# US 10,120,134 B2 · Micro-optical bench device with highly/selectively-controlled optical surfaces

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- Number: US 10,120,134 B2
- Document ID: US10120134B2
- Status: Granted
- Kind: B2
- Application number: 15/047,205
- Filed: 2016-02-18
- Published: 2016-08-25
- Granted: 2018-11-06
- Earliest claimed: 2015-02-20
- Assignees: Si-Ware Systems
- Applicants: Si-Ware Systems
- Inventors: Bassam Saadany; Yasser M. Sabry; Mostafa Medhat; Bassem Mortada; Muhammed Nagi; Mohamed Sadek; Yasseen Nada; Khaled Hassan
- Web page: https://patentgrep.com/patent/US10120134B2

## CPC

- G02B 6/136: by etching
- B81C 1/00626: {Processes for achieving a desired geometry not provided for in groups B81C1/00563 - B81C1/00619}
- B81C 1/00833: {Methods for preserving structures not provided for in groups B81C1/00785 - B81C1/00825}
- G01B 9/02051: {Integrated design, e.g. on-chip or monolithic}
- G01J 3/0259: {Monolithic}
- G01J 3/453: by correlation of the amplitudes
- G02B 6/3692: {with surface micromachining involving etching, e.g. wet or dry etching steps (surface micromachining involving subtractive techniques B81C1/00055)}
- B81B 2201/047: Optical MEMS not provided for in B81B2201/042 - B81B2201/045
- G02B: OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- B81C: PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS (making microcapsules or microballoons B01J13/02; processes or apparatus specially adapted for the manufacture or treatment of piezoelectric, electrostrictive or magnetostrictive elements per se H10N30/01)
- G01B: MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01J: MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY (light sources F21, H01J, H01K, H05B; investigating properties of materials by optical means G01N)
- B81B: MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES (piezoelectric, electrostrictive or magnetostrictive elements per se H10N30/00, H10N35/00)

## Abstract

A micro-optical bench device is fabricated by a process that provides control over one or more properties of the micro-optical bench device and/or one or more properties of optical surfaces in the micro-optical bench device. The process includes etching a substrate to form a permanent structure including optical elements and a temporary structure. The shape of the temporary structure and gaps between the temporary structure and permanent structure facilitate control of a property of the micro-optical bench and/or optical surfaces therein. The process further includes removing the temporary structure from an optical path of the micro-optical bench device.

## Claims

### Claim 1

A method for fabricating a micro-optical bench device, comprising:
providing a substrate;
etching the substrate to form a permanent structure including at least two optical elements and a temporary structure, wherein at least part of the permanent structure is formed using the temporary structure;
forming at least one mechanical stopper in the substrate, wherein the at least one mechanical stopper protects the at least two optical elements during removal of the temporary structure; and
removing the temporary structure by releasing or etching the temporary structure to produce the micro-optical bench device;
wherein the at least two optical elements lie within an optical path of the micro-optical bench device.

### Claim 2 (depends on 1)

The method of claim 1, wherein forming the at least one mechanical stopper further comprises:
forming the at least one mechanical stopper on the permanent structure.

### Claim 3 (depends on 1)

The method of claim 1, wherein forming the at least one mechanical stopper further comprises:
forming the at least one mechanical stopper on the temporary structure.

### Claim 4 (depends on 1)

The method of claim 1, further comprising:
selecting a dimension of the at least one mechanical stopper to prevent stiction between the temporary structure and the permanent structure.

### Claim 5 (depends on 1)

The method of claim 1, wherein the substrate includes a device layer, a handle layer and an etch stop layer between the device layer and the handle layer, and wherein etching the substrate further comprising:
etching the device layer of the substrate to form the permanent structure and the temporary structure.

### Claim 6 (depends on 5)

The method of claim 5, wherein forming the at least one mechanical stopper further comprises:
forming the at least one mechanical stopper in the etch stop layer between the temporary structure and the handle layer or within the handle layer.

### Claim 7 (depends on 6)

The method of claim 6, wherein forming the at least one mechanical stopper further comprises:
etching the etch stop layer to form the at least one mechanical stopper between the temporary structure and the handle layer.

### Claim 8 (depends on 7)

The method of claim 7, wherein a first width of the temporary structure is greater than a first width of a first optical element of the permanent structure, and wherein etching the etch stop layer further comprises:
etching the etch stop layer using a time release process to remove the etch stop layer between the first optical element and the handle layer and to leave a trace of the etch stop layer between the temporary structure and the handle layer, the trace of the etch stop layer forming the at least one mechanical stopper; and wherein removing the temporary structure further comprises:
applying a physical force to the temporary structure to release the temporary structure from the at least one mechanical stopper.

### Claim 9 (depends on 6)

The method of claim 6, wherein forming the at least one mechanical stopper further comprises:
applying a thermal oxidation to the substrate after etching of the substrate to produce the at least one mechanical stopper within the handle layer.

