# US 10,120,042 B2 · Magnetic field sensor and related techniques that inject a synthesized error correction signal into a signal channel to result in reduced error > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 10,120,042 B2 - Document ID: US10120042B2 - Status: Granted - Kind: B2 - Application number: 14/138,840 - Filed: 2013-12-23 - Published: 2015-06-25 - Granted: 2018-11-06 - Earliest claimed: 2013-12-23 - Assignees: Allegro MicroSystems, LLC - Applicants: Allegro Microsystems, LLC - Inventors: Aurelian Diaconu; Ryan Metivier - Web page: https://patentgrep.com/patent/US10120042B2 ## CPC - G01R 33/077: {Vertical Hall-effect devices} - G01D 5/145: {influenced by the relative movement between the Hall device and magnetic fields (see G01R33/06)} - G01R: MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES (indicating correct tuning of resonant circuits H03J3/12) - G01D: MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR ## Abstract A magnetic field sensor has an error correction signal generator circuit to inject an error correction signal into a primary signal channel to cancel an error signal component in the primary signal channel. ## Claims ### Claim 1 A magnetic field sensor, comprising: a plurality of magnetic field sensing elements configured to generate a respective plurality of x-y output signals, wherein each one of the x-y output signals is responsive to a magnetic field in an x-y plane; a sequence switches circuit coupled to receive the plurality of x-y output signals and configured to generate a sequential signal comprised of sequential ones of the plurality of x-y output signals, wherein the sequential signal comprises a time waveform comprising a respective fundamental frequency component and an error component; an angle calculation module having an input node and an output node, wherein the angle calculation module is configured to generate an x-y angle value at the output node of the angle calculation module that is indicative of an angle of the magnetic field in an x-y plane; an angle processing channel coupled between the sequence switches circuit and the angle calculation module, wherein the angle processing channel comprises: an electronic filter having an input node and an output node, wherein the electronic filter is configured to generate a filtered signal at the output node of the electronic filter; and a summing circuit having first and second input nodes and an output node, wherein either: the first input node of the summing circuit is coupled to the sequential signal, the output node of the summing circuit is coupled to the input node of the electronic filter, and the output node of the electronic filter is coupled to the input node of the angle calculation module, or the input node of the filter is coupled to the sequential signal, the first input node of the summing circuit is coupled to the filtered signal, and the output node of the summing circuit is coupled to the input node of the angle calculation module, wherein the magnetic field sensor further comprises: an error correction signal generator circuit having an output node, the error correction signal generator circuit for generating an error correction signal at the output node of the error correction signal generator, wherein the output node of the error correction signal generator circuit is coupled to the second input node of the summing circuit, wherein the summing circuit is configured to generate a signal at the output node of the summing circuit with a corrected error component smaller than the error component of the sequential signal; and a sine look up table memory coupled to the error correction processor and configured to store a plurality of sine values, wherein the error correction signal is generated by selecting sequential ones of the plurality of sine values, wherein the error correction signal comprises a respective frequency component having a frequency equal to an integer multiple of the fundamental frequency component of the sequential signal. ### Claim 2 (depends on 1) The magnetic field sensor of claim 1, wherein the error correction signal generator circuit comprises: an error correction processor; and a non-volatile coefficient table memory coupled to the error correction processor and configured to store a plurality of correction coefficients, wherein the error correction processor is configured to generate the error correction signal in accordance with selected ones of the stored plurality of correction coefficients and in accordance with selected ones of the sine values. ### Claim 3 (depends on 2) The magnetic field sensor of claim 2, wherein the error correction signal generator circuit further comprises: a temperature sensor coupled to the error correction processor and configured to generate a temperature signal, wherein the error correction processor is configured to generate the error correction signal in accordance with selected ones of the stored plurality of correction coefficients, in accordance with selected ones of the sine values, and in accordance with the temperature signal. ### Claim 4 (depends on 2) The magnetic field sensor of claim 2, wherein the plurality of magnetic field sensing elements comprises a plurality of vertical Hall Effect elements arranged as a circular vertical Hall (CVH) element, wherein each one of the plurality of vertical Hall Effect elements is arranged upon a common circular implant and diffusion region in a first major surface of a semiconductor substrate, wherein the plurality of vertical Hall Effect elements is configured to generate a respective plurality of x-y output signals responsive to a magnetic field having a direction component in an x-y plane parallel to the first surface of the semiconductor substrate, the x-y plane having an x-direction and a y-direction orthogonal to the x-direction, wherein the plurality of x-y output signals is generated in a plurality of cycle periods, each cycle period corresponding to one cycle around the CVH sensing element, the cycle periods occurring at a cycle rate. ### Claim 5 (depends on 2) The magnetic field sensor of claim 2, wherein the error component has a respective fundamental frequency component, and wherein the error correction signal comprises an error correction signal fundamental frequency component having the same frequency as the fundamental frequency component of the error component. ### Claim 6 (depends on 5) The magnetic field sensor of claim 5, wherein the error correction signal fundamental frequency component has an amplitude and a phase selected to reduce the fundamental frequency component of the error component. ### Claim 7 (depends on 6) The magnetic field sensor of claim 6, wherein the error correction processor comprises a digital filter configured to generate a multi-state digital signal, wherein the error correction signal fundamental frequency component results from the multi-state digital signal. ### Claim 8 (depends on 6) The magnetic field sensor of claim 6, wherein the error correction signal fundamental frequency component results from a multi-state signal. ### Claim 9 (depends on 2) The magnetic field sensor of claim 2, wherein the error component has a respective fundamental frequency component and a second harmonic frequency component, and Wherein the error correction signal comprises an error correction signal first fundamental frequency component having the same frequency as the fundamental frequency component of the error