# US 10,120,131 B2 · Planar-optical element, sensor element having nanowires and method for the production thereof

> Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt

- Number: US 10,120,131 B2
- Document ID: US10120131B2
- Status: Granted
- Kind: B2
- Application number: 14/420,083
- Filed: 2013-08-02
- Published: 2015-08-06
- Granted: 2018-11-06
- Earliest claimed: 2012-08-14
- Assignees: Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V.
- Applicants: Fraunhofer-Gelsellschaft zur Förderung der angewandten Forschung e.V.
- Inventors: Wolfgang Schade
- Web page: https://patentgrep.com/patent/US10120131B2

## CPC

- G02B 6/1225: {comprising photonic band-gap structures or photonic lattices}
- G01K 11/3206: at discrete locations in the fibre, e.g. using Bragg scattering
- G01L 1/246: {using integrated gratings, e.g. Bragg gratings}
- G02B 6/107: {Subwavelength-diameter waveguides, e.g. nanowires}
- G02B 6/12009: {comprising arrayed waveguide grating [AWG] devices, i.e. with a phased array of waveguides}
- G02B 6/1221: {made from organic materials}
- G02B 6/124: Geodesic lenses or integrated gratings
- G02B 6/132: by deposition of thin films
- G02B 6/12007: {forming wavelength selective elements, e.g. multiplexer, demultiplexer}
- G02B 6/29395: {configurable, e.g. tunable or reconfigurable (switching G02B6/35)}
- G02B 2006/12138: {Sensor}
- G02B: OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G01K: MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR (radiation pyrometry G01J5/00)
- G01L: MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE (weighing G01G)

## Abstract

The invention relates to a planar-optical element having at least one photonic component, which is arranged in at least one substrate containing or consisting of at least one polymer, wherein the substrate includes at least one first film layer having a first side and an opposite second side and a second film layer having a first side and an opposite second side, wherein the first side of the second film layer is arranged on the second side of the first film layer and at least the second film layer contains nanowires, at least in a subarea. The invention also relates to a corresponding sensor element and a method for the production thereof.

## Claims

### Claim 1

A planar-optical element comprising:
a photonic component; and
a substrate comprising at least one polymer, wherein the substrate includes at least one first film layer and a second film layer, the at least one first film layer having a first side and an opposite second side and the second film layer having a first side and an opposite second side, wherein the photonic component is arranged on the first side of the at least one first film layer, the first side of the second film layer is arranged on the second side of the at least one first film layer, and at least the second film layer comprising nanowires, at least in a subarea, arranged to reinforce the substrate.

### Claim 2 (depends on 1)

The Planar-optical element according to claim 1, wherein the nanowires comprise zinc oxide and/or carbon nanotubes.

### Claim 3 (depends on 1)

The Planar-optical element according to claim 1, wherein the nanowires have a diameter of about 100 nm to about 1000 nm.

### Claim 4 (depends on 1)

The Planar-optical element according to claim 1, wherein the nanowires have a length of about 1 μm to about 10 μm.

### Claim 5 (depends on 1)

The Planar-optical element according to claim 1, wherein the first film layer additionally comprises nanoparticles.

### Claim 6 (depends on 5)

The Planar-optical element according to claim 5, wherein the nanoparticles comprises of TiO2 and/or ZnO and/or SiO2.

### Claim 7 (depends on 1)

The Planar-optical element according to claim 1, wherein the photonic component in the first film layer is selected from at least one waveguide and/or at least one coupler and/or at least one arrayed waveguide grating and/or at least one fiber Bragg grating and/or at least one fiber-optic sensor.

### Claim 8 (depends on 1)

The Planar-optical element according to claim 1, additionally comprising a third film layer having a first side and an opposite second side, wherein the third film layer comprises nanowires, at least in a subarea of the third film layer.

### Claim 9 (depends on 1)

The Planar-optical element according to claim 1, wherein the nanowires have a presettable orientation.

### Claim 10

A sensor element comprising at least one waveguide which includes at least one core made of a first material having a first refractive index (n1) and a cladding which surrounds the at least one core and is made of a second material having a second refractive index (n2), wherein at least one fiber Bragg grating is inserted in the core, wherein the sensor element is arranged on a substrate which comprises at least one polymer and the substrate has at least a first film layer having a first side and an opposite second side and a second film layer having a first side and an opposite second side, wherein the first side of the second film layer is arranged on the second side of the first film layer, the cladding is part of the first film layer and the core is inserted in the first film layer, wherein at least the second film layer comprises a means for reducing a coefficient of expansion of the second film layer, the means including nanowires arranged at least in a subarea of the second film layer.

### Claim 11 (depends on 10)

The sensor element according to claim 10, wherein additionally at least one further waveguide and/or at least one coupler and/or at least one arrayed waveguide grating and/or at least one fiber Bragg grating is arranged in the first film layer.

### Claim 12 (depends on 10)

The sensor element according to claim 10, wherein the nanowires comprise of zinc oxide and/or carbon nanotubes.

### Claim 13 (depends on 10)

The sensor element according to claim 10, wherein the nanowires have a diameter of about 100 nm to about 1000 nm.

### Claim 14 (depends on 10)

The sensor element according to claim 10, wherein the nanowires have a length of about 1 μm to about 10 μm.

### Claim 15 (depends on 10)

The sensor element according to claim 10, wherein the first film layer additionally comprises nanoparticles.

### Claim 16 (depends on 15)

The sensor element according to claim 15, wherein the nanoparticles comprise of TiO2 and/or ZnO and/or SiO2.

### Claim 17 (depends on 10)

The sensor element according to claim 10, additionally comprising a third film layer having a first side and an opposite second side, wherein the third film layer comprises nanowires, at least in a subarea, wherein the first side of the third film layer is arranged on the second side of the second film layer.

### Claim 18 (depends on 10)

The sensor element according to claim 10, wherein the nanowires have a presettable orientation.

### Claim 19 (depends on 1)

The Planar-optical element according to claim 1, wherein the at least one first film layer includes nanoparticles but no nanowires.