Formation of carbon nanotube-containing devices
AssigneeInternational Business Machines Corporation
InventorsAli Afzali-Ardakani, Bharat Kumar, George S. Tulevski
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Abstract
A method of fabricating a carbon nanotube based device, including forming a trench having a bottom surface and sidewalls on a substrate, selectively depositing a bi-functional compound having two reactive moieties in the trench, wherein a first of the two reactive moieties selectively binds to the bottom surface, converting a second of the two reactive moieties to a diazonium salt; and reacting the diazonium salt with a dispersion of carbon nanotubes to form a carbon nanotube layer bound to the bottom surface of the trench.
Claims19
A carbon nanotube based device, comprising:
- a substrate;
- a metal oxide layer on the substrate;
- a monolayer of a functionalized bifunctional compound bonded to the metal oxide layer, wherein the functionalized bifunctional compound includes a hydroxamic acid moiety bonded to the metal oxide layer;
- and
- a plurality of carbon nanotubes chemically bonded to the functionalized bifunctional compound, wherein the functionalized bifunctional compound includes a diazonium moiety chemically bonded to the carbon nanotubes, and a compound other than the functionalized bifunctional compound is not attached to the carbon nanotubes.
A carbon nanotube based device, comprising:
- a substrate;
- a metal oxide layer on the substrate;
- a monolayer of a functionalized bifunctional compound bonded to the metal oxide layer, wherein the functionalized bifunctional compound includes a hydroxamic acid moiety bonded to the metal oxide layer;
- and
- a plurality of carbon nanotubes chemically bonded to the functionalized bifunctional compound, wherein the carbon nanotubes have a length in the range of about 100 nm to about 2000 nm, wherein the functionalized bifunctional compound includes a diazonium moiety chemically bonded to the carbon nanotubes, and a compound other than the functionalized bifunctional compound is not attached to the carbon nanotubes.
A carbon nanotube based device, comprising:
- a semiconductor substrate;
- a metal oxide layer on the semiconductor substrate, wherein the metal oxide layer is selected from the group consisting of HfO2, ZrO2, HfSiO, HfSiON, TiO2, Y2O3, Al2O3, Ta2O5, InBaTiO3, BaSrTiO3 (BST), and SrTiO3;
- a monolayer of a functionalized bifunctional compound bonded to the metal oxide layer, wherein the functionalized bifunctional compound includes a hydroxamic acid moiety at one end of the functionalized bifunctional compound bonded to the metal oxide layer, and a diazonium moiety on the opposite end of the functionalized bifunctional compound;
- and
- a plurality of carbon nanotubes chemically bonded to the diazonium moiety of the functionalized bifunctional compound without having another compound with a functional group attached to the carbon nanotubes, wherein the carbon nanotubes have a length in the range of about 100 nm to about 2000 nm.
Dependencies are inferred from the claim text.