# US 10,118,191 B2 · Film forming apparatus > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 10,118,191 B2 - Document ID: US10118191B2 - Status: Granted - Kind: B2 - Application number: 15/509,006 - Filed: 2014-10-01 - Published: 2017-09-28 - Granted: 2018-11-06 - Earliest claimed: 2014-10-01 - Assignees: Toshiba Mitsubishi-Electric Industrial Systems Corporation - Applicants: Toshiba Mitsubishi-Electric Industrial Systems Corporation - Inventors: Takahiro Shirahata; Hiroyuki Orita - Web page: https://patentgrep.com/patent/US10118191B2 ## CPC - B05C 5/0279: {independently, e.g. individually, flow controlled} - B05B 7/0012: {Apparatus for achieving spraying before discharge from the apparatus} - B05C 5/0254: {Coating heads with slot-shaped outlet (B05C5/0283 takes precedence)} - B05C 9/06: for applying two different liquids or other fluent materials, or the same liquid or other fluent material twice, to the same side of the work - B05C 9/14: the auxiliary operation involving heating {or cooling} - C03C 17/001: {General methods for coating; Devices therefor} - C23C 16/4486: {by producing an aerosol and subsequent evaporation of the droplets or particles} - C23C 16/45514: {Mixing in close vicinity to the substrate} - C23C 16/45517: {Confinement of gases to vicinity of substrate} - C23C 16/45563: {Gas nozzles} - H10P 14/60: of insulating materials - H10P 72/0402: {Apparatus for fluid treatment (H10P72/0441, H10P72/0448 take precedence)} - B05B 17/06: using ultrasonic {or other kinds of} vibrations - B05C: APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL (spraying apparatus, atomising apparatus, nozzles B05B; plant for applying liquids or other fluent materials to objects by electrostatic spraying B05B5/08) - B05B: SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES (spray-mixers with nozzles B01F25/72; processes for applying liquids or other fluent materials to surfaces by spraying B05D) - C03C: CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS - C23C: COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL (making metal-coated products by extrusion B21C23/22; covering with metal by connecting pre-existing layers to articles, see the relevant places, e.g. B21D39/00, B23K; metallising of glass C03C; metallising mortars, concrete, artificial stone, ceramics or natural stone C04B41/00; enamelling of, or applying a vitreous layer to, metals C23D; treating metal surfaces or coating of metals by electrolysis or electrophoresis C25D; single-crystal film growth C30B; by metallising textiles D06M11/83; decorating textiles by locally metallising D06Q1/04) - H10P: GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10 ## Abstract A film forming apparatus includes a mist spray head for spraying a raw material. The mist spray head includes a raw material spray nozzle and a raw material ejection part for ejecting an atomized raw material, and the raw material spray nozzle includes a cavity and a raw material discharge part which is drilled in a side surface of the cavity, being away from a bottom surface of the cavity, and is connected to the raw material ejection part. ## Claims ### Claim 1 A film forming apparatus which sprays a first material which is atomized to an atmosphere so as to form a film on a substrate, comprising: a mounting part on which said substrate is mounted; and a mist spray head which sprays said first material to an upper surface of a substrate mounted on said mounting part, wherein said mist spray head includes: a first material spray nozzle which sprays said first material and a first material ejection part which is provided in a side of said mist spray head facing said substrate, so that said first material which is atomized is sprayed to said substrate, and said first material spray nozzle includes: a first cavity; a first material supply part which supplies said first material which is atomized into said first cavity; and a first material discharge part which is drilled in a side surface of said first cavity, being away from a bottom surface of said first cavity, and is connected to said first material ejection part; said first material spray nozzle further includes a first straightening plate provided in said first cavity to straighten a flow of said first material, and which extends at an oblique angle from one side edge to an opposite side edge of said first material spray nozzle and to divide a space in the first material spray nozzle into the first cavity and a lower second cavity. ### Claim 2 (depends on 1) The film forming apparatus according to claim 1, wherein said first material ejection part forms an elongated opening hole having a slit-like shape. ### Claim 3 (depends on 1) The film forming apparatus according to claim 1, wherein said mist spray head further includes a reaction material spray nozzle which is provided adjacent to said first material spray nozzle to eject a reaction material which contributes to a reaction with said first material to said substrate. ### Claim 4 (depends on 3) The film forming apparatus according to claim 3, wherein said reaction material spray nozzle includes two reaction material spray nozzles, and said first material spray nozzle is sandwiched between one of said two reaction material spray nozzles and other one of said two reaction material spray nozzles from a lateral side. ### Claim 5 (depends on 3) The film forming apparatus according to claim 3, wherein said mist spray head further includes a reaction material ejection part which is provided in a side of said mist spray head facing said substrate to eject said reaction material to said substrate, and said reaction material spray nozzle includes: a second cavity; a reaction material supply part which supplies said reaction material into said second cavity; and a reaction material discharge part which is drilled in a side surface of said second cavity, being away from a bottom surface of said second cavity, and is connected to said reaction material ejection part. ### Claim 6 (depends on 5) The film forming apparatus according to claim 5, wherein said reaction material spray nozzle further includes a second straightening plate which is provided in said second cavity to straighten a flow of said reaction material. ### Claim 7 (depends on 5) The film forming