# US 10,119,906 B2 · Method of determining the concentration of a gas component and a spectrometer for this purpose

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- Number: US 10,119,906 B2
- Document ID: US10119906B2
- Status: Granted
- Kind: B2
- Application number: 15/192,120
- Filed: 2016-06-24
- Published: 2016-12-29
- Granted: 2018-11-06
- Earliest claimed: 2015-06-29
- Assignees: Sick AG
- Applicants: Sick AG
- Inventors: Thomas Beyer; Julian Edler
- Web page: https://patentgrep.com/patent/US10119906B2

## CPC

- G01N 21/39: using tunable lasers
- G01J 2003/423: {Spectral arrangements using lasers, e.g. tunable}
- G01J 2003/4332: {frequency-modulated}
- G01N 21/031: {Multipass arrangements}
- G01N 33/0062: {concerning the measuring method or the display, e.g. intermittent measurement or digital display}
- G01N 2021/399: {Diode laser}
- G01N 2201/0691: Modulated (not pulsed supply)
- G01N: INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES (measuring or testing apparatus or processes other than immunoassay, involving enzymes or microorganisms C12M, C12Q)
- G01J: MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY (light sources F21, H01J, H01K, H05B; investigating properties of materials by optical means G01N)

## Abstract

The invention relates to a method of determining the concentration of a gas component comprising the steps: generating and guiding a light beam having a wavelength variable in a wavelength range through a measurement volume in which the gas component having an absorption in the wavelength range is present; tuning the wavelength range; detecting the intensity of the light beam after passage through the measurement volume; storage of measurement points during the tuning that respectively consist of a point in time and an associated intensity value, to obtain a direct absorption line; generating an artificial measurement curve from the stored measurement points by shifting the measurement points on the time axis; wherein the shift takes place so that an artificial modulation results in the wavelength time extent; and evaluating the artificial measurement curve in accordance with the method of the wavelength modulation spectroscopy and determining a first concentration value therefrom.

## Claims

### Claim 1

A method of determining the concentration of a gas component, the method comprising the steps of:
generating a light beam with a light source, the light beam having a wavelength variable in a wavelength range;
guiding the light beam through a measurement volume in which the gas component to be determined is present, wherein the gas component has an absorption in the wavelength range;
tuning the wavelength range with a light source controller;
detecting an intensity of the light beam with a light detector after passage of the light beam through the measurement volume;
storing measurement points in memory, the measurement points respectively consisting of a point in time and the associated intensity value during the tuning, whereby a direct absorption line is obtained;
generating an artificial measurement curve from the stored measurement points with an evaluation unit, the evaluation unit shifting the measurement points on the axis of time to generate the artificial measurement curve, wherein the shift takes place such that an artificial modulation of the wavelength results following the shift in the wavelength time extent; and
evaluating the artificial measurement curve, with the evaluation unit, in accordance with the methods of wavelength modulation spectroscopy and determining a first concentration value therefrom.

### Claim 2 (depends on 1)

The method in accordance with claim 1, in which an evaluation of the direct absorption line is carried out in accordance with the method of the direct absorption spectroscopy and a second concentration value is determined following the storage of the measurement points.

### Claim 3 (depends on 2)

The method in accordance with claim 2, in which the two generated concentration values are used for the purpose of achieving an increased safety with respect to a functional safety by a plausibilization of the values with respect to one another.

### Claim 4 (depends on 2)

The method in accordance with claim 2, in which a common concentration value is generated from the two concentration values.

### Claim 5 (depends on 1)

The method in accordance with claim 1, in which the tuning of the wavelength range takes place without an additional high frequency modulation of the wavelength during the tuning in such a way that a monotonous wavelength time extent results without a high frequency modulation.

### Claim 6 (depends on 1)

The method in accordance with claim 1, in which the tuning of the wavelength range in the positive direction is varied with a not necessarily constant velocity ≥0 and subsequently a change in the negative direction is varied with a not necessarily constant velocity ≥0, in this respect both directions or only one direction can be drawn on for the evaluation.

### Claim 7 (depends on 1)

The method in accordance with claim 1, in which the artificial modulation is one of sinusoidal, rectangular or triangular.

### Claim 8 (depends on 1)

The method in accordance with claim 1, in which the amplitude and/or the frequency of the artificial modulation is adapted for the evaluation in accordance with the wavelength modulation spectroscopy.

### Claim 9 (depends on 1)

The method in accordance with claim 1, in which the phase of the artificial modulation is adapted in such a way that, on the evaluation in accordance with the wavelength modulation spectroscopy, no further phase shift or signal rotation has to be added in order to achieve an ideal result.

### Claim 10

A spectrometer, comprising:
a light source for the generation of a light beam with a wavelength variable in a wavelength range,
a measurement volume in which the gas component to be determined is present and through which the light beam propagates;
a controller for the light source for tuning the wavelength range without an additional high frequency modulation of the wavelength during the tuning in such a way that a monotonous wavelength time extent results without high frequency modulation;
a light detector for detecting the intensity of the light beam after passage through the measurement volume;
memory for the storage of measurement points that respectively consist of a point in time and an associated intensity value during the tuning, whereby a direct absorption line is obtained;
an evaluation unit for generating an artificial measurement curve from the stored measurement points by shifting the measurement points on the axis of time, wherein the shift takes place such that following the shift an additional high frequency modulation results in the wavelength time extent, the evaluation unit further evaluating the artificial measurement curve in accordance with the methods of the wavelength modulation spectroscopy and determining a first concentration value therefrom.

### Claim 11 (depends on 10)

The spectrometer in accordance with claim 10, wherein the evaluation unit is configured in such a way that the measurement points that respectively consist of a point in time and an associated intensity value can be evaluated in accordance with the method of direct absorption spectroscopy and in this way a second concentration value can be determined.

### Claim 12 (depends on 10)

The spectrometer in accordance with claim 10, wherein the light source is a laser whose emission wavelength can be changed by a control current or a control voltage.

### Claim 13 (depends on 12)

The spectrometer in accordance with claim 12, wherein the tuning takes place by a linear change of the control current or of the control voltage.

### Claim 14 (depends on 12)

The spectrometer in accordance with claim 12, wherein the tuning takes place by a nonlinear change of the control current or of the control voltage.

### Claim 15 (depends on 10)

The spectrometer in accordance with claim 10, wherein the tuning of the wavelength range in the positive direction is varied with a not necessarily constant velocity ≥0 and subsequently a change in the negative direction is varied with a not necessarily constant velocity ≥0, in this respect both directions or only one direction can be drawn on for the evaluation.
