# US 10,118,195 B2 · Methods for depositing a transparent thin film onto substrates using an atmospheric plasma generating device

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- Number: US 10,118,195 B2
- Document ID: US10118195B2
- Status: Granted
- Kind: B2
- Application number: 15/071,760
- Filed: 2016-03-16
- Published: 2017-09-21
- Granted: 2018-11-06
- Earliest claimed: 2016-03-16
- Assignees: The Boeing Company
- Applicants: The Boeing Company
- Inventors: Charles A. Smith; Thai H. Sweitzer
- Web page: https://patentgrep.com/patent/US10118195B2

## CPC

- B32B 27/08: of synthetic resin
- B05D 1/62: {Plasma-deposition of organic layers (plasma deposition in general C23C14/00, C23C16/00)}
- B05D 5/08: to obtain an anti-friction or anti-adhesive surface (rendering particulate materials free-flowing in general, e.g. making them hydrophobic B01J2/30)
- C09D 183/04: Polysiloxanes
- B05D 7/02: to macromolecular substances, e.g. rubber (treatment or coating of shaped articles made of macromolecular substances C08J7/00)
- C09J 2301/30: characterized by the chemical, physicochemical or physical properties of the adhesive or the carrier
- C09J 2301/40: characterized by the presence of essential components
- B32B: LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B05D: PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL (conveying articles or workpieces through baths of liquid B65G, e.g. B65G49/02)
- C09D: COATING COMPOSITIONS, e.g. PAINTS, VARNISHES OR LACQUERS; FILLING PASTES; CHEMICAL PAINT OR INK REMOVERS; INKS; CORRECTING FLUIDS; WOODSTAINS; PASTES OR SOLIDS FOR COLOURING OR PRINTING; USE OF MATERIALS THEREFOR (cosmetics A61K; processes for applying liquids or other fluent materials to surfaces, in general, B05D; staining wood B27K5/02; glazes or vitreous enamels C03C; natural resins, French polish, drying-oils, driers, turpentine, per se, C09F; polishing compositions other than French polish, ski waxes C09G; adhesives or use of materials as adhesives C09J; materials for sealing or packing joints or covers C09K3/10; materials for stopping leaks C09K3/12; processes for the electrolytic or electrophoretic production of coatings C25D)
- C09J: ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES (preparation of glue or gelatine C09H)

## Abstract

Methods are disclosed for delivering a substantially homogeneous and substantially transparent single film coating comprising siloxane-containing precursor materials onto a substantially transparent substrate surface on large components via atmospheric pressure plasma deposition techniques.

## Claims

### Claim 1

A method for depositing a thin film onto a substantially transparent substrate, the method comprising:
positioning an atmospheric pressure plasma generating device proximate to a substrate;
delivering a carrier material to the atmospheric pressure plasma generating device;
generating a plasma in the atmospheric pressure plasma generating device;
delivering a plurality of combined precursor materials to the atmospheric pressure plasma generating device to form a plasma doped with the combined precursor materials;
controlling the flow of the plurality of combined precursor materials to the atmospheric pressure plasma generating device; and
depositing at atmospheric pressure a substantially homogeneous and a substantially transparent single layer coating onto the substrate.

### Claim 2 (depends on 1)

The method of claim 1, wherein, in the step of delivering a plurality of precursor materials to the atmospheric pressure plasma generating device, the plurality of precursor materials are first combined and then delivered to the plasma are delivered to the plasma substantially simultaneously.

### Claim 3 (depends on 1)

The method of claim 1, wherein, in the step of delivering a plurality of precursor materials to the atmospheric pressure plasma generating device, the plurality of precursor materials are delivered to the atmospheric plasma generating device independently from one another.

### Claim 4 (depends on 1)

The method of claim 1, wherein, in the step of delivering a carrier material to the atmospheric pressure plasma generating device, the carrier material delivered comprises helium, argon, oxygen, nitrogen, hydrogen or combinations thereof.

### Claim 5 (depends on 1)

The method of claim 1, wherein, in the step of delivering a plurality of precursor materials to the atmospheric pressure plasma generating device, the precursor materials delivered comprise siloxane-containing materials.

### Claim 6 (depends on 1)

The method of claim 1, wherein, in the step of delivering a plurality of precursor materials to the atmospheric pressure plasma generating device, the precursor materials delivered comprise a material selected from the group consisting of: hexamethyldisiloxane; diethoxydiethylsilane; glycidoxypropyl trimethoxysilane; tetraethoxysilane; triethoxyvinylsilane; hexamethyltrisiloxane; octamethylcyclotetrasiloxane; tetramethylcyclotetrasiloxane; hexamethyldisilane; hexamethyldisilazane; methyltriethoxysilane; methyltrimethoxysilane; tetraethylorthosilane; 3-mercaptopropylytriethoxysilane; vinyltris(2-methoxyethoxyl)-silane; allyltriethoxysilane; (3-glycidoxypropyl)-trimethoxysilane; acrylate-containing compounds, copolymers thereof, and combinations thereof.

### Claim 7 (depends on 1)

The method of claim 1, wherein, in the step of delivering a plurality of precursor materials delivered to the atmospheric pressure plasma generating device, the precursor materials delivered comprise: octamethylcyclotetrasiloxane and tetramethylcyclotetrasiloxane.