Resonance structure of bulk acoustic wave resonator
AssigneeWin Semiconductors Corp.
InventorsChia-Ta Chang, Re Ching Lin, Yung-Chung Chin, Chih-Feng Chiang
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Abstract
A resonance structure of bulk acoustic wave resonator comprises a bottom electrode, a dielectric layer and a top electrode, wherein the dielectric layer is formed on the bottom electrode; the top electrode is formed on the dielectric layer. A resonance area is defined by the overlapping area of the projection of the bottom electrode, the dielectric layer and the top electrode. The resonance area has a contour. The contour includes at least three curved edges and is formed by connecting the at least three curved edges. Each curved edge is concave to a geometric center of the contour.
Claims31
A resonance structure of bulk acoustic wave resonator comprising:
- a bottom electrode;
- a dielectric layer formed on said bottom electrode;
- and
- a top electrode formed on said dielectric layer;
- wherein a resonance area is defined by the overlapping area of the projection of said bottom electrode, said dielectric layer and said top electrode, said resonance area has a contour, said contour includes at least three curved edges and is formed by connecting said at least three curved edges, wherein each curved edge is concave to a geometric center of said contour,
- wherein said at least three curved edges include even number of curved edges, a chord having a chord length a is formed by connecting two endpoints of each curved edge, a sagitta d is defined as the maximum distance between each curved edge and its corresponding chord, wherein:
- (
- 2
- -
- 1
- 2
- )
-
- a
- <
- d
- ≤
- a
- 2
- .
A resonance structure of bulk acoustic wave resonator comprising:
- a bottom electrode;
- a dielectric layer formed on said bottom electrode;
- and
- a top electrode formed on said dielectric layer;
- wherein a resonance area is defined by the overlapping area of the projection of said bottom electrode, said dielectric layer and said top electrode, said resonance area has a contour, said contour includes at least three curved edges and at least one linking curved edge and is formed by connecting said at least three curved edges and said at least one linking curved edge, wherein each curved edge is concave to a geometric center of said contour, each linking curved edge is convex to said geometric center, wherein a number of said at least three curved edges is greater than or equal to a number of said at least one linking curved edge, two endpoints of each linking curved edge are connected with two curved edges respectively, wherein a ratio of a length of each linking curved edge and a length of any one of the two curved edges adjacent to the linking curved edge is between 1:5 and 1:50.
Dependencies are inferred from the claim text.