# US 10,119,201 B2 · Method of fabricating a diamond membrane

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- Number: US 10,119,201 B2
- Document ID: US10119201B2
- Status: Granted
- Kind: B2
- Application number: 15/519,220
- Filed: 2015-10-15
- Published: 2017-08-17
- Granted: 2018-11-06
- Earliest claimed: 2014-10-15
- Assignees: The University of Melbourne
- Applicants: The University of Melbourne
- Inventors: Afaq Habib Piracha; Steven Prawer; Kumaravelu Ganesan; Snjezana Tomljenovic-Hanic; Desmond Lau
- Web page: https://patentgrep.com/patent/US10119201B2

## CPC

- C30B 25/20: the substrate being of the same materials as the epitaxial layer
- B23K 26/0006: {taking account of the properties of the material involved (B23K26/32, B23K26/40 take precedence)}
- B23K 26/361: for deburring or mechanical trimming (B23K26/351 takes precedence)
- B23K 26/362: Laser etching
- B81C 3/001: {Bonding of two components}
- C23C 16/042: {using masks}
- C23C 16/274: {using microwave discharges}
- C23C 16/279: {control of diamond crystallography}
- C23C 16/4408: {by purging residual gases from the reaction chamber or gas lines}
- C23C 16/56: After-treatment
- C25F 3/02: Etching
- C30B 25/04: Pattern deposit, e.g. by using masks
- C30B 25/18: characterised by the substrate
- C30B 29/04: Diamond
- C30B 33/10: in solutions or melts
- C30B 33/12: in gas atmosphere or plasma
- B23K 2103/50: {Inorganic materials other than metals or composite materials}
- B81C 2201/0143: Focussed beam, i.e. laser, ion or e-beam
- B81C 2201/0146: Processes for removing material not provided for in B81C2201/0129 - B81C2201/0145
- B81C 2201/0187: Controlled formation of micro- or nanostructures using a template positioned on a substrate
- B81C 2201/0198: for making a masking layer
- C30B: SINGLE-CRYSTAL GROWTH (by using ultra-high pressure, e.g. for the formation of diamonds, B01J3/06); UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL (zone-refining of metals or alloys C22B); PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE (casting of metals, casting of other substances by the same processes or devices B22D; working of plastics B29; modifying the physical structure of metals or alloys C21D, C22F); SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE (for producing semiconductor devices or parts thereof H10); APPARATUS THEREFOR
- B23K: SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B81C: PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS (making microcapsules or microballoons B01J13/02; processes or apparatus specially adapted for the manufacture or treatment of piezoelectric, electrostrictive or magnetostrictive elements per se H10N30/01)
- C23C: COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL (making metal-coated products by extrusion B21C23/22; covering with metal by connecting pre-existing layers to articles, see the relevant places, e.g. B21D39/00, B23K; metallising of glass C03C; metallising mortars, concrete, artificial stone, ceramics or natural stone C04B41/00; enamelling of, or applying a vitreous layer to, metals C23D; treating metal surfaces or coating of metals by electrolysis or electrophoresis C25D; single-crystal film growth C30B; by metallising textiles D06M11/83; decorating textiles by locally metallising D06Q1/04)
- C25F: PROCESSES FOR THE ELECTROLYTIC REMOVAL OF MATERIALS FROM OBJECTS; APPARATUS THEREFOR

## Abstract

The present disclosure provides a method of fabricating a diamond membrane. The method comprises providing a substrate and a support structure. The substrate comprises a diamond material having a first surface and the substrate further comprises a sub-surface layer that is positioned below the first surface and has a crystallographic structure that is different to that of the diamond material. The sub-surface layer is positioned to divide the diamond material into first and second regions wherein the first region is positioned between the first surface and the sub-surface layer. The support structure also comprises a diamond material and is connected to, and covers a portion of, the first surface of the substrate. The method further comprises selectively removing the second region of the diamond material from the substrate by etching away at least a portion of the sub-surface layer of the substrate.

