Real-time analysis and control of electron beam manufacturing process through x-ray computed tomography
AssigneeLockheed Martin Corporation
InventorSteven Wylie Mitchell
Life of this patent
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Abstract
Electron beam manufacturing processes, and systems that perform the processes, are described that utilize real-time analysis and control of the electron beam manufacturing processes by detecting secondary x-rays that are generated as a result of the electron beam contacting a workpiece. The detected secondary x-rays are used to generate, in real-time, a three-dimensional cross-sectional image of the portion or region of the workpiece surrounding the location contacted by the electron beam. In addition, real-time analysis of the three-dimensional cross-sectional image can be used to detect defects and real-time re-work or correction of defects can be performed by directing an electron beam back to an area with a defect.
Claims9
A process of detecting and correcting a defect during an electron beam manufacturing process on a workpiece, comprising:
- as an electron beam is directed onto a portion of the workpiece with sufficient energy to generate secondary x-rays, detecting the secondary x-rays generated from the electron beam contacting the portion of the workpiece;
- in real-time, using transmission computed tomography to generate from the detected secondary x-rays a three-dimensional cross-sectional image of the workpiece adjacent the portion thereof contacted by the electron beam;
- in real-time, analyzing the generated three-dimensional cross-sectional image to detect a defect in the workpiece;
- and
- thereafter using a correction electron beam to re-work the workpiece containing the detected defect without conducting a separate inspection of the workpiece.
A system of detecting and correcting a defect during an electron beam manufacturing process on a workpiece, comprising:
- an electron beam generator that generates an electron beam;
- a vacuum chamber containing the workpiece;
- an array of x-ray sensors that sense secondary x-rays produced by an electron beam generated by the electron beam generator contacting the workpiece;
- and
- an image generator connected to the array of x-ray sensors that generates a three-dimensional cross-sectional image from detected secondary x-rays using transmission computed tomography.
Dependencies are inferred from the claim text.