# US 10,118,322 B2 · Sheet-shaped mold, production method therefor, and application therefor

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- Number: US 10,118,322 B2
- Document ID: US10118322B2
- Status: Granted
- Kind: B2
- Application number: 14/764,095
- Filed: 2014-01-27
- Published: 2016-01-14
- Granted: 2018-11-06
- Earliest claimed: 2013-01-29
- Assignees: Daicel Corporation
- Applicants: Daicel Corporation
- Inventors: Tomoya Mizuta; Takuya Osaka; Katsuhiro Nakaguchi; Arimichi Okumura; Hiroto Miyake; Masaya Omura; Naotaka Nishio
- Web page: https://patentgrep.com/patent/US10118322B2

## CPC

- B29C 43/36: Moulds for making articles of definite length, i.e. discrete articles
- B29C 33/0011: {thin-walled moulds}
- B29C 33/405: {Elastomers, e.g. rubber (B29C33/50 takes precedence)}
- B29C 43/021: {characterised by the shape of the surface}
- B29C 59/022: {characterised by the disposition or the configuration, e.g. dimensions, of the embossments or the shaping tools therefor}
- B29C 59/026: {of layered or coated substantially flat surfaces}
- B81C 99/009: {Manufacturing the stamps or the moulds}
- C08L 83/04: Polysiloxanes
- G03F 7/0002: {Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping}
- B29C 33/424: {Moulding surfaces provided with means for marking or patterning (for injection moulding B29C45/372)}
- B29K 2883/00: Use of polymers having silicon, with or without sulfur, nitrogen, oxygen, or carbon only, in the main chain, as mould material
- B29K 2913/00: Use of textile products or fabrics as mould materials
- B29L 2031/757: {Moulds, cores, dies}
- B29C: SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING (making preforms B29B11/00; making laminated products by combining previously unconnected layers which become one product whose layers will remain together B32B37/00 - B32B41/00)
- B81C: PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS (making microcapsules or microballoons B01J13/02; processes or apparatus specially adapted for the manufacture or treatment of piezoelectric, electrostrictive or magnetostrictive elements per se H10N30/01)
- C08L: COMPOSITIONS OF MACROMOLECULAR COMPOUNDS (compositions based on polymerisable monomers C08F, C08G; artificial filaments or fibres D01F; textile treating compositions D06)
- G03F: PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR; (phototypographic composing devices B41B; photosensitive materials or processes for photographic purposes G03C; electrophotography, sensitive layers or processes therefor G03G)
- B29K: INDEXING SCHEME ASSOCIATED WITH SUBCLASSES B29B, B29C OR B29D, RELATING TO MOULDING MATERIALS OR TO MATERIALS FOR {MOULDS, } REINFORCEMENTS, FILLERS OR PREFORMED PARTS, e.g. INSERTS
- B29L: INDEXING SCHEME ASSOCIATED WITH SUBCLASS B29C, RELATING TO PARTICULAR ARTICLES

## Abstract

Provided is a sheet-shaped mold possessing a high strength and having a low breakage rate in demolding even in a case where the mold is thin and has a large-area. The sheet-shaped mold is prepared by combining a cured silicone rubber containing a polyorganosiloxane and a fiber for reinforcing the cured silicone rubber. The fiber may comprise a cellulose nanofiber. The sheet-shaped mold may have an uneven pattern on at least one surface (or side) thereof. The fiber may be surface-treated with a hydrophobizing agent. The fiber may forma nonwoven fabric, and the nonwoven fabric may be impregnated with the cured silicone rubber. The cured silicone rubber may comprise a two-component curable silicone rubber having a polydimethylsiloxane unit. The sheet-shaped mold may be a mold for nanoimprint lithography using a photo-curable resin.

## Claims

### Claim 1

A sheet-shaped mold for imprint lithography using a photo-curable resin,
wherein the sheet-shaped mold comprises:
a cured silicone rubber containing a polyorganosiloxane and
a cellulose fiber for reinforcing the cured silicone rubber,
wherein a ratio of the cured silicone rubber relative to 100 parts by weight of the cellulose fiber is 100 to 10,000 parts by weight, and
wherein the sheet-shaped mold has an average thickness of 5 to 500 μm.

### Claim 2 (depends on 1)

The sheet-shaped mold according to claim 1, wherein the cellulose fiber comprises a cellulose nanofiber.

### Claim 3 (depends on 1)

The sheet-shaped mold according to claim 1, wherein the sheet-shaped mold has an uneven pattern on at least one surface thereof.

### Claim 4 (depends on 1)

The sheet-shaped mold according to claim 1, wherein the cellulose fiber has been surface-treated with a hydrophobizing agent.

### Claim 5 (depends on 1)

The sheet-shaped mold according to claim 1, wherein the cellulose fiber forms a nonwoven fabric, and the nonwoven fabric is impregnated with the cured silicone rubber.

### Claim 6 (depends on 1)

The sheet-shaped mold according to claim 1, wherein the cured silicone rubber comprises a cured product of a two-component curable silicone rubber having a polydimethylsiloxane unit.

### Claim 7 (depends on 3)

The sheet-shaped mold according to claim 3, wherein the uneven pattern comprises a bump and a dent, the bump has an average height of 50 nm to 100 μm, and the bump or the dent has a minimum width of 50 nm to 100 μm.

### Claim 8 (depends on 1)

The A sheet-shaped mold according to claim 1, which is a mold for nanoimprint lithography using a photo-curable resin.