# US 10,119,867 B2 · Multichannel thermocouple compensation for three dimensional temperature gradient > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 10,119,867 B2 - Document ID: US10119867B2 - Status: Granted - Kind: B2 - Application number: 15/011,310 - Filed: 2016-01-29 - Published: 2016-06-09 - Granted: 2018-11-06 - Earliest claimed: 2013-03-12 - Assignees: Lam Research Corporation - Applicants: Lam Research Corporation - Inventors: Fred Dennis Egley; John Distinti; Peter Norton; Andrea Wang - Web page: https://patentgrep.com/patent/US10119867B2 ## CPC - G01K 7/13: Circuits for cold-junction compensation - G01K 1/026: {arrangements for monitoring a plurality of temperatures, e.g. by multiplexing} - G01K 7/023: {provided with specially adapted connectors (connectors per se H01R)} - G01K: MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR (radiation pyrometry G01J5/00) ## Abstract A method of using a thermocouple is provided. The method includes, but is not limited to, disposing at least one temperature sensor at each of two or more respective portions of an electrical connector adapted to receive thermocouple signals, measuring temperatures at the two or more portions, and calculating the temperatures at each terminal of the electrical connector based on measured temperature values of the two or more respective portions having the disposed temperature sensors. The method also includes, but is not limited to, calculating a cold junction temperature of a terminal for at least one thermocouple channel carrying the thermocouple signals based on measured or calculated temperature values of the terminals, or a combination thereof. ## Claims ### Claim 1 An apparatus for measuring a temperature at a source, the apparatus comprising: a thermocouple measuring junction to be positioned at the source and connected with a reference junction via first and second wires; an electrical connector at the reference junction, wherein the electrical connector includes a first and second portion, and wherein the first portion is connected with the reference junction and the second portion is removably connected with the first portion, wherein at least one portion is inside a housing containing a circuit board and at least another portion is at least partially outside the housing, and wherein each of the first and second portions includes a plurality of terminals, wherein each of the terminals on the first portion is configured to mate with a terminal on the second portion; and at least one temperature sensor disposed at each of the two portions of the electrical connector to receive thermocouple signals, wherein the at least one temperature sensor is configured to measure temperatures at the two or more portions, wherein a component on the circuit board calculates the temperatures at each terminal of the electrical connector based on measured temperature values of the two temperature sensors, and wherein the component on the circuit board calculates a cold junction temperature of a terminal for at least one thermocouple channel carrying the thermocouple signals based on measured or calculated temperature values of the terminals, or a combination thereof. ### Claim 2 (depends on 1) The apparatus of claim 1, wherein the component on the circuit board calculates the temperature of the source measured by the thermocouple based on the cold junction temperature. ### Claim 3 (depends on 1) The apparatus of claim 1, wherein the component on the circuit board calculates the temperature of each terminal using interpolation or extrapolation, or a combination thereof. ### Claim 4 (depends on 1) The apparatus of claim 1, wherein the temperature sensor comprises a thermistor. ### Claim 5 (depends on 1) The apparatus of claim 1, wherein the temperature sensor comprises a semiconductor temperatures sensor. ### Claim 6 (depends on 1) The apparatus of claim 1, wherein the first portion of the electrical connector includes a plurality of thermocouple connectors, wherein each thermocouple connector receives a discrete thermocouple signal. ### Claim 7 (depends on 1) The apparatus of claim 1, wherein two temperature sensors are disposed along the first portion of the electrical connector, each temperature sensor disposed near a different thermocouple connector. ### Claim 8 An apparatus for measuring a temperature at a source, the apparatus comprising: a thermocouple measuring junction to be positioned at the source and connected with a reference junction via first and second wires; an electrical connector at the reference junction, wherein the electrical connector includes a first and second portion, and wherein the first portion is connected with the reference junction and the second portion is removably connected with the first portion, and wherein each of the first and second portions includes a plurality of terminals, wherein each of the terminals on the first portion is configured to mate with a terminal on the second portion; and at least one temperature sensor disposed at each of the two portions of the electrical connector to receive thermocouple signals, wherein the at least one temperature sensor is located on a circuit board and is configured to measure the temperatures at the two or more portions using the temperature sensors, wherein a component on the circuit board calculates the temperatures at each terminal of the electrical connector based on measured temperature values of the two temperature sensors, and wherein the component on the circuit board calculates a cold junction temperature of a terminal for at least one thermocouple channel carrying the thermocouple signals based on measured or calculated temperature values of the terminals, or a combination thereof, wherein each of the temperature sensors is electrically connected to each terminal, and wherein the electrical connector has more terminals than temperature sensors. ### Claim 9 (depends on 8) The apparatus of claim 8, wherein the first portion of the electrical connector is mounted on the circuit board within a housing, wherein a part of the first portion extends outside the housing, and the second portion of the electrical connector connects with the part of the first portion that extends outside the housing. ### Claim 10 (depends on 8) The apparatus of claim 8, wherein two temperature sensors are disposed along the first portion of the electrical connector, each temperature sensor disposed near a different thermocouple connector. ### Claim 11 (depends on 10) The apparatus of claim 10, further comprising a third temperature sensor on the second portion of the electrical connector. ### Claim 12 (depends on 8) The apparatus of claim 8, wherein the component on the circuit board calculates the temperature of the source measured by the based on the cold junction temperature. ### Claim 13 (depends on 8) The apparatus of claim 8, wherein the component on the circuit board calculates the temperature of each terminal using interpolation or extrapolation, or a combination thereof. ### Claim 14 (depends on 8) The apparatus of claim 8, wherein the temperature sensor comprises a thermistor. ### Claim 15 (depends on 8) The apparatus of claim 8, wherein the temperature sensor comprises a semiconductor temperatures sensor. ### Claim 16 (depends on 8) The apparatus of claim 8, wherein the first portion of the electrical connector includes a plurality of thermocouple connectors, wherein each thermocouple connector receives a discrete thermocouple signal. ### Claim 17 An apparatus for measuring a temperature at a source, the apparatus comprising: a thermocouple measuring junction to be positioned at the source and connected with a reference junction via first and second wires; an electrical connector at the reference junction, wherein the electrical connector includes a first and second portion, and wherein the first portion is connected with the reference junction and the second portion is removably connected with the first portion, and wherein each of the first and second portions includes a plurality of terminals, wherein each of the terminals on the first portion is configured to mate with a terminal on the second portion; and at least one temperature sensor disposed at each of the two portions of the electrical connector to receive thermocouple signals, wherein the at least one temperature sensor is configured to measure the temperatures at the two or more portions, wherein each of the temperature sensors is electrically connected to each terminal, and wherein the electrical connector has more terminals than temperature sensors. ### Claim 18 (depends on 17) The apparatus of claim 17, wherein the first portion of the electrical connector includes a plurality of thermocouple connectors, wherein each thermocouple connector receives a discrete thermocouple signal. ### Claim 19 (depends on 17) The apparatus of claim 17, wherein at least one portion is inside a housing and at least another portion is at least partially outside the housing. ### Claim 20 (depends on 17) The apparatus of claim 17, wherein two temperature sensors are disposed along the first portion of the electrical connector, each temperature sensor disposed near a different thermocouple connector.