# US 10,119,191 B2 · High flow gas diffuser assemblies, systems, and methods

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- Number: US 10,119,191 B2
- Document ID: US10119191B2
- Status: Granted
- Kind: B2
- Application number: 15/177,183
- Filed: 2016-06-08
- Published: 2017-12-14
- Granted: 2018-11-06
- Earliest claimed: 2016-06-08
- Assignees: Applied Materials, Inc.
- Applicants: Applied Materials, Inc.
- Inventors: Travis Morey
- Web page: https://patentgrep.com/patent/US10119191B2

## CPC

- C23C 16/4408: {by purging residual gases from the reaction chamber or gas lines}
- C23C 14/566: {using a load-lock chamber}
- H01J 37/3244: {Gas supply means}
- C23C: COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL (making metal-coated products by extrusion B21C23/22; covering with metal by connecting pre-existing layers to articles, see the relevant places, e.g. B21D39/00, B23K; metallising of glass C03C; metallising mortars, concrete, artificial stone, ceramics or natural stone C04B41/00; enamelling of, or applying a vitreous layer to, metals C23D; treating metal surfaces or coating of metals by electrolysis or electrophoresis C25D; single-crystal film growth C30B; by metallising textiles D06M11/83; decorating textiles by locally metallising D06Q1/04)
- H01J: ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS (spark-gaps H01T; electric arc lamps H05B31/00; particle accelerators H05H)

## Abstract

Porous diffuser assemblies including multiple diffuser elements. The porous diffuser assemblies include a diffuser body, a diffuser base coupled to the diffuser body and forming a plenum there between, the diffuser base including a plurality of openings formed therein, and a porous diffuser element disposed in each of the plurality of openings wherein surfaces of the porous diffuser elements are exposed to the plenum. Gas purged chambers and methods of purging a chamber are disclosed, as are numerous other aspects.

## Claims

### Claim 1

A gas purged chamber, comprising:
a chamber configured to contain a substrate therein; and
a gas diffuser assembly coupled to the chamber, the gas diffuser assembly including:
a diffuser body,
a diffuser base coupled to the diffuser body and forming a gas plenum there between, the diffuser base including a plurality of openings formed therein, and
a porous diffuser element disposed in each of the plurality of openings.

### Claim 2 (depends on 1)

The gas purged chamber of claim 1, wherein the gas diffuser assembly is coupled to a load lock chamber lid.

### Claim 3 (depends on 1)

The gas purged chamber of claim 1, wherein the gas diffuser assembly is coupled to a transfer chamber lid.

### Claim 4 (depends on 1)

The gas purged chamber of claim 1, comprising a plurality of the gas diffuser assembly coupled to a transfer chamber lid.

### Claim 5 (depends on 1)

The gas purged chamber of claim 1, wherein a thickness of the porous diffuser elements is less than a thickness of the diffuser base.

### Claim 6 (depends on 1)

The gas purged chamber of claim 1, a wherein the diffuser base includes transition elements.

### Claim 7 (depends on 1)

The gas purge chamber of claim 1, wherein each of the porous diffuser elements are clamped to the diffuser base by a securing member.

### Claim 8 (depends on 1)

The gas purge chamber of claim 1, wherein the plenum includes a frustoconical surface.

### Claim 9 (depends on 1)

The gas purge chamber of claim 1, wherein the plurality of openings are circular openings configured to receive the porous diffuser elements that are configured to have a disc shape.

### Claim 10 (depends on 1)

The gas purge chamber of claim 1, wherein each of the porous diffuser elements comprises a sintered porous metal welded to the diffuser base.