# US 10,119,909 B2 · Biological sensing structures

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- Number: US 10,119,909 B2
- Document ID: US10119909B2
- Status: Granted
- Kind: B2
- Application number: 15/191,144
- Filed: 2016-06-23
- Published: 2016-10-13
- Granted: 2018-11-06
- Earliest claimed: 2012-02-13
- Assignees: Taiwan Semiconductor Manufacturing Company, Ltd.
- Applicants: Taiwan Semiconductor Manufacturing Company, Ltd.
- Inventors: Hung-Hua Lin; Li-Cheng Chu; Ming-Tung Wu; Yuan-Chih Hsieh; Lan-Lin Chao; Chia-Shiung Tsai
- Web page: https://patentgrep.com/patent/US10119909B2

## CPC

- G01N 21/55: Specular reflectivity
- G01N 21/01: Arrangements or apparatus for facilitating the optical investigation
- G01N 27/327: Biochemical electrodes {, e.g. electrical or mechanical details for in vitro measurements}
- G01N 33/483: Physical analysis of biological material
- G01N 21/253: {for batch operation, i.e. multisample apparatus (analytical automats G01N35/00)}
- G01N 2021/0106: {General arrangement of respective parts}
- G01N 2201/0636: Reflectors
- G01N: INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES (measuring or testing apparatus or processes other than immunoassay, involving enzymes or microorganisms C12M, C12Q)

## Abstract

A biological sensing structure includes a mesa integrally connected a portion of a substrate, wherein the mesa has a top surface and a sidewall surface adjacent to the top surface. The biological sensing structure includes a first light reflecting layer over the top surface and the sidewall surface of the mesa. The biological sensing structure includes a filling material surrounding the mesa, wherein the mesa protrudes from the filling material. The biological sensing structure includes a stop layer over the filling material and a portion of the first light reflecting layer. The biological sensing structure includes a second light reflecting layer over a portion of the stop layer and a portion of the top surface of the mesa. The biological sensing structure includes an opening in the second light reflecting layer to partially expose the top surface of the mesa.

## Claims

### Claim 1

A biological sensor, comprising:
a substrate;
a mesa extending from the substrate and being formed of the same material as the substrate;
a first light reflecting layer extending along sides and over a top surface of the mesa, the first light reflecting layer having a first opening therethrough exposing a first region of the mesa; and
a second light reflecting layer extending along sides and over a top surface of a portion of the first light reflecting layer, the second light reflecting layer extending into the first opening, the second light reflecting layer having a second opening therethrough exposing a second region of the mesa, the second region overlapping the first region.

### Claim 2 (depends on 1)

The biological sensor of claim 1, wherein the second opening is configured to receive an analyte.

### Claim 3 (depends on 1)

The biological sensor of claim 1, wherein sidewalls of the first opening are tapered and have an interior angle of greater than about 90°.

### Claim 4 (depends on 1)

The biological sensor of claim 1, wherein sidewalls of the second opening are tapered and have an interior angle in a range from about 90° to about 145°.

### Claim 5 (depends on 1)

The biological sensor of claim 1, wherein the first opening has a width W1 and the second opening has a width W2.

### Claim 6 (depends on 5)

The biological sensor of claim 5, wherein the width W1 is greater than the width W2.

### Claim 7 (depends on 5)

The biological sensor of claim 5, wherein the width W1 is smaller than the width W2.

### Claim 8 (depends on 1)

The biological sensor of claim 1, further comprising a detector underlying the substrate.

### Claim 9

A biological sensing structure comprising:
a mesa in a substrate;
a first light reflecting layer over a top surface and sidewall surface of the mesa;
a first opening in the first light reflecting layer, wherein the first opening exposes a first portion of the top surface of the mesa;
a second light reflecting layer over the first light reflecting layer, the second light reflecting layer extending along sidewalls and a bottom of the first opening; and
a second opening in the second light reflecting layer, wherein the second opening exposes a second portion of the top surface of the mesa.

### Claim 10 (depends on 9)

The biological sensing structure of claim 9, wherein an inside angle between the sidewall surface of the mesa and a plane of a top surface of the substrate ranges from 60° to 85°.

### Claim 11 (depends on 9)

The biological sensing structure of claim 9, further comprising a recess in the substrate adjacent the mesa, wherein the first light reflecting layer extends along a bottom surface of the recess.

### Claim 12 (depends on 11)

The biological sensing structure of claim 11, further comprising a filling material, a stop layer, and a sacrificial layer in the recess.

### Claim 13 (depends on 11)

The biological sensing structure of claim 11, wherein the recess has a depth of about 6 μm to about 7 μm.

### Claim 14 (depends on 9)

The biological sensing structure of claim 9, wherein the second portion of the top surface of the mesa at least partially overlaps the first portion of the top surface of the mesa.

### Claim 15 (depends on 9)

The biological sensing structure of claim 9, wherein the first light reflecting layer comprises a metallic material.

### Claim 16

A biological sensing structure comprising:
at least two recesses in a substrate leaving a mesa therebetween;
a first light reflecting layer over a top surface and sidewalls of the mesa and over a bottom surface of the at least two recesses;
a first opening in the first light reflecting layer, the first opening exposing a portion of the top surface of the mesa, and the first opening having a tapered sidewall;
a filling material over the first light reflecting layer in the at least two recesses;
a conformal liner layer over the first light reflecting layer in the at least two recesses;
a sacrificial material over the conformal liner layer in the at least two recesses;
a second light reflecting layer over the sacrificial material, over the first light reflecting layer, on the tapered sidewall of the first opening, and in the first opening; and
a second opening in the second light reflecting layer, wherein the second opening at least partially exposes the portion of the top surface of the mesa.

### Claim 17 (depends on 16)

The biological sensing structure of claim 16, wherein the second opening has a tapered sidewall, and wherein an interior angle between the top surface of the mesa and the tapered sidewall of the second opening is in a range between about 90° to about 145°.

### Claim 18 (depends on 17)

The biological sensing structure of claim 17, wherein an interior angle between the top surface of the mesa and the tapered sidewall of the first opening is greater than about 90°.

### Claim 19 (depends on 16)

The biological sensing structure of claim 16, further comprising a detector underlying the substrate.

### Claim 20 (depends on 16)

The biological sensing structure of claim 16, wherein the conformal liner layer is over the filling material.