Acoustic wave elements, antenna duplexers and electronic devices
AssigneeSkyworks Filter Solutions Japan Co., Ltd.
InventorsTomoya Komatsu, Hidehito Shimizu, Joji Fujiwara, Tetsuya Tsurunari, Hiroyuki Nakamura
Life of this patent
Estimating the term…
Abstract
An acoustic wave element comprising a lithium tantalate substrate having the Euler angles (φ, θ, ψ), a first component φ satisfying 10°≤φ≤50°; and an electrode disposed on the lithium tantalate substrate and configured to excite a main acoustic wave of wavelength λ, the electrode having a density ρM satisfying ρM≥ρTi where ρTi represents a density of titanium (Ti), and a thickness hM of the electrode satisfies 0.141×exp(0.075ρM)λ≤hM≤0.134λ Embodiments of the present disclosure minimize a thickness of the electrode and suppress a spurious Rayleigh wave signal.
Claims20
An acoustic wave element comprising:
- a lithium tantalate substrate having Euler angles (φ, θ, ψ), a first component φ satisfying 10°≤φ≤50° and a second component θ satisfying −90°−0.5×(−0.2234ρM2+6.9119ρM−8.928)°≤θ≤−90°+0.5×(−0.2234ρM2+6.9119ρM−8.928)°;
- and
- an electrode disposed on the lithium tantalate substrate and configured to excite a main acoustic wave of wavelength λ, where ρMrepresents a density of the electrode, the electrode density ρM satisfying ρM≥ρTi, where ρTi represents a density of titanium (Ti), and a thickness hM of the electrode satisfies 0.141×exp(−0.075ρM)λ≤hM≤0.134λ.
An acoustic wave element comprising:
- a lithium tantalite substrate having Euler angles (φθψ), a first component φ satisfying 10°≤φ≤50° and a third component ψ satisfying −16°≤ψ≤−2.5°;and
- an electrode disposed on the lithium tantalate substrate and configured to excite a main acoustic wave of wavelength λ, the electrode having a density ρM satisfying ρM≤ρTi,where ρTi represents a density of titanium (Ti), and a thickness hM of the electrode satisfies 0.141×exp (−0.075ρM)λ≤hM≤0.134 λ.
Dependencies are inferred from the claim text.