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US 10,096,966 B2Granted
Gas laser device and condenser
AssigneeGigaphoton Inc.
InventorsAkira Suwa, Kouji Kakizaki, Hiroaki Tsushima, Tomoyuki Ohkubo, Hiroshi Umeda, Hisakazu Katsuumi
Life of this patent
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Abstract
A gas laser device may include: a laser chamber containing laser gas; a first discharge electrode disposed in the laser chamber; a second discharge electrode disposed to face the first discharge electrode in the laser chamber; and a condenser including a polyimide dielectric and configured to supply power to between the first discharge electrode and the second discharge electrode.
Claims20
A gas laser device comprising:
- a laser chamber containing laser gas;
- a first discharge electrode disposed in the laser chamber;
- a second discharge electrode disposed to face the first discharge electrode in the laser chamber;
- and
- a condenser including a polyimide dielectric and configured to supply power to between the first discharge electrode and the second discharge electrode, wherein:
- the condenser includes a condenser layer composed of a polyimide film constituting the polyimide dielectric and a pair of electrode films disposed on the polyimide film such that part of each of the pair of electrode films faces one another via the polyimide film;
- surfaces of the pair of electrode films are covered with electrical insulating layers;
- the condenser is formed by laminating a plurality of the condenser layers;
- the condenser includes a plurality of heat sink layers disposed between the plurality of condenser layers which are laminated;
- each of the plurality of electrical insulating layers includes at least a first insulating member and a second insulating member whose dielectric breakdown voltage is higher than that of the first insulating member;
- the second insulating member is provided in contact with an electrode film of the pair of electrode films and the polyimide film;
- and
- the first insulating member is provided in contact with the second insulating member and one of the plurality of heat sink layers.
10 more elements
A gas laser device comprising:
- a laser chamber containing laser gas;
- a first discharge electrode disposed in the laser chamber;
- a second discharge electrode disposed to face the first discharge electrode in the laser chamber;
- and
- a condenser including a polyimide dielectric and configured to supply power to between the first discharge electrode and the second discharge electrode, wherein:
- the condenser includes a condenser layer composed of a polyimide film constituting the polyimide dielectric and a pair of electrode films disposed on the polyimide film such that part of each of the pair of electrode films faces one another via the polyimide film;
- surfaces of the pair of electrode films are covered with electrical insulating layers;
- the condenser is formed by laminating a plurality of the condenser layers;
- the condenser includes a plurality of heat sink layers disposed between the plurality of condenser layers which are laminated;
- each of the plurality of electrical insulating layers includes at least a first insulating member as an elastic body and a second insulating member as an inelastic body;
- the second insulating member is provided in contact with an electrode film of the pair of electrode films and the polyimide film;
- and
- the first insulating member is provided in contact with the second insulating member and one of the plurality of heat sink layers.
10 more elements
Dependencies are inferred from the claim text.