X-ray generation device having multiple metal target members

An X-ray generation device comprising:

• an electron gun for emitting an electron beam;
• a target unit having a target buried in a substrate having principal faces opposed to each other;
• a housing at one end side of which the target unit is arranged and at the other end side opposed to the one end side of which the electron gun is arranged, the housing having an electron passage for the electron beam to pass;
• a deflector for deflecting the electron beam passing in the electron passage to enable scanning on the target unit;
• a signal acquisition unit for acquiring an incident signal generated from scanning the target unit with the electron beam;
• and
• a control unit for controlling the deflector, based on the incident signal acquired by the signal acquisition unit,
• wherein the target unit comprises:
• the substrate comprising an electrical insulating material having X-ray permeability
• a plurality of first metal members buried in the substrate and serving as the target;
• and
• one or more second metal members, the one or more second metal members being surrounded by the plurality of first metal members or surrounding at least one of the plurality of first metal members, and the one or more second metal members generating location information by serving as a reference when identifying a location of the at least one of the plurality of first metal members based on the incident signal generated from the scanning with the electron beam,
• wherein the one or more second metal members, when viewed from a normal direction to the principal faces, have a surface area larger than the a surface area of the plurality of first metal members, and have a length in the normal direction shorter than a length of the target, and
• the control unit controls the deflector to scan the electron beam over the target, detects the plurality of first metal members based on the location information of the one or more second metal members acquired from the incident signal, and controls the deflector to irradiate the first metal member with the electron beam and generate X-rays.