## Claims

### Claim 1

A method of fabricating a diamond membrane, the method comprising:
providing a substrate and a support structure, the substrate comprising a diamond material and having a first surface, the substrate further comprising a sub-surface layer that is positioned below the first surface of the substrate and has a crystallographic structure that is different to that of the diamond material, the sub-surface layer of the substrate being positioned to divide the diamond material into first and second regions wherein the first region is positioned between the first surface of the substrate and the sub-surface layer of the substrate, the support structure also comprising a diamond material and being connected to, and covering a portion of, the first surface of the substrate, the diamond material of the support structure comprising apertures;
coupling the diamond material of the support structure to the first surface of the substrate in a manner such that portions of the first surface of the substrate are exposed within the apertures of the diamond material of the support structure;
growing further diamond material on the first surface of the substrate at locations within the apertures of the diamond material of the support structure or at locations around the support structure to fuse the support structure to the substrate; and
selectively removing the second region of the diamond material from the substrate by etching away at least a portion of the sub-surface layer of the substrate whereby a diamond membrane is formed and the support structure is connected to, and supports, the formed diamond membrane.

### Claim 2 (depends on 1)

The method of claim 1 wherein providing the substrate comprises growing a layer of substantially single-crystalline diamond material on the diamond material of the substrate such that a surface of the substantially single-crystalline diamond layer forms the first surface of the substrate.

### Claim 3 (depends on 1)

The method of claim 1 wherein the diamond material of the support structure comprises a sheet of the diamond material comprising the apertures, wherein the apertures are formed by laser milling.

### Claim 4 (depends on 1)

The method of claim 1 comprising depositing a metallic material on the first surface of the substrate to form a metallic mask having apertures.

### Claim 5 (depends on 4)

The method of claim 4 comprising growing further diamond material on the first surface of the substrate and within apertures of the metallic mask to form the support structure.

### Claim 6 (depends on 4)

The method of claim 4 being conducted such that polycrystalline diamond material forms on surface portions of the metallic mask.

### Claim 7 (depends on 1)

The method of claim 1 wherein the first and/or the second region of the substrate is substantially single-crystalline.

### Claim 8 (depends on 1)

The method of claim 1 comprising removing at least a portion of the first region of the diamond material of the substrate after removal of the second region.

### Claim 9 (depends on 1)

The method of claim 1 wherein the diamond material of the support structure has a substantially single-crystalline structure.

### Claim 10 (depends on 1)

The method of claim 1 wherein the support structure is arranged relative to the substrate such that portions of a fabricated membrane of the diamond material that are not covered by the support structure form windows.

### Claim 11 (depends on 1)

The method of claim 1 wherein the step of providing the substrate comprises:
providing the diamond material of the substrate; and
forming the sub-surface layer by imposing a structural transformation on the crystallographic structure of the diamond material of the substrate.

### Claim 12

A method of fabricating a diamond membrane, the method comprising:
providing a substrate and a support structure, the substrate comprising a diamond material and having a first surface, the substrate further comprising a sub-surface layer that is positioned below the first surface of the substrate and has a crystallographic structure that is different to that of the diamond material, the sub-surface layer of the substrate being positioned to divide the diamond material into first and second regions wherein the first region is positioned between the first surface of the substrate and the sub-surface layer of the substrate, the support structure also comprising a diamond material and being connected to, and covering a portion of, the first surface of the substrate; and
selectively removing the second region of the diamond material from the substrate by etching away at least a portion of the sub-surface layer of the substrate, whereby a diamond membrane is formed and the support structure is connected to, and supports, the formed diamond membrane;
wherein providing the substrate and the support structure comprises growing the support structure on the substrate, wherein growing the support structure on the substrate comprises placing a mask having a plurality of apertures on the first surface of the substrate such that portions of the first surface of the substrate are exposed within the apertures.

### Claim 13 (depends on 12)

The method of claim 12 comprising growing further diamond material on the first surface of the substrate and within the plurality of apertures of the mask to form the support structure.

### Claim 14 (depends on 13)

The method of claim 13 wherein the mask comprises diamond material that is polycrystalline.