# US 10,117,639 B2 · Ultrasonic sensor as well as probe and electronic apparatus

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- Number: US 10,117,639 B2
- Document ID: US10117639B2
- Status: Granted
- Kind: B2
- Application number: 14/869,094
- Filed: 2015-09-29
- Published: 2016-03-31
- Granted: 2018-11-06
- Earliest claimed: 2014-09-30
- Assignees: Seiko Epson Corporation
- Applicants: Seiko Epson Corporation
- Inventors: Masayoshi Yamada; Hiroshi Matsuda; Tomoaki Nakamura; Hiroshi Ito; Hiromu Miyazawa
- Web page: https://patentgrep.com/patent/US10117639B2

## CPC

- A61B 8/4483: {characterised by features of the ultrasound transducer}
- A61B 8/4427: {Device being portable or laptop-like}
- A61B 8/4444: {related to the probe}
- A61B 8/4488: {the transducer being a phased array}
- A61B 8/4494: {characterised by the arrangement of the transducer elements}
- A61B 8/462: {characterised by constructional features of the display}
- B06B 1/0629: {Square array}
- G01N 29/0654: {Imaging}
- G01N 29/226: {Handheld or portable devices}
- G01N 29/2437: {Piezoelectric probes}
- H10N 30/308: {Membrane type}
- G01N 2291/02475: Tissue characterisation
- G01N 2291/106: one or more transducer arrays
- A61B: DIAGNOSIS; SURGERY; IDENTIFICATION (usefulness limited to only animals A61D)
- B06B: METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, {e.g.} FOR PERFORMING MECHANICAL WORK IN GENERAL (for particular applications, see the relevant subclasses, e.g. B07B1/40, B23Q17/12, B24B31/06; measurement of mechanical vibrations G01H; in direction finding, locating, distance or velocity measuring G01S; {generating seismic energy G01V1/02}; control of mechanical vibrations in general G05D; sound-producing devices, e.g. bells, sirens, whistles G10K, {e.g. methods or devices for transmitting, conducting, or directing sound in general G10K11/00}; generation of electrical oscillations H03B; electromechanical resonators in general H03H; electromechanical transducers {for communication techniques, e.g. microphones, speakers} H04R)
- G01N: INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES (measuring or testing apparatus or processes other than immunoassay, involving enzymes or microorganisms C12M, C12Q)
- H10N: ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR

## Abstract

An ultrasonic sensor includes a vibration plate, a first electrode, a piezoelectric body, and a second electrode. The first electrode is laminated on the vibration plate, that has a length along a surface of the vibration plate in a first direction, and that has a width Wbe along the surface of the vibration plate in a second direction that is orthogonal to the first direction. The width Wbe is not more than the length. The piezoelectric body is laminated on the first electrode and has a width Wpz in the second direction. The second electrode is laminated on the piezoelectric body. A ratio Wbe/Wpz between the width Wbe of the first electrode and the width Wpz of the piezoelectric body is not less than 0.1 and not more than 0.8.

## Claims

### Claim 1

An ultrasonic sensor, comprising:
a vibration plate;
a first electrode laminated on the vibration plate, the first electrode having a length along a surface of the vibration plate in a first direction and a width Wbe along the surface of the vibration plate in a second direction that is orthogonal to the first direction, the width Wbe being not more than the length;
a piezoelectric body that is laminated on the first electrode and that has a width Wpz in the second direction; and
a second electrode laminated on the piezoelectric body,
a ratio Wbe/Wpz between the width Wbe of the first electrode and the width Wpz of the piezoelectric body being not less than 0.1 and not more than 0.8.

### Claim 2 (depends on 1)

The ultrasonic sensor according to claim 1,
wherein the ratio Wbe/Wpz is not more than 0.5.

### Claim 3 (depends on 1)

The ultrasonic sensor according to claim 1,
wherein in a plan view that is orthogonal to the surface of the vibration plate, a distance from an outline of the piezoelectric body to an outline of the vibration plate in the second direction is not less than 0.02 times and not more than 0.3 times a width of the vibration plate.

### Claim 4 (depends on 1)

The ultrasonic sensor according to claim 1,
wherein in the first direction, the second electrode has a smaller width than the piezoelectric body.

### Claim 5 (depends on 1)

The ultrasonic sensor according to claim 1,
wherein an aspect ratio Lcav/Wcav between a width Wcav of the vibration plate in the second direction and a length Lcav of the vibration plate in the first direction is not less than 1 and not more than 2.

### Claim 6 (depends on 1)

The ultrasonic sensor according to claim 1,
wherein in a plan view that is orthogonal to the surface of the vibration plate, an area of overlap between the second electrode and the first electrode is within a range of not less than 1% and not more than 20% with respect to an area of the vibration plate that is defined by an outline of the vibration plate in the plan view.

### Claim 7 (depends on 1)

The ultrasonic sensor according to claim 1,
wherein an outline of the vibration plate has one of a circular shape, a hexagonal shape, and an elliptical shape.

### Claim 8 (depends on 1)

A probe, comprising:
the ultrasonic sensor according to claim 1; and
a housing that supports the ultrasonic sensor.

### Claim 9 (depends on 1)

An electronic apparatus, comprising:
the ultrasonic sensor according to claim 1; and
a processor connected to the ultrasonic sensor and configured to process an output from the ultrasonic sensor.

### Claim 10 (depends on 1)

An ultrasonic imaging apparatus, comprising:
the ultrasonic sensor according to claim 1; and
a display device configured to display an image generated based on an output from the ultrasonic sensor.