gpm at 19 pounds per square inch (psi) to 50 psi, wherein the plurality of openings has a diameter of 0.25 millimeters (mm) to 0.5mm.

### Claim 2 (depends on 1)

The method of claim 1, further comprising:
repeating the measuring until the temperature of the DMD is below the threshold; and
stopping the liquid from moving through the cooling block.

### Claim 3 (depends on 1)

The method of claim 1, wherein the temperature is measured by a heat sensing device coupled to the DMD and the cooling block.

### Claim 4 (depends on 1)

The method of claim 1, wherein the liquid comprises a coolant comprising at least one of: a mixture of water and ethylene glycol or Fluorinert.

### Claim 5

A laser imaging module (LIM), comprising:
a digital mirror device (DMD);
a thermal pad, wherein a first side of the thermal pad is coupled to a bottom of a housing of the DMD;
a cooling loop that delivers a liquid; and
a cooling block coupled to the thermal pad and the cooling loop, wherein the cooling block comprises:
a plate comprising a plurality of openings, wherein a diameter of each one of the plurality of openings is 0.25 millimeters (mm) to 0.5 mm to deliver 0.3 gallons per minute (gpm) to 0.5 gpm of the liquid at 19 pounds per square inch (psi) to 50 psi through the plurality of openings towards a side of the cooling block coupled to the thermal pad.

### Claim 6 (depends on 5)

The LIM of claim 5, further comprising:
a copper block coupled to the thermal pad; and
a thermoelectric cooling device coupled to the copper block and the cooling block.

### Claim 7 (depends on 5)

The LIM of claim 5, wherein the liquid comprises a coolant comprising at least one of: a mixture of water and ethylene glycol or Fluorinert.

### Claim 8 (depends on 5)

The LIM of claim 5, wherein the thermal pad comprises at least a layer of Indium.

### Claim 9 (depends on 8)

The LIM of claim 8, wherein the thermal pad further comprises a layer of aluminum nitride.

### Claim 10 (depends on 5)

The LIM of claim 5, wherein the cooling block further comprises:
an uneven surface on an inner portion of the side of the cooling block coupled to the thermal pad.

### Claim 11 (depends on 10)

The LIM of claim 10, wherein the uneven surface comprises at least one of: a plurality of surface members or a rough surface.

### Claim 12 (depends on 11)

The LIM of claim 11, wherein the plurality of surface members comprises at least one of: a plurality of pins or a plurality of fins.

### Claim 13 (depends on 5)

The LIM of claim 5, further comprising:
a heat sensing device measure a temperature of the DMD.