# US 10,119,855 B2 · Capacitance type transducer > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 10,119,855 B2 - Document ID: US10119855B2 - Status: Granted - Kind: B2 - Application number: 15/645,518 - Filed: 2017-07-10 - Published: 2017-10-26 - Granted: 2018-11-06 - Earliest claimed: 2013-10-22 - Assignees: Canon Kabushiki Kaisha - Applicants: Canon Kabushiki Kaisha - Inventors: Takahiro Akiyama; Kazutoshi Torashima - Web page: https://patentgrep.com/patent/US10119855B2 ## CPC - G01H 9/008: {by using ultrasonic waves (measuring position using ultrasonic waves G01S15/02)} - B06B 1/0292: {Electrostatic transducers, e.g. electret-type} - G01H 11/06: by electric means - G01H: MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES - B06B: METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, {e.g.} FOR PERFORMING MECHANICAL WORK IN GENERAL (for particular applications, see the relevant subclasses, e.g. B07B1/40, B23Q17/12, B24B31/06; measurement of mechanical vibrations G01H; in direction finding, locating, distance or velocity measuring G01S; {generating seismic energy G01V1/02}; control of mechanical vibrations in general G05D; sound-producing devices, e.g. bells, sirens, whistles G10K, {e.g. methods or devices for transmitting, conducting, or directing sound in general G10K11/00}; generation of electrical oscillations H03B; electromechanical resonators in general H03H; electromechanical transducers {for communication techniques, e.g. microphones, speakers} H04R) ## Abstract A capacitance type transducer includes a plurality of cells each having a structure in which a vibrating film is supposed so as to be vibrated. The vibrating film includes: a second electrode formed so that a gap is interposed between the second electrode and a first electrode; and an insulating film formed on the second electrode. The capacitance transducer manufacturing method includes: forming a sacrificial layer on the first electrode; forming a layer including a vibrating film on the sacrificial layer; forming an etching hole to remove the sacrificial layer; and forming a sealing film for sealing the etching hole. Before forming the etching hole to remove the sacrificial layer, a through hole is formed in an insulating film on the second electrode, and a conductor film is formed on the insulating film having the through hole to electrically connect a conductor in the through hole and the second electrode. ## Claims ### Claim 1 A capacitance type transducer, comprising a plurality of cells each having a structure in which a vibrating film is supported so as to be vibrated, the vibrating film comprising: a second electrode formed so that a gap is interposed between the second electrode and a first electrode; and an insulating film formed on the second electrode, wherein the second electrode and a conductor film on the insulating film are electrically connected to each other via a conductor in a through hole formed in the insulating film on the second electrode, and wherein the through hole is located above the gap. ### Claim 2 (depends on 1) The capacitance type transducer according to claim 1, wherein the gap is formed by removing a sacrificial layer, and wherein, on the insulating film on the second electrode, a sealing film configured to seal an etching hole used for removing the sacrificial layer is formed. ### Claim 3 (depends on 1) The capacitance type transducer according to claim 1, wherein the gap is formed by removing a sacrificial layer, and wherein, on the insulating film on the second electrode, except for at least a part of a portion overlapping the gap in an orthographic projection onto a first electrode side, a sealing film configured to seal an etching hole used for removing the sacrificial layer is formed. ### Claim 4 (depends on 1) An object information acquiring device, comprising: the capacitance type transducer according to claim 1; and a processor configured to acquire information on an object through use of an electric signal output from the capacitance type transducer, the capacitance type transducer being configured to receive an acoustic wave from the object and output the electric signal. ### Claim 5 (depends on 4) The object information acquiring device according to claim 4, further comprising a light source configured to emit light, wherein the capacitance type transducer receives the acoustic wave generated when the object is irradiated with the light emitted from the light source. ### Claim 6 (depends on 1) The capacitance type transducer according to claim 1, wherein the conductor film constitutes a wiring portion connecting second electrodes of the plurality of cells to each other. ### Claim 7 (depends on 1) The capacitance type transducer according to claim 1, wherein the conductor film includes aluminum, titanium, or an alloy and a multi-layered film thereof. ### Claim 8 (depends on 1) The capacitance type transducer according to claim 1, wherein the conductive film has a thickness of 0.1 μm to 0.2 μm. ### Claim 9 (depends on 1) The capacitance type transducer according to claim 1, wherein a material of the conductor in the through hole is the same as a material of the second electrode. ### Claim 10 (depends on 1) The capacitance type transducer according to claim 1, wherein an insulating film is formed on the conductor film. ### Claim 11 (depends on 10) The capacitance type transducer according to claim 10, wherein the insulating film is a sealing film to seal an etching hole used to form the gap.