component, and an error correction signal second fundamental frequency component having the same frequency as the second harmonic frequency component of the error component. ### Claim 10 (depends on 9) The magnetic field sensor of claim 9, wherein the error correction signal first and second fundamental frequency components have respective amplitudes and respective phases selected to reduce the fundamental frequency component and the second harmonic frequency component of the error component. ### Claim 11 (depends on 10) The magnetic field sensor of claim 10, wherein the error correction processor comprises a digital filter configured to generate a multi-state digital signal, wherein the error correction signal first fundamental frequency and the error correction signal second fundamental frequency component result from the multi-state digital signal. ### Claim 12 (depends on 10) The magnetic field sensor of claim 10, wherein the error correction signal first fundamental frequency component results from a first multi-state signal and the error correction signal second fundamental frequency component results from a second different multi-state signal. ### Claim 13 A method of reducing an error in a magnetic field sensor, comprising: providing a plurality of magnetic field sensing elements configured to generate a respective plurality of x-y output signals, wherein each one of the x-y output signals is responsive to a magnetic field in an x-y plane; using the plurality of x-y output signals to generate a sequential signal comprised of sequential ones of the plurality of x-y output signals, wherein the sequential signal comprises a time waveform comprising a respective fundamental frequency component and an error component; filtering a signal representative of the sequential signal to generate a filtered signal; generating an error correction signal; summing the error correction signal with the signal representative of the sequential signal or with the filtered signal to generate a summed signal with a corrected error component smaller than the error component of the sequential signal; and storing a plurality of sine values, wherein the error correction signal is generated by selecting sequential ones of the plurality of sine values, wherein the error correction signal comprises a respective frequency component having a frequency equal to an integer multiple of the fundamental frequency component of the sequential signal. ### Claim 14 (depends on 13) The method of claim 13, further comprising: generating an x-y angle value representative of an angle of the magnetic field in an x-y plane. ### Claim 15 (depends on 13) The method of claim 13, wherein the generating the error correction signal comprises: storing a plurality of correction coefficients in a non-volatile coefficient table memory; generating the error correction signal in accordance with selected ones of the stored plurality of correction coefficients and in accordance with selected ones of the sine values. ### Claim 16 (depends on 15) The method of claim 15, wherein the generating the error correction signal further comprises: generating a temperature signal; and generating the error correction signal in accordance with selected ones of the stored plurality of correction coefficients, in accordance with selected ones of the sine values, and in accordance with the temperature signal. ### Claim 17 (depends on 15) The method of claim 15, wherein the plurality of magnetic field sensing elements comprises a plurality of vertical Hall Effect elements arranged as a circular vertical Hall (CVH) element, wherein each one of the plurality of vertical Hall Effect elements is arranged upon a common circular implant and diffusion region in a first major surface of a semiconductor substrate, wherein the plurality of vertical Hall Effect elements is configured to generate a respective plurality of x-y output signals responsive to a magnetic field having a direction component in an x-y plane parallel to the first surface of the semiconductor substrate, the x-y plane having an x-direction and a y-direction orthogonal to the x-direction, wherein the plurality of x-y output signals is generated in a plurality of cycle periods, each cycle period corresponding to one cycle around the CVH sensing element, the cycle periods occurring at a cycle rate. ### Claim 18 (depends on 15) The method of claim 15, wherein the error component has a respective fundamental frequency component, and wherein the error correction signal comprises an error correction signal fundamental frequency component having the same frequency as the fundamental frequency component of the error component. ### Claim 19 (depends on 18) The method of claim 18, wherein the error correction signal fundamental frequency component has an amplitude and a phase selected to reduce the fundamental frequency component of the error component. ### Claim 20 (depends on 19) The method of claim 19, wherein the error correction signal fundamental frequency component results from a multi-state digital signal. ### Claim 21 (depends on 19) The method of claim 19, wherein the error correction signal fundamental frequency component results from a multi-state signal. ### Claim 22 (depends on 15) The method of claim 15, wherein the error component has a respective fundamental frequency component and a second harmonic frequency component, and wherein the error correction signal comprises an error correction signal first fundamental frequency component having the same frequency as the fundamental frequency component of the error component and an error correction signal second fundamental frequency component having the same frequency as the second harmonic frequency component of the error component. ### Claim 23 (depends on 22) The method of claim 22, wherein the error correction signal first and second fundamental frequency components have respective amplitudes and respective phases selected to reduce the fundamental frequency component and the second harmonic frequency component of the error component. ### Claim 24 (depends on 23) The method of claim 23, wherein the error correction signal first fundamental frequency component results from a first multi-state digital signal and the error correction signal second fundamental frequency component results from the first multi-state digital signal. ### Claim 25 (depends on 23) The method of claim 23, wherein the error correction signal first fundamental frequency component results from a first multi-state digital signal and the error correction signal second fundamental frequency component results from a second different multi-state digital signal. ### Claim 26 (depends on 1) The magnetic field sensor of claim 1, further comprising a substrate having a surface oriented in the x-y plane, wherein the plurality of magnetic field sensing element are disposed upon the surface of the substrate, wherein at least two of the plurality of magnetic field sensing elements have maximum response axes that are in different directions in the x-y plane. ### Claim 27 (depends on 1) The method of claim 1, wherein the providing the plurality of magnetic field sensing elements comprises forming the plurality of magnetic field sensing elements upon a surface of a substrate, the surface of the substrate oriented in the x-y plane, wherein at least two of the plurality of magnetic field sensing elements have maximum response axes that are in different directions in the x-y plane.