apparatus according to claim 5, wherein said reaction material ejection part forms an elongated opening hole having a slit-like shape. ### Claim 8 (depends on 3) The film forming apparatus according to claim 3, wherein said reaction material includes two reaction materials, said mist spray head further includes: one reaction material ejection part which is provided in a side of said mist spray head facing said substrate to eject one of said two reaction materials to said substrate; and other reaction material ejection part which is provided in a side of said mist spray head facing said substrate to eject other one of said two reaction materials to said substrate, and said reaction material spray nozzle includes: one cavity; other cavity which is formed separately from the one cavity; one reaction material supply part which supplies said one of said two reaction materials into said one cavity; other reaction material supply part which supplies said other one of said two reaction materials into said other cavity; one reaction material discharge part which is drilled in a side surface of said one cavity, being away from a bottom surface of said one cavity, and is connected to said one reaction material ejection part; and other reaction material discharge part which is drilled in a side surface of said other cavity, being away from a bottom surface of said other cavity, and is connected to said other reaction material ejection part. ### Claim 9 (depends on 8) The film forming apparatus according to claim 8, wherein said reaction material spray nozzle further includes: one straightening plate which is provided in said one cavity to straighten a flow of said one of said two reaction materials; and other straightening plate which is provided in said other cavity to straighten a flow of said other one of said two reaction materials. ### Claim 10 (depends on 8) The film forming apparatus according to claim 8, wherein each of said one reaction material ejection part and said other reaction material ejection part forms an elongated opening hole having a slit-like shape. ### Claim 11 (depends on 3) The film forming apparatus according to claim 3, wherein said reaction material spray nozzle further includes a temperature adjustment part which adjusts a temperature. ### Claim 12 (depends on 3) The film forming apparatus according to claim 3, wherein said mist spray head further includes an exhaust nozzle which performs an exhaust processing. ### Claim 13 (depends on 12) The film forming apparatus according to claim 12, wherein said exhaust nozzle is configured to perform exhaust processing at a flow rate which is equal to or larger than a sum of a flow rate at which said first material spray nozzle ejects said first material and a flow rate at which said reaction material spray nozzle ejects said reaction material. ### Claim 14 (depends on 12) The film forming apparatus according to claim 12, wherein said first material spray nozzle, said reaction material spray nozzle, and said exhaust nozzle are arranged side by side in a horizontal direction, and at least said exhaust nozzle is located on an outermost side of said mist spray head. ### Claim 15 (depends on 12) The film forming apparatus according to claim 12, wherein said mist spray head further includes an exhaust part which is provided in a side of said mist spray head facing said substrate to perform said exhaust processing on a space between said substrate and said mist spray head, and said exhaust nozzle includes: a third cavity; an exhaust material introduction part which is drilled in a side surface of said third cavity, being away from a bottom surface of said third cavity, and is connected to said exhaust part; and an exhaust material outlet which is provided superior to said exhaust material introduction part to discharge said exhaust material outside said exhaust nozzle from said third cavity. ### Claim 16 (depends on 15) The film forming apparatus according to claim 15, wherein said exhaust nozzle further includes a third straightening part which is provided in said third cavity to straighten a flow of said exhaust material. ### Claim 17 (depends on 15) The film forming apparatus according to claim 15, wherein said exhaust part forms an elongated opening hole having a slit-like shape. ### Claim 18 (depends on 12) The film forming apparatus according to claim 12, wherein said mist spray head further includes: an open ceiling part which is provided between said first material spray nozzle and said exhaust nozzle; and a base plate part which covers said open ceiling part from a side where said substrate is located. ### Claim 19 (depends on 18) The film forming apparatus according to claim 18, wherein said base plate part is provided with an inactive gas ejection part which sprays an inactive gas to said substrate. ### Claim 20 (depends on 19) The film forming apparatus according to claim 19, wherein said inactive gas ejection part forms an elongated opening hole having a slit-like shape. ### Claim 21 (depends on 18) The film forming apparatus according to claim 18, wherein said base plate part includes a temperature adjustment part which adjusts a temperature. ### Claim 22 (depends on 1) The film forming apparatus according to claim 1, wherein in said mist spray head, a frame which is provided in a side of said mist spray head facing said substrate protrudes toward said substrate side. ### Claim 23 (depends on 1) The film forming apparatus according to claim 1, wherein said mist spray head includes a frame in a side facing said substrate, and an inactive gas ejection part which sprays an inactive gas to said substrate is provided in said frame or a region adjacent to said frame. ### Claim 24 (depends on 23) The film forming apparatus according to claim 23, wherein said inactive gas ejection part forms an elongated opening hole having a slit-like shape. ### Claim 25 (depends on 1) The film forming apparatus according to claim 1, wherein said mounting part heats said substrate. ### Claim 26 (depends on 1) The film forming apparatus according to claim 1, wherein said mounting part moves in a horizontal direction. ### Claim 27 (depends on 1) The film forming apparatus according to claim 1, wherein said mist spray head moves in a horizontal direction.