### Claim 10 (depends on 9)

The method of claim 9, wherein the at least one mechanical stopper is attached to the permanent structure on at least one surface of the permanent structure that is adjacent to the temporary structure.

### Claim 11 (depends on 1)

The method of claim 1, wherein the temporary structure is a permeated structure.

### Claim 12 (depends on 1)

The method of claim 1, wherein etching the substrate to form the permanent structure and the temporary structure further comprises:
controlling a roughness or an inclination angle of at least one surface of at least one of the at least two optical elements with respect to a plane of the substrate or with respect to an optical axis of the micro-optical bench device using the temporary structure.

### Claim 13 (depends on 1)

The method of claim 1, further comprising:
providing a patterned mask having at least one opening therein, a first opening for forming a first trench defining a first surface of a first optical element and a second surface of the temporary structure, the first surface of the first optical element facing the second surface of the temporary structure.

### Claim 14 (depends on 13)

The method of claim 13, further comprising:
selecting a first size of the first opening to produce a desired inclination angle of the first surface of the first optical element.

### Claim 15 (depends on 13)

The method of claim 13, wherein a width of the first trench is greater than or equal to 40 μm.

### Claim 16 (depends on 13)

The method of claim 13, further comprising:
selecting a first size of the first opening to produce a desired width of the first trench; and
varying a trench width of the first trench by no more than 400 percent around the desired width during etching of the substrate to produce an inclination angle of the first surface of the first optical element with a variance of no more than 1 degrees.

### Claim 17 (depends on 13)

The method of claim 13, wherein the patterned mask further includes a second opening for forming a second trench defining a third surface of the temporary structure opposite the second surface of the temporary structure and a fourth surface of a second optical element facing the third surface of the temporary structure.

### Claim 18 (depends on 17)

The method of claim 17, further comprising:
selecting a first size of the first opening and a second size of the second opening to produce respective inclination angles of the first surface, the second surface, the third surface and the fourth surface.

### Claim 19 (depends on 18)

The method of claim 18, wherein the respective inclination angles of the second and third surfaces of the temporary structure are within 0.1 degrees of each other.

### Claim 20 (depends on 13)

The method of claim 13, further comprising:
selecting a first size of the first opening to produce a desired surface roughness of the first surface of the first optical element.

### Claim 21 (depends on 1)

The method of claim 1, further comprising:
applying a selective coating to etched surfaces of the substrate, wherein a first gap between the temporary structure and a first surface of a first optical element is selected to enable the temporary structure to prevent the selective coating from being applied to the first surface of the first optical element.

### Claim 22 (depends on 21)

The method of claim 21, wherein etching the substrate further comprises:
etching the substrate to form an additional temporary structure and an additional optical element of the permanent structure, wherein etching the substrate to form the additional temporary structure and the additional optical element of the permanent structure further includes:
controlling a surface property of an additional surface of the additional optical element during etching thereof using the additional temporary structure; and further comprising:
removing the additional temporary structure prior to applying the selecting coating to the etched surfaces of the substrate.

### Claim 23 (depends on 1)

The method of claim 1, further comprising:
applying a thermal oxidation to the substrate after etching thereof, wherein the temporary structure further controls a roughness of a first surface of a first optical element after applying the thermal oxidation.

### Claim 24 (depends on 1)

The method of claim 1, wherein etching the substrate to form the permanent structure and the temporary structure further includes:
controlling a profile of a first optical element of the at least two optical elements in an out-of-plane direction at different locations on a first surface of the first optical element in the in-plane direction using the temporary structure.

### Claim 25 (depends on 1)

The method of claim 1, wherein at least two optical elements include different crystalline planes of the substrate.

### Claim 26 (depends on 1)

The method of claim 1, wherein respective gaps between the temporary structure and the permanent structure are equal.

### Claim 27 (depends on 1)

The method of claim 1, further comprising:
preventing stiction between the temporary structure and the permanent structure during removal of the temporary structure.

### Claim 28 (depends on 1)

The method of claim 1, wherein etching the substrate further comprises:
etching the substrate to form the at least two optical elements and a Micro-Electro-Mechanical Systems (MEMS) actuator coupled to a first optical element of the at least two optical elements.

### Claim 29 (depends on 28)

The method of claim 28, wherein the MEMS actuator comprises a latch, and further comprising:
latching the temporary structure to a position out of the optical path of the micro-optical bench device using the latch.

### Claim 30 (depends on 1)

The method of claim 1, wherein the micro-optical bench device includes a spectrometer or an interferometer.

### Claim 31 (depends on 30)

The method of claim 30, wherein etching the substrate to form the permanent structure and the temporary structure further comprises:
controlling a visibility of an interference pattern produced by the interferometer using the temporary structure.

### Claim 32 (depends on 30)

The method of claim 30, wherein etching the substrate to form the permanent structure and the temporary structure further comprises:
controlling an alignment of interfering beams of the interferometer in a transverse direction with respect to an optical axis of an optical receiving element of the interferometer using the temporary structure.