# US 10,119,903 B2 · Interferometric ellipsometry and method using conical refraction

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- Number: US 10,119,903 B2
- Document ID: US10119903B2
- Status: Granted
- Kind: B2
- Application number: 15/991,197
- Filed: 2018-05-29
- Published: 2018-09-27
- Granted: 2018-11-06
- Earliest claimed: 2014-01-26
- Assignees: Adom, Advanced Optical Technologies Ltd.
- Applicants: ADOM, Advanced Optical Technologies Ltd
- Inventors: Yoel Arieli; Yoel Cohen
- Web page: https://patentgrep.com/patent/US10119903B2

## CPC

- G01N 21/211: {Ellipsometry (optical thickness measurement G01B11/06)}
- G01B 9/02091: Tomographic interferometers, e.g. based on optical coherence
- G01N 21/45: using interferometric methods; using Schlieren methods
- G01B 2290/70: Using polarization in the interferometer
- G01N 2021/213: {Spectrometric ellipsometry}
- G01N 2021/458: {using interferential sensor, e.g. sensor fibre, possibly on optical waveguide}
- G01N 2201/06113: Coherent sources; lasers
- G01N: INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES (measuring or testing apparatus or processes other than immunoassay, involving enzymes or microorganisms C12M, C12Q)
- G01B: MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS

## Abstract

An apparatus and method for determining optical properties of an object includes a tunable monochromatic light source and an optical system for illuminating at least one point of the object with light from the light source, and collecting light reflected from the object. A biaxial birefringent crystal intercepts a beam of light reflected from the object and propagates the beam along an optical axis of the crystal and transforms the beam of reflected light to a ring of light having a periphery, each point of which has a different polarization plane. A detector array detects respective points along the periphery of the ring and a processing unit is coupled to the detector and is responsive to signals thereby for determining optical properties of the object.

## Claims

### Claim 1

An apparatus comprising:
a tunable monochromatic light source configured to illuminate at least one point of an object;
a polarizer configured to be disposed between the light source and the object, the polarizer being configured to polarize light from the light source;
a biaxial birefringent crystal (a) positioned to intercept a beam of light reflected from the object, (b) positioned to propagate the beam along an optical axis of the crystal, and (c) configured to transform the beam of reflected light into a ring of light, (i) each point of the ring of light having a different polarization plane, and (ii) a diameter of the ring of light being different for different respective wavelengths of the light from the tunable monochromatic light source; and
a detector array configured to simultaneously detect respective points along the ring of light for each of a plurality of wavelengths of the tunable monochromatic light source, such that images are acquired by the detector array at different wavelengths, one at a time.

### Claim 2 (depends on 1)

The apparatus according to claim 1:
further comprising an interferometer positioned such that, when the light source is activated, (a) light from the light source enters the interferometer and is split into two beams of light, a first one of the beams of light illuminating the object and a second one of the beams of the light being directed to a reference mirror, and (b) after respectively reflecting off the reference mirror and the object the first and second beams of light are recombined into a single reflected beam of light, and
wherein the biaxial birefringent crystal is positioned to intercept the recombined single reflected beam of light.

### Claim 3 (depends on 2)

The apparatus according to claim 2, wherein the interferometer comprises a Time Domain Optical Coherence Tomography interferometer.

### Claim 4 (depends on 2)

The apparatus according to claim 2, wherein the interferometer comprises a Fourier Domain Optical Coherence Tomography interferometer.

### Claim 5 (depends on 2)

The apparatus according to claim 2, wherein the interferometer comprises a Swept Source Optical Coherence Tomography interferometer.

### Claim 6 (depends on 2)

The apparatus according to claim 2, wherein the interferometer comprises a Dual Beam Optical Coherence Tomography interferometer.

### Claim 7

A method comprising:
determining at least one optical property of at least a portion of an object by:
illuminating at least one point of the object with light from a tunable monochromatic light source;
directing light reflected from the object on to a biaxial birefringent crystal, such that light reflected from the object is propagated along an optical axis of the crystal so as to transform the reflected light to a ring of light, (i) each point of the ring of light having a different polarization plane and (ii) a diameter of the ring of light being different for different respective wavelengths of the light from the tunable monochromatic light source;
spectrally tuning the light source to generate light at a plurality of wavelengths;
simultaneously detecting respective points of the ring of light for different respective wavelengths of the reflected light, one wavelength at a time; and
processing the detected respective points to determine at least one optical property of the object.

### Claim 8 (depends on 7)

The method according to claim 7, wherein:
illuminating comprises directing the light from the tunable monochromatic light source into an interferometer, such that (a) light is split into two beams of light, a first one of the beams of light illuminating the object and a second one of the beams of light being directed to a reference mirror, and (b) after respectively reflecting off the reference mirror and the object, the first and second beams of light are recombined into a single reflected beam of light, and
directing light reflected from the object onto the biaxial birefringent crystal comprises directing the recombined single reflected beam of light onto the biaxial birefringent crystal.

### Claim 9 (depends on 8)

The method according to claim 8, wherein directing the light from the tunable monochromatic light source into the interferometer comprises directing the light from the tunable monochromatic light source in to a Time Domain Optical Coherence Tomography interferometer.

### Claim 10 (depends on 8)

The method according to claim 8, wherein directing the light from the tunable monochromatic light source into the interferometer comprises directing the light from the tunable monochromatic light source in to a Fourier Domain Optical Coherence Tomography interferometer.

### Claim 11 (depends on 8)

The method according to claim 8, wherein directing the light from the tunable monochromatic light source into the interferometer comprises directing the light from the tunable monochromatic light source in to a Swept Source Optical Coherence Tomography interferometer.

### Claim 12 (depends on 8)

The method according to claim 8, wherein directing the light from the tunable monochromatic light source into the interferometer comprises directing the light from the tunable monochromatic light source in to a Dual Beam Optical Coherence Tomography interferometer.