Compact three-dimensional memory device having a seal ring and methods of manufacturing the same

A method of manufacturing a semiconductor die, comprising:

• forming a vertically alternating sequence of continuous insulating layers and continuous dielectric material layers having a different composition than the continuous insulating layers over a semiconductor substrate;
• patterning the vertically alternating sequence such that patterned portions of the vertically alternating sequence comprise a pair of in-process alternating stacks of insulating layers and dielectric material layers and such that stepped surfaces of layers of the pair of in-process alternating stacks are provided in a respective terrace region;
• forming a set of contiguous dielectric material portions between the pair of in-process alternating stacks and over the stepped surfaces of the pair of first alternating stacks;
• forming groups of memory stack structures vertically extending through the pair of in-process alternating stacks, wherein each of the memory stack structures comprises a memory film and a vertical semiconductor channel laterally surrounded by the memory film;
• replacing portions of the dielectric material layers in the pair of in-process alternating stacks with electrically conductive layers, wherein the pair of in-process alternating stacks is converted into a pair of first alternating stacks of first portions of the insulating layers and the electrically conductive layers and including respective stepped surfaces in the terrace regions, and a pair of second alternating stacks of second portions of the insulating layers and remaining portions of dielectric material layers laterally adjoined to a respective one of the first alternating stacks, wherein each second portion of the insulating layers is connected to a respective one of the first portions of the insulating layers;
• and
• forming at least one seal ring structure through the pair of second alternating stacks, and surrounding of the pair of first alternating stacks.