Arylcyclobutenes
AssigneesDow Global Technologies LLC, Rohm and Haas Electronic Materials LLC
InventorsDuane R. Romer, Matthew M. Yonkey, Michael K. Gallagher, Michelle Riener
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Abstract
Arylcyclobutene polymers having improved physical properties, such as tensile strength, are provided. Compositions and methods for coating such arylcyclobutene polymers are also provided.
Claims16
A polymer comprising as polymerized units one or more arylcyclobutene first monomers and one or more second monomers having two or more dienophilic moieties and one or more acid moieties chosen from carboxylic acid, protected carboxylic acid, and sulfonic acid;
- wherein the protected carboxylic acid is an ester having a quaternary carbon bonded directly to the alkoxy oxygen of the ester group;
- and wherein the one or more second monomers are free of benzocyclobutene moieties.
A polymer comprising as polymerized units one or more arylcyclobutene first monomers of the formula:
- wherein B1 is an m-valent linking group;
- Ar is a polyvalent aryl group and the carbon atoms of the cyclobutene ring are bonded to adjacent carbon atoms on the same aromatic ring of Ar;
- m is an integer of 1 or more;
- n is an integer of 1 or more;
- each of R1 and R2 is independently a monovalent group;
- the two R1 moieties may be taken together along with the carbon to which they are attached to form a carbonyl or thiocarbonyl;
- and the two R2 moieties may be taken together along with the carbon to which they are attached to form a carbonyl or thiocarbonyl, and one or more second monomers of the formula
- (A)p-Z(E)q
- wherein each A is independently an organic residue having from 1 to 20 carbon atoms and a moiety chosen from carboxylic acid, protected carboxylic acid and sulfonic acid;
- each E is independently an organic residue having from 2 to 20 carbon atoms and one or more dienophilic moieties;
- Z is a chemical bond or an organic residue having from 1 to 30 carbon atoms;
- p is an integer from 1 to 6;
- and q is an integer from 2 to 6;
- wherein wherein the protected carboxylic acid is an ester having a quaternary carbon bonded directly to the alkoxy oxygen of the ester group;
- and wherein the one or more second monomers are free of benzocyclobutene moieties.
Dependencies are inferred from the claim text.