# US 10,119,194 B2 · Indexed gas jet injector for substrate processing system > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 10,119,194 B2 - Document ID: US10119194B2 - Status: Granted - Kind: B2 - Application number: 14/766,863 - Filed: 2014-02-18 - Published: 2015-12-31 - Granted: 2018-11-06 - Earliest claimed: 2013-03-12 - Assignees: Applied Materials, Inc. - Applicants: Applied Materials, Inc. - Inventors: David K. Carlson - Web page: https://patentgrep.com/patent/US10119194B2 ## CPC - C23C 16/54: Apparatus specially adapted for continuous coating - C23C 16/45504: {Laminar flow} - C23C 16/45519: {Inert gas curtains} - C23C 16/45563: {Gas nozzles} - C23C 16/45589: {Movable means, e.g. fans} - C23C 16/4587: {the substrate being supported substantially vertically} - C30B 25/08: Reaction chambers; Selection of materials therefor - C30B 25/14: Feed and outlet means for the gases; Modifying the flow of the reactive gases - C30B 25/165: {the flow of the reactive gases} - C23C 16/45578: {Elongated nozzles, tubes with holes} - C30B 25/02: Epitaxial-layer growth - C30B 25/025: {Continuous growth} - C23C: COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL (making metal-coated products by extrusion B21C23/22; covering with metal by connecting pre-existing layers to articles, see the relevant places, e.g. B21D39/00, B23K; metallising of glass C03C; metallising mortars, concrete, artificial stone, ceramics or natural stone C04B41/00; enamelling of, or applying a vitreous layer to, metals C23D; treating metal surfaces or coating of metals by electrolysis or electrophoresis C25D; single-crystal film growth C30B; by metallising textiles D06M11/83; decorating textiles by locally metallising D06Q1/04) - C30B: SINGLE-CRYSTAL GROWTH (by using ultra-high pressure, e.g. for the formation of diamonds, B01J3/06); UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL (zone-refining of metals or alloys C22B); PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE (casting of metals, casting of other substances by the same processes or devices B22D; working of plastics B29; modifying the physical structure of metals or alloys C21D, C22F); SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE (for producing semiconductor devices or parts thereof H10); APPARATUS THEREFOR ## Abstract Apparatus for use in a substrate processing chamber are provided herein. In some embodiments, an indexed jet injector may include a body having a substantially cylindrical central volume, a gas input port disposed on a first surface of the body, a gas distribution channel formed in the body and fluidly coupled to the gas input port and to the cylindrical central volume, a gas distribution drum disposed within the cylindrical central volume and rotatably coupled to the body, the gas distribution drum having a plurality of jet channels formed through the gas distribution drum, and a plurality of indexer output ports formed on a second surface of the body, wherein each of the plurality of jet channels fluidly couple the gas input port to at least one of the plurality of indexer output ports at least once per 360° rotation of the gas distribution drum. ## Claims ### Claim 1 An indexed jet injector for use in a substrate process chamber, comprising: a body having a substantially cylindrical central volume; a gas input port disposed on a first surface of the body; a gas distribution drum disposed within the cylindrical central volume and rotatably coupled to the body, the gas distribution drum having a plurality of jet channels formed through the gas distribution drum; and a plurality of indexer output ports formed on a second surface of the body, wherein at least some of the plurality of jet channels fluidly couple the gas input port to at least one of the plurality of indexer output ports at least once per 360° rotation of the gas distribution drum. ### Claim 2 (depends on 1) The indexed jet injector of claim 1, further comprising: a gas distribution channel formed in the body and fluidly coupled to the gas input port and to the cylindrical central volume. ### Claim 3 (depends on 2) The indexed jet injector of claim 2, wherein the gas distribution channel includes a plurality of holes that fluidly couple the gas inlet port to the cylindrical central volume. ### Claim 4 (depends on 3) The indexed jet injector of claim 3, wherein each of the plurality of jet channels aligns with one or more of the plurality of holes in the gas distribution channel at least twice for every 360° rotation of gas distribution drum. ### Claim 5 (depends on 3) The indexed jet injector of claim 3, wherein when a first end of a jet channel aligns with one or more of the plurality of holes in the gas distribution channel, a second end of the jet channel aligns with one or more of the plurality of indexer output ports. ### Claim 6 (depends on 2) The indexed jet injector of claim 2, wherein the gas distribution channel is formed proximate an upper portion of the body. ### Claim 7 (depends on 2) The indexed jet injector of any of claim 2, wherein the gas distribution channel is divided into multiple zones. ### Claim 8 (depends on 1) The indexed jet injector of claim 1, further comprising: a stepper motor coupled to gas distribution drum via a shaft to rotate or index the gas distribution drum within the central volume of the body. ### Claim 9 (depends on 8) The indexed jet injector of claim 8, wherein the indexed jet injector and the stepper motor are hermetically sealed. ### Claim 10 (depends on 1) The indexed jet injector of claim 1, wherein an inner surface of the body and an outer surface of the gas distribution drum is at least one of machine finished or lubricated. ### Claim 11 (depends on 1) The indexed jet injector of claim 1, further comprising at least one of bearings or bushings to facilitate the rotation of the gas distribution drum. ### Claim 12 A substrate processing tool, comprising: a substrate carrier configured to support one or more substrates when disposed thereon; and a first substrate processing module comprising: an enclosure having a lower surface to support the substrate carrier and a gas injector assembly forming a top of the enclosure that provides one or more processing gases into the enclosure; an indexed jet injector disposed above the gas injector assembly, the indexed jet injector comprising: a body having a substantially cylindrical central volume; a gas input port disposed on a first surface of the body; a gas distribution drum disposed within the cylindrical central volume and rotatably coupled to the body, the gas distribution drum having a plurality of jet channels formed through the gas distribution drum; and a plurality of indexer output ports formed on a second surface of the body; and an exhaust disposed opposite the gas injector assembly to remove process gases from the enclosure. ### Claim 13 (depends on 12) The substrate processing tool of claim 12, wherein the indexed jet injector further comprises a gas distribution channel formed in the body and fluidly coupled to the gas input port and to the cylindrical central volume. ### Claim 14 (depends on 12) The substrate processing tool of claim 12, wherein each of the plurality of jet channels aligns with one or more of a plurality of holes in the gas distribution channel at least twice for every 360° rotation of gas distribution drum. ### Claim 15 (depends on 14) The substrate processing tool of claim 14, wherein the plurality of holes fluidly couple the gas inlet port to the cylindrical central volume. ### Claim 16 (depends on 15) The substrate processing tool of claim 15, wherein when a first end of a jet channel aligns with one or more of the plurality of holes in the gas distribution channel, a second end of the jet channel aligns with one or more of the plurality of indexer output ports. ### Claim 17 (depends on 12) The substrate processing tool of claim 12, wherein the indexed jet injector further comprises a stepper motor coupled to gas distribution drum via a shaft to rotate or index the gas distribution drum within the central volume of the body. ### Claim 18 (depends on 17) The substrate processing tool of claim 17, wherein the indexed jet injector and the stepper motor are hermetically sealed. ### Claim 19 (depends on 12) The substrate processing tool of claim 12, wherein an inner surface of the body and an outer surface of the gas distribution drum is at least one of machine finished or lubricated. ### Claim 20 (depends on 12) The substrate processing tool of claim 12, further comprising at least one of bearings or bushings to facilitate the rotation of the gas distribution drum.