Method for evaluating piezoelectric film, piezoelectric element, liquid ejecting head, and liquid ejecting apparatus
AssigneeSeiko Epson Corporation
InventorsMasayuki Omoto, Toshiki Hara, Ichiro Asaoka
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AssigneeSeiko Epson Corporation
InventorsMasayuki Omoto, Toshiki Hara, Ichiro Asaoka
Estimating the term…
A method for evaluating a piezoelectric film containing a perovskite oxide containing a lead atom, a zirconium atom, and a titanium atom, and the method includes a process of irradiating the piezoelectric film with X-rays to acquire an extended X-ray absorption fine structure (EXAFS) spectrum at the L3 absorption edge of the lead atom, a process of Fourier-transforming the extended X-ray absorption fine structure (EXAFS) spectrum to acquire a radial distribution function, and a process of acquiring the intensity of a first peak having a distance from the lead atom of 1.4±0.2 Å, the intensity of a second peak having a distance from the lead atom of 2.0±0.2 Å, and the intensity of a third peak having a distance from the lead atom of 2.6±0.2 Å from the radial distribution function, and then evaluating the film quality of the piezoelectric film from a value obtained by dividing the intensity of the first peak by the intensity of the second peak and a value obtained by dividing the intensity of the first peak by the intensity of the third peak.
A method for evaluating a piezoelectric film containing a perovskite oxide containing a lead atom, a zirconium atom, and a titanium atom, the method comprising:
A piezoelectric element having a piezoelectric film containing a perovskite oxide containing a lead atom, a zirconium atom, and a titanium atom, wherein
A liquid ejecting head comprising a nozzle opening, a pressure generating chamber brought into communication with the nozzle opening, and a piezoelectric element and ejecting liquid from the nozzle opening by an operation of the piezoelectric element, wherein
Dependencies are inferred from the claim text.