# US 10,119,861 B2 · Lamellar grating interferometer having stress-dispersible support structure

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- Number: US 10,119,861 B2
- Document ID: US10119861B2
- Status: Granted
- Kind: B2
- Application number: 15/653,945
- Filed: 2017-07-19
- Published: 2018-05-31
- Granted: 2018-11-06
- Earliest claimed: 2016-11-29
- Assignees: Agency for Defense Development
- Applicants: Agency for Defense Development
- Inventors: Jaehwan Lee; Youngil Kang; Jongmin Lee; Incheol Kim; Dohyun Park
- Web page: https://patentgrep.com/patent/US10119861B2

## CPC

- G01J 3/0202: {Mechanical elements; Supports for optical elements}
- G01J 3/021: {using plane or convex mirrors, parallel phase plates, or particular reflectors}
- G01J 3/26: using multiple reflection, e.g. Fabry-Perot interferometer, variable interference filters
- G01J 3/4535: {Devices with moving mirror (G01J3/4532 takes precedence)}
- G01J 2003/1204: {Grating and filter}
- G01J: MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY (light sources F21, H01J, H01K, H05B; investigating properties of materials by optical means G01N)

## Abstract

The present invention relates to a lamella grating interferometer capable of being employed in a Fourier transform infrared (FTIR) spectrometer, the interferometer including a reflective surface in a circular shape and provided with a fixed portion including fixed mirrors and a movable portion including movable mirrors that are arranged with the fixed mirrors in a crossing manner to form a lamella structure with the fixed mirrors, a plurality of driving units disposed at outside the reflective surface and configured to apply driving forces for moving the movable portion, and a plurality of driving arms connecting the driving units to the movable portion of the reflective surface, respectively, and configured to move the movable portion in response to the driving forces applied by the driving units, wherein each of the plurality of driving arms is formed in a structure of repeating a preset bent shape plural times.

## Claims

### Claim 1

A lamella grating interferometer employed in a Fourier transform infrared (FTIR) spectrometer, the interferometer comprising:
a reflective surface in a circular shape and provided with a fixed portion including fixed mirrors and a movable portion including movable mirrors that are arranged with the fixed mirrors in a crossing manner to form a lamella structure with the fixed mirrors;
a plurality of driving units disposed at outside the reflective surface and configured to apply driving forces for moving the movable portion; and
a plurality of driving arms connecting the driving units to the movable portion of the reflective surface, respectively, and configured to move the movable portion in response to the driving forces applied by the driving units,
wherein each of the plurality of driving arms is formed in a structure of repeating a preset bent shape plural times.

### Claim 2 (depends on 1)

The interferometer of claim 1, wherein the preset shape is a spring shape capable of absorbing impact or pressure.

### Claim 3 (depends on 2)

The interferometer of claim 2, wherein the preset shape is a shape like ‘’.

### Claim 4 (depends on 1)

The interferometer of claim 1, wherein the plurality of driving arms are configured in a structure of repeating the preset shape as many as possible in a non-overlapping manner within a plurality of regions, respectively, the plurality of regions being generated by dividing a region around the reflective surface between the reflective surface and the plurality of driving units according to a number of the driving unit.

### Claim 5 (depends on 1)

The interferometer of claim 1, wherein the lamellar grating interferometer is fabricated based on Micro Electro Mechanical Systems (MEMS).